Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler
Optics Express, Vol. 16, Issue 9, pp. 6425-6432 (2008)
http://dx.doi.org/10.1364/OE.16.006425
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Abstract
In this communication, the sub-micron size polycrystalline silicon (poly-Si) single mode waveguides are fabricated and integrated with SiON waveguide coupler by deep UV lithography. The propagation loss of poly-Si waveguide and coupling loss with optical flat polarization-maintaining fiber (PMF) are measured. For whole C-band (i.e., λ~1520-1565nm), the propagation loss of TE mode is measured to ~6.45±0.3dB/cm. The coupling loss with optical flat PMF is ~3.4dB/facet for TE mode. To the best of our knowledge, the propagation loss is among the best reported results. This communication discusses the factors reducing the propagation loss, especially the effect of the refractive index contrast. Compared to the SiO2 cladding, poly-Si waveguide with SiON cladding exhibits lower propagation loss.
© 2008 Optical Society of America
OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices
ToC Category:
Integrated Optics
History
Original Manuscript: January 7, 2008
Revised Manuscript: February 15, 2008
Manuscript Accepted: February 18, 2008
Published: April 22, 2008
Citation
Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, "Low loss (~6.45dB/cm) sub-micron
polycrystalline silicon waveguide integrated
with efficient SiON waveguide coupler," Opt. Express 16, 6425-6432 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-9-6425
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