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Optics Express

Optics Express

  • Vol. 16, Iss. 16 — Aug. 4, 2008
  • pp: 11975–11986

Absolute profile measurement of large moderately flat optical surfaces with high dynamic range

A. Wiegmann, M. Schulz, and C. Elster  »View Author Affiliations


Optics Express, Vol. 16, Issue 16, pp. 11975-11986 (2008)
http://dx.doi.org/10.1364/OE.16.011975


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Abstract

We present a novel procedure for absolute, highly-accurate profile measurement with high dynamic range for large, moderately flat optical surfaces. The profile is reconstructed from many sub-profiles measured by a small interferometer which is scanned along the specimen under test. Additional angular and lateral distance measurements are used to account for the tilt of the interferometer and its precise lateral location during the measurements. Accurate positioning of the interferometer is not required. The algorithm proposed for the analysis of the data allows systematic errors of the interferometer and height offsets of the scanning stage to be eliminated and it does not reduce the resolution. By utilizing a realistic simulation scenario we show that accuracies in the nanometer range can be reached.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(100.3008) Image processing : Image recognition, algorithms and filters

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 14, 2008
Revised Manuscript: June 4, 2008
Manuscript Accepted: June 4, 2008
Published: July 25, 2008

Citation
A. Wiegmann, M. Schulz, and C. Elster, "Absolute profile measurement of large moderately flat optical surfaces with high dynamic range," Opt. Express 16, 11975-11986 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-16-11975


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References

  1. D. Malacara, Optical Shop Testing, (John Wiley & Sons Inc, 1992).
  2. R. Freimann, B. Dorband, and F. Holler, "Absolute measurement of non-comatic aspheric surface errors," Opt. Commun. 161, 106-114 (1999). [CrossRef]
  3. U. Griesmann, "Three-flat test solutions based on simple mirror symmetry," Appl. Opt. 45, 5856-5865 (2006). [CrossRef] [PubMed]
  4. M. Beyerlein, N. Lindlein and J. Schwider, "Dual-wave-front computer-generated holograms for quasi-absolute testing of aspherics," Appl. Opt. 41, 2440-2447 (2002). [CrossRef] [PubMed]
  5. S. Reichelt and H. J. Tiziani, "Twin-CGHs for absolute calibration in wavefront testing interferometry," Opt. Commun. 220, 23-32 (2003). [CrossRef]
  6. S. Reichelt, C. Pruss and H. J. Tiziani, "Absolute testing of aspheric surfaces," Optical Fabrication, Testing, and Metrology 45, 252-263 (2004).
  7. F. Simon, G. Khan, K. Mantel, N. Lindlein and J. Schwider, "Quasi-absolute measurement of aspheres with a combined diffractive optical element as reference," Appl. Opt. 45, 8606-8612 (2006). [CrossRef] [PubMed]
  8. T. W. Stuhlinger, "Subaperture optical testing - Experimental verification," Proc. SPIE. 656, 118-127 (1986).
  9. M. Sjoedahl and B. F. Oreb, "Stitching interferometric measurement data for inspection of large optical components," Opt. Eng. 41, 403-408 (2002). [CrossRef]
  10. J. Fleig, P. Dumas, P. E. Murphy and G. W. Forbes, "An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces, "Proc. SPIE. 5188, 296-307 (2003). [CrossRef]
  11. K. Yamauchi,K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa and Y. Mori, "Microstitching interferometry for x-ray reflective optics," Rev. Sci. Instrum. 74,2894-2898 (2003). [CrossRef]
  12. C. Elster, I. Weingrtner and M. Schulz, "Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors," Prec. Eng. 30,3 2-38 (2006). [CrossRef]
  13. M. Schulz and C. Elster, "Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution," Opt. Eng. 45, 060503-1-060503-3 (2006). [CrossRef]
  14. A. Wiegmann, C. Elster, and R. D. Geckeler and M. Schulz, "Stability analysis for the TMS method: Influence of high spatial frequencies," Proc. SPIE. 6616, 661618 (2007). [CrossRef]
  15. W. H. Press, P. B. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in C : The Art of Scientific Computing, (Cambridge University Press, 1992).
  16. B. Jahne, Digitale Bildverarbeitung, (Springer, 2005).
  17. B. Doerband and J. Hetzler, "Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)," Proc. SPIE. 5878, 587806 (2005). [CrossRef]

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