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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 13 — Jun. 22, 2009
  • pp: 11098–11106

Suppression of aliasing in multi-sensor scanning absolute profile measurement

Axel Wiegmann, Michael Schulz, and Clemens Elster  »View Author Affiliations

Optics Express, Vol. 17, Issue 13, pp. 11098-11106 (2009)

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The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 µm−1) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 µm.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(100.3008) Image processing : Image recognition, algorithms and filters

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 8, 2009
Revised Manuscript: June 7, 2009
Manuscript Accepted: June 11, 2009
Published: June 18, 2009

Axel Wiegmann, Michael Schulz, and Clemens Elster, "Suppression of aliasing in multi-sensor scanning absolute profile measurement," Opt. Express 17, 11098-11106 (2009)

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