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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 4 — Feb. 18, 2008
  • pp: 2621–2627

Low-loss suspended quantum well waveguides

T. H. Stievater, W. S. Rabinovich, D. Park, J. B. Khurgin, S. Kanakaraju, and C. J. K. Richardson  »View Author Affiliations

Optics Express, Vol. 16, Issue 4, pp. 2621-2627 (2008)

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We have used surface micromachining to fabricate suspended InGaAs/InGaAsP quantum well waveguides that are supported by lateral tethers. The average measured TE propagation loss in our samples is 4.1 dB/cm, and the average measured TE loss per tether pair is 0.21 dB. These measurements are performed at wavelengths in the optical L-band, just 125 nm below the quantum well band gap.

© 2008 Optical Society of America

OCIS Codes
(160.2100) Materials : Electro-optical materials
(160.6000) Materials : Semiconductor materials
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Optical Devices

Original Manuscript: December 4, 2007
Revised Manuscript: February 4, 2008
Manuscript Accepted: February 7, 2008
Published: February 11, 2008

T. H. Stievater, W. S. Rabinovich, D. Park, J. B. Khurgin, S. Kanakaraju, and C. J. K. Richardson, "Low-loss suspended quantum well waveguides," Opt. Express 16, 2621-2627 (2008)

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  1. T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, and O. B. Spahn, "Planar microoptomechanical waveguide switches," IEEE J. Sel. Top. Quantum Electron. 8,64-72 (2002). [CrossRef]
  2. M.W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. T. Ho, and R. Ghodssi, "InP-Based optical waveguide MEMS switches with evanescent coupling mechanism," J. Microelectromech. Syst. 14,1070-1081 (2005). [CrossRef]
  3. M. W. Pruessner, N. Siwak, K. Amarnath, S. Kanakaraju, W. H. Chuang, and R. Ghodssi, "InP-Based optical waveguide MEMS switches with evanescent coupling mechanism," J. Micromech. Microeng. 16,832-842 (2006). [CrossRef]
  4. J. R. D. Whaley, M. H. Kwakernaak, V. B. Khalfin, S. A. Lipp,W. K. Chan, H. An, and J. H. Abeles, "Observation of low optical overlap mode propagation in nanoscale indium phosphide membrane waveguides," Appl. Phys. Lett. 90, 011114 (2007). URL http://link.aip.org/link/?APL/90/011114/1. [CrossRef]
  5. I. D. Vlaminck, J. Roels, D. Taillaert, D. V. Thourhout, R. Baets, L. Lagae, and G. Borghs, "Detection of nanomechanical motion by evanescent light wave coupling," Appl. Phys. Lett. 90, 233116 (2007). URL http://link.aip.org/link/?APL/90/233116/1. [CrossRef]
  6. O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, and I. Kim, "Two-dimensional photonic band-gap defect mode laser," Science 284,1819-1821 (1999). [CrossRef] [PubMed]
  7. P. G. Datskos, S. Rajic, L. R. Senesac, and I. Datskou, "Fabrication of quantum well microcantilever photon detectors," Ultramicroscopy 86,191-206 (2001). [CrossRef] [PubMed]
  8. T. H. Stievater, W. S. Rabinovich, J. B. Boos, D. S. Katzer, and M. L. Biermann, "Laterally patterned band structure in micromachined semiconductors," Appl. Phys. Lett. 83, 4933-4935 (2003). URL http://link.aip.org/link/?APL/83/4933/1. [CrossRef]
  9. T. H. Stievater, W. S. Rabinovich, D. Park, P. G. Goetz, J. B. Boos, D. S. Katzer, M. L. Biermann, S. Kanakaraju, and L. C. Calhoun, "Strain relaxation, band-structure deformation, and optical absorption in free-hanging quantum-well microstructures," J. Appl. Phys. 97, 114326 (2005). URL http://link.aip.org/link/?JAP/97/114326/1. [CrossRef]
  10. D. P. Kelly, M.W. Pruessner, K. Amarnath, M. Datta, S. Kanakaraju, L. C. Calhoun, and R. Ghodssi, "Monolithic suspended optical waveguides for InP MEMS," IEEE Photon. Technol. Lett. 16,1298-1300 (2004). [CrossRef]
  11. A. Scherer, O. Painter, B. D’Urso, R. Lee, and A. Yariv, "InGaAsP photonic band gap crystal membrane microresonators," pp. 3906-3910 (AVS, 1998). URL http://link.aip.org/link/?JVB/16/3906/1.
  12. D. Park, T. H. Stievater, W. S. Rabinovich, N. Green, S. Kanakaraju, and L. C. Calhoun, "Characterization of hydrogen silsesquioxane as a Cl[sub 2]/BCl[sub 3] inductively coupled plasma etch mask for air-clad InP-based quantum well waveguide fabrication," pp. 3152-3156 (AVS, 2006). URL http://link.aip.org/link/?JVB/24/3152/1.
  13. R. J. Deri and E. Kapon, "Low-loss III-V semiconductor optical waveguides," IEEE J. Quantum Electron. 27,626-640 (1991). [CrossRef]
  14. M.-K. Chin, C.-W. Lee, S.-Y. Lee, and S. Darmawan, "High-index-contrast waveguides and devices," Appl. Opt. 44,3077-3086 (2005). [CrossRef] [PubMed]
  15. V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1304 (2003). URL http://ol.osa.org/abstract.cfm?URI=ol-28-15-1302. [CrossRef] [PubMed]
  16. P. Kramper, M. Agio, C. M. Soukoulis, A. Birner, F. M¨uller, R. B. Wehrspohn, U. G¨osele, and V. Sandoghdar, "Highly Directional Emission from Photonic Crystal Waveguides of Subwavelength Width," Phys. Rev. Lett. 92, 113903 (2004). URL http://link.aps.org/abstract/PRL/v92/e113903. [CrossRef] [PubMed]
  17. T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, "A Surface-Normal Coupled-Quantum-Well Modulator at 1.55 Microns," IEEE Photon. Technol. Lett. 16,2036-2038 (2004). [CrossRef]

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Fig. 1. Fig. 2. Fig. 3.

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