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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 22 — Oct. 27, 2008
  • pp: 17237–17242

Vertical multiple-slot waveguide ring resonators in silicon nitride

Laurent Vivien, Delphine Marris-Morini, Amadeu Griol, Kristinn B. Gylfason, Daniel Hill, Jesús Álvarez, Hans Sohlström, Juan Hurtado, David Bouville, and Eric Cassan  »View Author Affiliations


Optics Express, Vol. 16, Issue 22, pp. 17237-17242 (2008)
http://dx.doi.org/10.1364/OE.16.017237


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Abstract

This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 µm, 90 µm and 110 µm) have been carried out for TE and TM polarizations at the wavelength of 1.3 µm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

© 2008 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(070.5753) Fourier optics and signal processing : Resonators

ToC Category:
Integrated Optics

History
Original Manuscript: June 30, 2008
Revised Manuscript: August 11, 2008
Manuscript Accepted: August 12, 2008
Published: October 13, 2008

Citation
Laurent Vivien, Delphine Marris-Morini, Amadeu Griol, Kristinn B. Gylfason, Daniel Hill, Jesús Alvarez, Hans Sohlström, Juan Hurtado, David Bouville, and Eric Cassan, "Vertical multiple-slot waveguide ring resonators in silicon nitride," Opt. Express 16, 17237-17242 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-22-17237


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References

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