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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 17 — Aug. 18, 2008
  • pp: 13456–13464

A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient

Kang Hyuk Kwon, Bong Soo Kim, and Kyuman Cho  »View Author Affiliations

Optics Express, Vol. 16, Issue 17, pp. 13456-13464 (2008)

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A new scanning microscope scheme which can map both phase and amplitude change of the probe beam is introduced. We will show that the true surface structure can be imaged by using the results of phase measurements while the amplitude image represents the map of the magnitude of the effective local reflection coefficient (ELRC). Relation between the surface structure and the ELRC is discussed. Spatial resolution is 0.67µm which is limited by diffraction and the precision for measuring point-to-point variation of the average height of the surface structure is a few nanometers. Potential of this microscopy on surface diagnostics is discussed.

© 2008 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(180.3170) Microscopy : Interference microscopy
(180.5810) Microscopy : Scanning microscopy
(110.1080) Imaging systems : Active or adaptive optics

ToC Category:

Original Manuscript: June 24, 2008
Revised Manuscript: August 2, 2008
Manuscript Accepted: August 5, 2008
Published: August 15, 2008

Kang Hyuck Kwon, Bong Soo Kim, and Kyuman Cho, "A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient," Opt. Express 16, 13456-13464 (2008)

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