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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 24 — Nov. 24, 2008
  • pp: 19706–19711

Laser micro/nano fabrication in glass with tunable-focus particle lens array

Z. B. Wang, Wei Guo, A. Pena, D. J. Whitehead, B. S. Luk’yanchuk, Lin. Li, Z. Liu, Y. Zhou, and M. H. Hong  »View Author Affiliations


Optics Express, Vol. 16, Issue 24, pp. 19706-19711 (2008)
http://dx.doi.org/10.1364/OE.16.019706


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Abstract

Based on medium-tuned optical field enhancement effect around a self-assembled particle-lens array (PLA) irradiated with a femtosecond (fs) laser source, we demonstrated that high-precision periodical array of micro/nano-structures can be readily fabricated on glass surface or inside glass in large areas in parallel without any cracks or debris. The technique has potential for rapid fabrication of three-dimensional structures in multiple layers inside glass.

© 2008 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(350.3850) Other areas of optics : Materials processing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 22, 2008
Revised Manuscript: November 6, 2008
Manuscript Accepted: November 6, 2008
Published: November 13, 2008

Citation
Z. B. Wang, Wei Guo, A. Pena, D. J. Whitehead, B. S. Luk'yanchuk, Lin. Li, Z. Liu, Y. Zhou, and M. H. Hong, "Laser micro/nano fabrication in glass with tunable-focus particle lens array," Opt. Express 16, 19706-19711 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-24-19706


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References

  1. H. R. Qiu, K. Miura, and K. Hirao, "Femtosecond laser-induced microfeatures in glasses and their applications," J. Non-Cryst. Solids 354, 1100-1111 (2008). [CrossRef]
  2. S. Theppakuttai and S. Chen, "Nanoscale surface modification of glass using a 1064 nm pulsed laser," Appl. Phys. Lett. 83, 758-760 (2003). [CrossRef]
  3. R. Piparia, E. W. Rothe, and R. J. Baird, "Nanobumps on silicon created with polystyrene spheres and 248 or 308 nm laser pulses," Appl. Phys. Lett.  89, 223113.1-223113.3 (2006). [CrossRef]
  4. J.-I. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, "Multiple-spot parallel processing for laser micronanofabrication," Appl. Phys. Lett. 86, 044102 (2005). [CrossRef]
  5. H. Yang, C. K. Chao, M. K. Wei, and C. P. Lin, "High fill-factor microlens array mold insert fabrication using a thermal reflow process," J. Micromech. Microeng. 14, 1197-1204 (2004). [CrossRef]
  6. S. M. Huang, M. H. Hong, B. Lukiyanchuk, and T. C. Chong, "Nanostructures fabricated on metal surfaces assisted by laser with optical near-field effects," Appl. Phys. A 77, 293-295 (2003).
  7. B. S. Luk'Yanchuk, Z. B. Wang, W. D. Song, and M. H. Hong, "Particle on surface: 3D-effects in dry laser cleaning," Appl. Phys. A 79, 747-751 (2004). [CrossRef]
  8. Y. Zhou, M. H. Hong, J. Y. H. Fuh, L. Lu, B. S. Lukyanchuk, and Z. B. Wang, "Near-field enhanced femtosecond laser nano-drilling of glass substrate," J. Alloys Compd. 449, 246-249 (2008). [CrossRef]
  9. Y. Zhou, M. H. Hong, J. Y. H. Fuh, L. Lu, B. S. Luk'yanchuk, Z. B. Wang, L. P. Shi, and T. C. Chong, "Direct femtosecond laser nanopatterning of glass substrate by particle-assisted near-field enhancement," Appl. Phys. Lett. 88, 023110 (2006). [CrossRef]
  10. G. Mie, "Beiträge zur Optik trüber Medien, speziell kolloidaler Metallösungen," Ann. Phys. (Leipzig) 25, 377-445 (1908). [CrossRef]
  11. Z. B. Wang, Optical resonance and near field effects: small particles under laser irradiation, Normal, Ph.D thesis (National University of Singapore, Singapore, 2005).
  12. C. Hafner, The Generalized Multiple Multipole Technique for Computational Electromagnetics (Artech, Boston, 1990).
  13. W. H. Yang, G. C. Schatz, and R. P. Vanduyne, "Discrete Dipole Approximation for Calculating Extinction and Raman Intensities for Small Particles with Arbitrary Shapes," J. Chem. Phys. 103, 869-875 (1995). [CrossRef]
  14. J. M. Jin, The Finite Element Method in Electromagnetics, 2nd ed., (John Wiley & Sons, New York, 2002).
  15. A. Taflove, Computational Electrodynamics: The Finite-Difference Time-Domain Method, 3rd ed. (Artech House, 2005).
  16. T. Weiland, "Time Domain Electromagnetic Field Computation with Finite Difference Methods," Int. J. Numer. Model 9, 295-319 (1996). [CrossRef]
  17. Computer Simulation Technology: CST Microwave Studio (http://www.cst.com); Remote license access provided by one of the author B.S. Lukiyanchuk in DSI, Singapore, (2007).
  18. Z. B. Wang, W. Guo, B. S. Luk'yanchuk, D. J. Whitehead, L. Li, and Z. Liu, "Optical Near-field Interaction between Neighboring Micro/Nano-particles," J. Laser Micro/Nanoeng.  3, 14-18 (2008). [CrossRef]
  19. Y. Hayasaki and D. Kawamura, "High-density bump formation on a glass surface using femtosecond laser processing in water," Appl. Phys. A 87, 691-695 (2007). [CrossRef]
  20. W. Guo, Z. B. Wang, L. Li, D. J. Whitehead, B. S. Luk'yanchuk, and Z. Liu, "Near-field laser parallel nanofabrication of arbitrary-shaped patterns," Appl. Phys. Lett. 90, 243101 (2007). [CrossRef]

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