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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 21 — Oct. 13, 2008
  • pp: 16516–16522

Fabrication and characterization of optimized corner-cut square microresonators

Elton Marchena, Shouyuan Shi, and Dennis Prather  »View Author Affiliations

Optics Express, Vol. 16, Issue 21, pp. 16516-16522 (2008)

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In this paper we report the fabrication and characterization of waveguide coupled square resonators with modified corners, in particular the corner-cut square resonator. We employ rigorous FDTD analysis to identify an optimal corner-cut length and compare this with our experimental findings. Two- and three dimensional FDTD analysis is also used to optimize the coupling gap and the width of the coupling waveguide. Fabrication of the square microresonators on silicon-on-insulators by conventional E-beam lithography and dry etching techniques will be discussed in detail. The characterization of these corner-cut square microresonators shows good performance and excellent agreement with the rigorous electromagnetic simulations.

© 2008 Optical Society of America

OCIS Codes
(140.4780) Lasers and laser optics : Optical resonators
(230.0230) Optical devices : Optical devices
(230.5750) Optical devices : Resonators
(260.5740) Physical optics : Resonance
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Optical Devices

Original Manuscript: September 2, 2008
Revised Manuscript: September 27, 2008
Manuscript Accepted: September 28, 2008
Published: October 1, 2008

Elton Marchena, Shouyuan Shi, and Dennis Prather, "Fabrication and characterization of optimized corner-cut square microresonators," Opt. Express 16, 16516-16522 (2008)

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