OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 14 — Jul. 6, 2009
  • pp: 11366–11370

High confinement micron-scale silicon nitride high Q ring resonator

Alexander Gondarenko, Jacob S. Levy, and Michal Lipson  »View Author Affiliations


Optics Express, Vol. 17, Issue 14, pp. 11366-11370 (2009)
http://dx.doi.org/10.1364/OE.17.011366


View Full Text Article

Enhanced HTML    Acrobat PDF (825 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3∗106 operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.

© 2009 OSA

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(140.3945) Lasers and laser optics : Microcavities

ToC Category:
Integrated Optics

History
Original Manuscript: April 28, 2009
Revised Manuscript: June 17, 2009
Manuscript Accepted: June 18, 2009
Published: June 23, 2009

Citation
Alexander Gondarenko, Jacob S. Levy, and Michal Lipson, "High confinement micron-scale silicon nitride high Q ring resonator," Opt. Express 17, 11366-11370 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-14-11366


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008). [CrossRef]
  2. J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007). [CrossRef]
  3. S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005). [CrossRef]
  4. A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001). [CrossRef]
  5. N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4-6), 453–458 (2004). [CrossRef]
  6. C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007). [CrossRef]
  7. K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008). [CrossRef]
  8. L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008). [CrossRef]
  9. M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005). [CrossRef]
  10. J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS, 2, pp. 745, (2004).
  11. E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics, FMG4 (2008).
  12. A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008). [CrossRef]
  13. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003). [CrossRef]
  14. M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007). [CrossRef]
  15. P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 
Fig. 4.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited