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Non-thermal desorption/ablation of molecular solids induced by ultra-short soft x-ray pulses
J. Chalupský, L. Juha, V. Hájková, J. Cihelka, L. Vyšín, J. Gautier, J. Hajdu, S. P. Hau-Riege, M. Jurek, J. Krzywinski, R. A. London, E. Papalazarou, J. B. Pelka, G. Rey, S. Sebban, R. Sobierajski, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, C. Valentin, H. Wabnitz, and P. Zeitoun »View Author Affiliations
J. Chalupský,1,2,*
L. Juha,1
V. Hájková,1
J. Cihelka,1
L. Vyšĺn,1,2
J. Gautier,3
J. Hajdu,6
S. P. Hau-Riege,7
M. Jurek,5
J. Krzywinski,5
R. A. London,7
E. Papalazarou,3
J. B. Pelka,5
G. Rey,3
S. Sebban,3
R. Sobierajski,5
N. Stojanovic,4
K. Tiedtke,4
S. Toleikis,4
T. Tschentscher,4
C. Valentin,3
H. Wabnitz,4
and P. Zeitoun3
1Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic
2Czech Technical University in Prague, Zikova 4, 166 36 Praha 1, Czech Republic
3Laboratoire d’Optique Appliquée, École Polytechnique, ENSTA, CNRS, F-91761 Palaiseau, France
4Deutsches Elektronen-Synchrotron DESY, Notkestrasse 85, D-22603 Hamburg, Germany
5Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland
6Biomedical Centre, Uppsala University, Uppsala, SE-75124 Sweden
7Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550, USA
*chal@fzu.cz ;
Optics Express, Vol. 17, Issue 1, pp. 208-217 (2009)
http://dx.doi.org/10.1364/OE.17.000208
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Abstract
We report the first observation of single-shot soft x-ray laser induced desorption occurring below the ablation threshold in a thin layer of poly (methyl methacrylate) - PMMA. Irradiated by the focused beam from the Free-electron LASer in Hamburg (FLASH) at 21.7nm, the samples have been investigated by atomic-force microscope (AFM) enabling the visualization of mild surface modifications caused by the desorption. A model describing non-thermal desorption and ablation has been developed and used to analyze single-shot imprints in PMMA. An intermediate regime of materials removal has been found, confirming model predictions. We also report below-threshold multiple-shot desorption of PMMA induced by high-order harmonics (HOH) at 32nm. Short-time exposure imprints provide sufficient information about transverse beam profile in HOH’s tight focus whereas long-time exposed PMMA exhibits radiation-initiated surface hardening making the beam profile measurement infeasible.
© 2009 Optical Society of America
OCIS Codes
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(140.3330) Lasers and laser optics : Laser damage
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: November 4, 2008
Revised Manuscript: December 5, 2008
Manuscript Accepted: December 11, 2008
Published: December 24, 2008
Citation
J. Chalupský, L. Juha, V. Hájková, J. Cihelka, L. Vyšín, J. Gautier, J. Hajdu, S. P. Hau-Riege, M. Jurek, J. Krzywinski, R. A. London, E. Papalazarou, J. B. Pelka, G. Rey, S. Sebban, R. Sobierajski, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, C. Valentin, H. Wabnitz, and P. Zeitoun, "Non-thermal desorption/ablation of molecular solids induced by ultra-short soft x-ray pulses," Opt. Express 17, 208-217 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-1-208
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References
- V. Ayvazyan et al., "A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser," Eur. Phys. J. D 20, 149-156 (2002).
- V. Ayvazyan et al., "Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime," Phys. Rev. Lett. 88, 104802 (2002). [CrossRef] [PubMed]
- V. Ayvazyan et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, "Demonstration of a desk-top size high repetition rate soft x-ray laser," Opt. Express 13,4050-4055 (2005). [CrossRef] [PubMed]
- P. E. Dyer, "Excimer laser polymer ablation: twenty years on," Appl. Phys. A77, 167-173 (2003), and references cited therein.
- L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, "Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation," in Proc. 10th International Conference on X-ray Lasers - ICXRL 2006, P. V. Nickles, K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503-510.
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- R. F. Haglund, "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, 1-13 (1996). [CrossRef]
- J. M. Liu, "Simple technique for measurements of pulsed Gaussian-beam spot sizes," Opt. Lett. 7, 196-198 (1982). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- D. A. G. Deacon, "Optical coating damage and performance requirements in free electron lasers," Nucl. Instrum. Meth. Phys. Res. A 250, 283-288 (1986).
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
Andrejczuk, A.
Antonetti, A.
Auge´, F.
Ayvazyan, V.
Babin, V.
Baker, S. L.
Bakshaev, Yu. L.
Balcou, P.
Balcou, Ph.
Barkusky, F.
Baro, A. M.
Bartnik, A.
Bayer, A.
Belsky, A.
Bergh, M.
Bernardinello, A.
Bionta, R. M.
Bionta, R. M.
Bittner, M.
Bobashev, S. V.
Boody, F. P.
Caleman, C.
Carillon, A.
Carré, B.
Cejnarová, A.
Chalupsky, J.
Chalupský, J.
Chambaret, J. P.
Chapman, H.
Chernenko, A. S.
Chilla, J. L. A.
Chvostová, D.
Cihelka, J.
Colchero, J.
Constant, E.
Cortazar, O. D.
Costello, J. T.
Cubaynes, D.
De Grazia, M.
Deacon, D. A. G.
Descamps, D.
Dhez, P.
Douillet, D.
Duesterer, S.
Düsterer, S.
Dyer, P. E.
Fedorov, N.
Feldbach, E.
Feldhaus, J.
Fernandez, R.
Fiedorowicz, H.
Foerster, E.
Gaarde, M. B.
Garrison, B. J.
Gaudin, J.
Geloni, G.
Geoffroy, G.
Gerth, C.
Gomez-Herrero, J.
Gomez-Rodriguez, J. M.
Gottwald, A.
Grillon, G.
Grisham, M.
Grisham, M. E.
Guizard, S.
Haglund, R. F.
Hajdu, J.
Hajkova, V.
Hájková, V.
Haroutunian, R.
Hartshorn, D.
Hau-Riege, S. P.
Hau-Riege, S. P.
Heinbuch, S.
Hill, I.
Homer, P.
Horcas, I.
Horvath, M.
Hulin, D.
Itina, T. E.
Ivanov, M. I.
Jaeglé, P.
Jamelot, G.
Jastrow, U.
Joyeux, D.
Juha, L.
Jungwirth, K.
Jurek, M.
Kazamias, S.
Keitel, B.
Kirm, M.
Klinger, D.
Klisnick, A.
Klopfel, D.
Koptyaev, S.
Korolev, V. D.
Kozlová, M.
Krasa, J.
Krása, J.
Kravárik, J.
Krejci, F.
Kroth, U.
Krzywinski, J.
Krzywinsky, J.
Kuba, J.
Kubat, P.
Kubeš, P.
Kuhlmann, M.
Ledinský, M.
Lehockey, E. M.
Létal, V.
L'Huillier, A.
Liu, J. M.
London, R. A.
Luna, H.
Mann, K.
Martin, P.
Martz, D.
McKernan, M. A.
Menoni, C. S.
Merdji, H.
Mevel, E.
Meyer, M.
Meyer-ter-Vehn, J.
Mikolajczyk, J.
Mocek, T.
Mullot, G.
Nagirnyi, V.
Nantel, M.
Nicolosi, P.
Nietubyc, R.
Orisch, A.
Orr, P.
Otcenasek, Z.
Pelka, J.
Pelka, J. B.
Pelka, J. B.
Perner, F.
Peth, C.
Pfeifer, M.
Phalippou, D.
Pientka, Z.
Pína, L.
Plönjes, E.
Polan, J.
Poletto, L.
Präg, A.
Präg, A. R.
Präg, A. R.
Radcliffe, P.
Rakowski, R.
Redlin, H.
Reid, I.
Rey, G.
Richter, M.
Rocca, J. J.
Rocca, J. J.
Rohlena, K.
Roos, L.
Ros, D.
Rousse, A.
Rus, B.
Ryc, L.
Saldin, E. L.
Schneidmiller, E. A.
Schoolcraft, T. A.
Sebban, S.
Shlyaptsev, V. N.
Shmaenok, L. A.
Sobierajski, R
Sobierajski, R.
Sokolowski-Tinten, K.
Sorokin, A.A.
Steeg, B.
Stojanovic, N.
Stupka, M.
Tarasevitch, A.
Teubner, U.
Theobald, W.
Tiedtke, K.
Toleikis, S.
Tomasel, F. G.
Treusch, R.
Tronnier, A.
Tschentscher, T.
Tumanov, V. I.
Ullschmied, J.
Valentin, C.
Vaschenko, G.
Vaschenko, G. O.
Vassil'ev, A.
Velyhan, A.
Vielhauer, S.
von der Linde, D.
Vorlícek, V.
Wabnitz, H.
Wawro, A.
Weihe, F.
Yeates, P.
Yingling, Y. G.
Yurkov, M. V.
Zastrau, U.
Zeitoun, P.
Zhigilei, L. V.
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- V. Ayvazyan et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
- V. Ayvazyan et al., "A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser," Eur. Phys. J. D 20, 149-156 (2002).
- V. Ayvazyan et al., "Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime," Phys. Rev. Lett. 88, 104802 (2002). [CrossRef] [PubMed]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- D. A. G. Deacon, "Optical coating damage and performance requirements in free electron lasers," Nucl. Instrum. Meth. Phys. Res. A 250, 283-288 (1986).
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- P. E. Dyer, "Excimer laser polymer ablation: twenty years on," Appl. Phys. A77, 167-173 (2003), and references cited therein.
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- R. F. Haglund, "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, 1-13 (1996). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, "Demonstration of a desk-top size high repetition rate soft x-ray laser," Opt. Express 13,4050-4055 (2005). [CrossRef] [PubMed]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
Appl. Phys.
- P. E. Dyer, "Excimer laser polymer ablation: twenty years on," Appl. Phys. A77, 167-173 (2003), and references cited therein.
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
Appl. Phys. Lett
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
Appl. Phys. Lett.
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
Appl. Surf. Sci.
- R. F. Haglund, "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, 1-13 (1996). [CrossRef]
Eur. J. Phys.
- V. Ayvazyan et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
Eur. Phys. J. D
- V. Ayvazyan et al., "A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser," Eur. Phys. J. D 20, 149-156 (2002).
Int. J. Mass Spectr.
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
J. Appl. Phys.
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
J. Microlith. Microfab. Microsyst.
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
J. Phys.
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
J. Vac. Sci. Technol. A
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
Nucl. Instrum. Meth. Phys. Res. A
- D. A. G. Deacon, "Optical coating damage and performance requirements in free electron lasers," Nucl. Instrum. Meth. Phys. Res. A 250, 283-288 (1986).
Opt. Express
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, "Demonstration of a desk-top size high repetition rate soft x-ray laser," Opt. Express 13,4050-4055 (2005). [CrossRef] [PubMed]
Opt. Lett.
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- J. M. Liu, "Simple technique for measurements of pulsed Gaussian-beam spot sizes," Opt. Lett. 7, 196-198 (1982). [CrossRef] [PubMed]
Phys. Rev. A
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
Phys. Rev. Lett.
- V. Ayvazyan et al., "Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime," Phys. Rev. Lett. 88, 104802 (2002). [CrossRef] [PubMed]
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
Proc. SPIE
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
Rev. Sci. Instrum.
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
Surf. Rev. Lett.
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
Other
- J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, "Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation," in Proc. 10th International Conference on X-ray Lasers - ICXRL 2006, P. V. Nickles, K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503-510.
2008, Barkusky, J. Appl. Phys.
- F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
- C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).
- M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, J. Cihelka, V. Hájková, S. Koptyaev, J. Krása, A. Velyhan, M. Bergh, C. Caleman, J. Hajdu, R. M. Bionta, H. Chapman, S. P. Hau-Riege, R. A. London, M. Jurek, J. Krzywinski, R. Nietubyc, J. B. Pelka, R. Sobierajski, J. Meyer-ter-Vehn, A. Tronnier, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, and U. Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
- I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
- J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
- J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
- S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
- N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
- V. Ayvazyan et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
- S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
- T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
- L. Juha, M. Bittner, D. Chvostová, J. Krása, M. Kozlová, M. Pfeifer, J. Polan, A. R. Präg, B. Rus, M. Stupka, J. Feldhaus, V. Létal, Z. Otcenasek, J. Krzywinski, R. Nietubyc, J. B. Pelka, A. Andrejczuk, R. Sobierajski, L. Ryc, F. P. Boody, H. Fiedorowicz, A. Bartnik, J. Mikolajczyk, R. Rakowski, P. Kubat, L. Pína, M. Horvath, M. E. Grisham, G. O. Vaschenko, C. S. Menoni, and J. J. Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
- P. E. Dyer, "Excimer laser polymer ablation: twenty years on," Appl. Phys. A77, 167-173 (2003), and references cited therein.
- S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
- L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
- M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
- P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
- B. Rus, T. Mocek, A. R. Präg, M. Kozlová, G. Jamelot, A. Carillon, D. Ros, D. Joyeux, and D. Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
- V. Ayvazyan et al., "A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser," Eur. Phys. J. D 20, 149-156 (2002).
- V. Ayvazyan et al., "Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime," Phys. Rev. Lett. 88, 104802 (2002). [CrossRef] [PubMed]
- L. Juha, J. Krása, A. Präg, A. Cejnarová, D. Chvostová, K. Rohlena, K. Jungwirth, J. Kravárik, P. Kubeš, Yu. L. Bakshaev, A. S. Chernenko, V. D. Korolev, V. I. Tumanov, M. I. Ivanov, A. Bernardinello, J. Ullschmied, and F. P. Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
- L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
- B. Rus, A. Carillon, P. Dhez, P. Jaeglé, G. Jamelot, A. Klisnick, M. Nantel, and P. Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
- E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
- R. F. Haglund, "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, 1-13 (1996). [CrossRef]
- J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
- D. A. G. Deacon, "Optical coating damage and performance requirements in free electron lasers," Nucl. Instrum. Meth. Phys. Res. A 250, 283-288 (1986).
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