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Optics Express

Optics Express

  • Vol. 16, Iss. 16 — Aug. 4, 2008
  • pp: 11975–11986

Absolute profile measurement of large moderately flat optical surfaces with high dynamic range

A. Wiegmann, M. Schulz, and C. Elster  »View Author Affiliations

Optics Express, Vol. 16, Issue 16, pp. 11975-11986 (2008)

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We present a novel procedure for absolute, highly-accurate profile measurement with high dynamic range for large, moderately flat optical surfaces. The profile is reconstructed from many sub-profiles measured by a small interferometer which is scanned along the specimen under test. Additional angular and lateral distance measurements are used to account for the tilt of the interferometer and its precise lateral location during the measurements. Accurate positioning of the interferometer is not required. The algorithm proposed for the analysis of the data allows systematic errors of the interferometer and height offsets of the scanning stage to be eliminated and it does not reduce the resolution. By utilizing a realistic simulation scenario we show that accuracies in the nanometer range can be reached.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(100.3008) Image processing : Image recognition, algorithms and filters

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 14, 2008
Revised Manuscript: June 4, 2008
Manuscript Accepted: June 4, 2008
Published: July 25, 2008

A. Wiegmann, M. Schulz, and C. Elster, "Absolute profile measurement of large moderately flat optical surfaces with high dynamic range," Opt. Express 16, 11975-11986 (2008)

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