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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 3 — Feb. 4, 2008
  • pp: 1517–1522

Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching

Dirk Wortmann, Jens Gottmann, Nelli Brandt, and Herbert Horn-Solle  »View Author Affiliations


Optics Express, Vol. 16, Issue 3, pp. 1517-1522 (2008)
http://dx.doi.org/10.1364/OE.16.001517


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Abstract

The fabrication of microchannels and self-assembled nanostructures in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. While the dimensions in two directions are on a micro- respectively nanoscale, feature lengths of up to 1 mm are achieved. This comes out to aspect ratios of more than 1000. This fabrication technique is potentially usable for photonic crystal based integrated optical elements or microfluidic devices for applications in life science, biology or chemistry.

© 2008 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors
(220.4241) Optical design and fabrication : Nanostructure fabrication
(260.7120) Physical optics : Ultrafast phenomena

ToC Category:
Laser Micromachining

History
Original Manuscript: November 26, 2007
Revised Manuscript: January 15, 2008
Manuscript Accepted: January 16, 2008
Published: January 22, 2008

Virtual Issues
Vol. 3, Iss. 3 Virtual Journal for Biomedical Optics

Citation
Dirk Wortmann, Jens Gottmann, Nelli Brandt, and Herbert Horn-Solle, "Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching," Opt. Express 16, 1517-1522 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-3-1517


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References

  1. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten waveguides in various glasses with ul-trashort pulse laser," Appl. Phys. Lett. 71,3329-3331 (1997). [CrossRef]
  2. M. Will, S. Nolte, B. Chichkov and A. Tünnermann "Optical properties of waveguides fabricated in fused silica by fs-laser pulses," Appl. Opt. 41, No.21, 4360-4364, (2002). [CrossRef] [PubMed]
  3. D. Wortmann, M. Ramme, and J. Gottmann, "Refractive index modification using fs-laser double pulses," Opt. Express 15, 10149-10153 (2007). [CrossRef] [PubMed]
  4. C. Cerullo, R. Osellame, S. Tacche, M. Marangoni, D. Polli, R. Ramponi, P. Laporta and S. DeSilvestri, "Femtosecond micromachining of symmetric waveguides at 1.5µm by astigmatic beam focusing," Opt. Lett. 27, 1938-1940 (2002). [CrossRef]
  5. D. Wortmann and J. Gottmann, "Fs-laser structuring of ridge waveguides," accepted by Appl. Phys. A.
  6. Y. Bellouard, A. Said, and P. Bado, "Integrating optics and micro-mechanics in a single substrate:a step toward monolithic integration in fused silica," Opt. Express 13, 6635-6644 (2005). [CrossRef] [PubMed]
  7. S. Matsuo, Y. Shichijo, T. Tomita, and S. Hashimoto, "Laser fabrication of Ship-in-a-bottle Microstructures in Sapphire," JLMN 2, 114-116 (2007). [CrossRef]
  8. K. Sugioka, Y. Cheng, and K. Midorikawa, "Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture," Appl. Phys. A 81, 1-10 (2005). [CrossRef]
  9. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A 84, 47-61 (2006). [CrossRef]
  10. S. Juodkazis, H. Misawa, E. Vanagas, and M. Li, "Simulation of light interaction with nano-particle of metal," JLMN 1, (2006).
  11. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "High-resolution study of photoinduced modification in fused silica produced by a tightly focused femtosecond laser beam in the presence of aberrations," J. Appl. Phys. 98, 013517 (2005). [CrossRef]
  12. P. Kazansky, W. Yang, E. Bricci, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, "Quill writing with ultrashort light pulses in transparent materials," Appl. Phys. Lett. 90, 151129 (2007). [CrossRef]
  13. Y. Bellouard, A. Said, and P. Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12, 2120-2129 (2004). [CrossRef] [PubMed]
  14. S. Juodkazis, K. Nishimura, H. Misawa, and J. Nishi, "Control over the crystalline state of the sapphire," Adv. Mater. 18, 1361 (2006). [CrossRef]
  15. M. Mazuli, S. Juodkazis, T. Ebisui, S. Matsuo, and H. Misawa, "Structural characterization of shock-affected sapphire," Appl. Phys. A,  86, 197-200 (2007). [CrossRef]
  16. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "Polarization selective etching in femtosecond laser assisted microfluidic channel fabrication in fused silica," Opt. Lett. 30, 1867-1869 (2005). [CrossRef] [PubMed]
  17. W. Yang, E. Bricci, P. Kazansky, J. Bovatsek, and A. Arai, "Self-assembled periodic sub-wavelength structures by femtosecond laser direct writing," Opt. Express 14, 10117-10124 (2006). [CrossRef] [PubMed]
  18. V. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum "Optically produced arrays of planar nanostructures inside fused silica," Phys. Rev. Lett. 96, 057404 (2006). [CrossRef] [PubMed]
  19. C. Hnatovsky, R. S. Taylor, P. P. Rajeev, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "Pulse duration dependence of femtosecond-laser fabricated nanogratings in fused silica," Appl. Phys. Lett. 8714104 (2005). [CrossRef]

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