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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 22 — Oct. 27, 2008
  • pp: 17295–17301

Normal vector method for the RCWA with automated vector field generation

Peter Götz, Thomas Schuster, Karsten Frenner, Stephan Rafler, and Wolfgang Osten  »View Author Affiliations


Optics Express, Vol. 16, Issue 22, pp. 17295-17301 (2008)
http://dx.doi.org/10.1364/OE.16.017295


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Abstract

Early formulations of the RCWA yield, implicated by the erroneous application of factorization rules to discrete Fourier transformations, poor convergence in certain cases. An explanation for this finding and an approach to overcome the problem for crossed gratings was first given by Li [J. Opt. Soc. Am. A 13, 1870 (1996) and 14, 2758 (1997)]. A further improvement was achieved by Schuster et al. [J. Opt. Soc. Am. A 24, 2880 (2007)], using a structure dependent normal vector (NV) field. While it is trivial to create those NV fields for simple geometrical shapes, to our knowledge an appropriate algorithm for arbitrary shapes does not exist, yet. In this work we present such an algorithm.

© 2008 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(260.1960) Physical optics : Diffraction theory

ToC Category:
Diffraction and Gratings

History
Original Manuscript: August 21, 2008
Revised Manuscript: October 8, 2008
Manuscript Accepted: October 10, 2008
Published: October 13, 2008

Citation
Peter Götz, Thomas Schuster, Karsten Frenner, Stephan Rafler, and Wolfgang Osten, "Normal vector method for the RCWA with automated vector field generation," Opt. Express 16, 17295-17301 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-22-17295


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References

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