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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 19 — Sep. 15, 2008
  • pp: 15090–15096

3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry

Yan Tang, Xianyu Su, Yuankun Liu, and Hailong Jing  »View Author Affiliations


Optics Express, Vol. 16, Issue 19, pp. 15090-15096 (2008)
http://dx.doi.org/10.1364/OE.16.015090


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Abstract

An advanced Phase Measuring Deflectometry(PMD) is proposed to measure the three dimensional (3D) shape of the aspheric mirror. In the measurement process, a liquid crystal display(LCD)screen displaying sinusoidal fringe patterns and a camera observing the fringe patterns reflected via the tested mirror, are moved along the tested mirror optical axis, respectively. At each movement position, the camera records the fringe patterns of the screen located at two different positions. Using these fringe patterns, every camera pixels can find a corresponding point on the tested mirror and gets its coordinate and slope. By integrating, the 3D shape of the tested mirror can be reconstructed. Compared with the traditional PMD, this method doesn’t need complex calibration and can measure the absolute height of the aspheric mirror which has large range of surface geometries unambiguously. Furthermore, this method also has strong anti-noise ability. Computer simulations and preliminary experiment validate the feasibility of this method.

© 2008 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.5700) Instrumentation, measurement, and metrology : Reflection
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.1250) Optical design and fabrication : Aspherics

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 7, 2008
Revised Manuscript: August 13, 2008
Manuscript Accepted: August 14, 2008
Published: September 10, 2008

Citation
Yan Tang, Xianyu SU, Yuankun Liu, and Hailong Jing, "3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry," Opt. Express 16, 15090-15096 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-19-15090


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References

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