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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 18 — Sep. 1, 2008
  • pp: 13901–13907

A deterministic optical figure correction technique that preserves precision-polished surface quality

John Arkwright, Jan Burke, and Mark Gross  »View Author Affiliations

Optics Express, Vol. 16, Issue 18, pp. 13901-13907 (2008)

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A deterministic surface correction technique has been used to improve the surface figure of two fused silica optical flats over a diameter of 60 mm with no measurable degradation in their surface quality at spatial frequencies of ≤750 mm-1. The surface corrections were achieved by selective ion beam sputtering (IBS) deposition of an index-matched dielectric layer through a multi-aperture mask. Two flats were corrected, one finished on a pitch lap, the other on a Teflon lap to give two distinctly different surface roughness characteristics. The microroughnesses measured on a TOPO-WYKO profilometer were 3.0 Å and 7.2 Å respectively. Both optics were improved to better than λ/100 peak-to-valley and in each case the surface correction process preserved or potentially improved the microroughness of the optic.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 17, 2008
Revised Manuscript: August 9, 2008
Manuscript Accepted: August 9, 2008
Published: August 22, 2008

John Arkwright, Jan Burke, and Mark Gross, "A deterministic optical figure correction technique that preserves precision-polished surface quality," Opt. Express 16, 13901-13907 (2008)

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