Design and fabrication of a micro-optic switch

doi:10.1364/OE.16.006324

Design and fabrication of a micro-optic switch

Wei Li, Jingqiu Liang, Zhongzhu Liang, Xiaoqi Li, Weibiao Wang, Yanchao Zhong, and Degui Sun »View Author Affiliations

Optics Express, Vol. 16, Issue 9, pp. 6324-6330 (2008)
http://dx.doi.org/10.1364/OE.16.006324

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Abstract
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References (9)
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Abstract

In this paper, a polyimide cantilever micro-optic switch of electromagnetic actuation is studied. The model of the electromagnetic actuation is proposed and simulated using finite element method. The best efficiency of electromagnetic force for switching operations is obtained and the parameters of the coil and magnet are determined. During the practical fabrication, the thick resist patterning and electroplating technology is employed to fabricate the electromagnetic actuation. Both the theoretical and experimental results indicate that the balanceable distance of the polyimide cantilever for implementing optical switches is about 1.28 mm with 0.4 A current pulse input, The final experimental results of optical performance for the fabricated micro-optic 1×4 switch include the switching time of about 20 ms and the insertion loss of about 0.73 dB.

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(130.3120) Integrated optics : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Integrated Optics

History
Original Manuscript: January 17, 2008
Revised Manuscript: March 16, 2008
Manuscript Accepted: April 2, 2008
Published: April 21, 2008

Citation
Wei Li, Jingqiu Liang, Zhongzhu Liang, Xiaoqi Li, Weibiao Wang, Yanchao Zhong, and Degui Sun, "Design and fabrication of a micro-optic switch," Opt. Express 16, 6324-6330 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-9-6324

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References

C. H. Huang, H. F. Chou, and J. E. Bowers, "Dynamically reconfigurable optical packet switch (DROPS)," Opt. Express 14, 2008-2014 (2006). [CrossRef]
L. Y. Lin and E. L. Goldstein, "The Roles of MEMS Optical Switches in Fiber-Optic Networks-What and When," Proc. SPIE 5246, 85-94 (2003). [CrossRef]
H. T. Hsieh, C. W. Chiu, T. Tsao, F. Jiang, and G. D. John Su, "Low-Actuation-Voltage MEMS for 2-D Optical Switches," J. Lightwave Technol. 24, 4372-4379 (2006). [CrossRef]
C. H. Ko, J. J. Yang, J. C. Chiou, S. C. Chen, and T. H. Kao, "Magnetic Analysis of A Micromachined Magnetic Actuator Using the Finite Element Method," Proc. SPIE 3893, 127-136 (2000). [CrossRef]
V. G. Kutchoukov, J. R. Mollinger, M. Shikida, and A. Bossche, "Patterning of polyimide and metal in deep trenches," Sens. Actuators A 92, 208-213 (2001). [CrossRef]
Y. H. Zhang, G. F. Ding, S. Fu, and B. C. Cai, "A fast switching bistable electromagnetic microactuator fabricated by UV-LIGA technology," Mechatronics 17, 165-171 (2007). [CrossRef]
J. W. Yang, Y. H. Wu, H. G. Jia, P. Zhang, and S. R. Wang, "Design method and magnetic field analysis of axial-magnetized permanent magnet micromotor," Opt. Precision Eng. 14, 83-88 (2006).
T. Zhang, Y. H. Wu, H.W. Li, B. Liu, P. Zhang, and S. Y. Wang, "Micro electromagnetic actuator with high energy density based on MEMS technology," Opt. Precision Eng. 15, 866-872 (2007).
C. T. Pan and S. C. Shen, "Magnetically actuated bi-directional microactuators with permalloy and Fe/Pt hard magnet," J. Magn. Mag. Mater. 285, 422-432 (2005). [CrossRef]

Bossche, A.
Bowers, J. E.
Cai, B. C.
Chen, S. C.
Chiou, J. C.
Chiu, C. W.
Chou, H. F.
Ding, G. F.
Fu, S.
Goldstein, E. L.
Hsieh, H. T.
Huang, C. H.
Jia, H. G.
Jiang, F.
John Su, G. D.
Kao, T. H.
Ko, C. H.
Kutchoukov, V. G.
Li, H.W.
Lin, L. Y.
Liu, B.
Mollinger, J. R.
Pan, C. T.
Shen, S. C.
Shikida, M.
Tsao, T.
Wang, S. R.
Wang, S. Y.
Wu, Y. H.
Yang, J. J.
Yang, J. W.
Zhang, P.
Zhang, T.
Zhang, Y. H.

J. Lightwave Technol.

H. T. Hsieh, C. W. Chiu, T. Tsao, F. Jiang, and G. D. John Su, "Low-Actuation-Voltage MEMS for 2-D Optical Switches," J. Lightwave Technol. 24, 4372-4379 (2006). [CrossRef]

J. Magn. Mag. Matier.

C. T. Pan and S. C. Shen, "Magnetically actuated bi-directional microactuators with permalloy and Fe/Pt hard magnet," J. Magn. Mag. Mater. 285, 422-432 (2005). [CrossRef]

Mechatronics

Y. H. Zhang, G. F. Ding, S. Fu, and B. C. Cai, "A fast switching bistable electromagnetic microactuator fabricated by UV-LIGA technology," Mechatronics 17, 165-171 (2007). [CrossRef]

Opt. Express

C. H. Huang, H. F. Chou, and J. E. Bowers, "Dynamically reconfigurable optical packet switch (DROPS)," Opt. Express 14, 2008-2014 (2006). [CrossRef]

Opt. Precision Eng.

J. W. Yang, Y. H. Wu, H. G. Jia, P. Zhang, and S. R. Wang, "Design method and magnetic field analysis of axial-magnetized permanent magnet micromotor," Opt. Precision Eng. 14, 83-88 (2006).
T. Zhang, Y. H. Wu, H.W. Li, B. Liu, P. Zhang, and S. Y. Wang, "Micro electromagnetic actuator with high energy density based on MEMS technology," Opt. Precision Eng. 15, 866-872 (2007).

Proc. SPIE

L. Y. Lin and E. L. Goldstein, "The Roles of MEMS Optical Switches in Fiber-Optic Networks-What and When," Proc. SPIE 5246, 85-94 (2003). [CrossRef]
C. H. Ko, J. J. Yang, J. C. Chiou, S. C. Chen, and T. H. Kao, "Magnetic Analysis of A Micromachined Magnetic Actuator Using the Finite Element Method," Proc. SPIE 3893, 127-136 (2000). [CrossRef]

Sens. Actuators A

V. G. Kutchoukov, J. R. Mollinger, M. Shikida, and A. Bossche, "Patterning of polyimide and metal in deep trenches," Sens. Actuators A 92, 208-213 (2001). [CrossRef]

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