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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 3786–3797

Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces

Jeong-Yeol Han, Sug-Whan Kim, Inwoo Han, and Geon-Hee Kim  »View Author Affiliations


Optics Express, Vol. 16, Issue 6, pp. 3786-3797 (2008)
http://dx.doi.org/10.1364/OE.16.003786


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Abstract

A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2 ± 2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.

© 2008 Optical Society of America

OCIS Codes
(220.1920) Optical design and fabrication : Diamond machining
(220.4610) Optical design and fabrication : Optical fabrication
(240.5770) Optics at surfaces : Roughness
(350.1260) Other areas of optics : Astronomical optics
(350.6090) Other areas of optics : Space optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: January 18, 2008
Revised Manuscript: February 16, 2008
Manuscript Accepted: February 19, 2008
Published: March 7, 2008

Citation
Jeong-Yeol Han, Sug-Whan Kim, Inwoo Han, and Geon-Hee Kim, "Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces," Opt. Express 16, 3786-3797 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-6-3786


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