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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 16 — Aug. 3, 2009
  • pp: 14322–14338

Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations

Alexandr Dejneka, Ilze Aulika, Vladimir Trepakov, Jaromir Krepelka, Lubomir Jastrabik, Zdenek Hubicka, and Anna Lynnyk  »View Author Affiliations


Optics Express, Vol. 17, Issue 16, pp. 14322-14338 (2009)
http://dx.doi.org/10.1364/OE.17.014322


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Abstract

The possibilities of in situ spectroscopic ellipsometry applied to phase transitions investigation in oxide thin films and crystals are examined in this work, along with the use of various parameters calculated from ellipsometric data (band gap energy Eg , refractive index n and surface roughness) together with the directly measured main ellipsometric angles ψ and Δ, for the detection of phase transitions. The efficiency of spectroscopic ellipsometry on “surface” phase transition and its sensitivity to surface defects are also demonstrated.

© 2009 Optical Society of America

OCIS Codes
(160.4760) Materials : Optical properties
(160.6840) Materials : Thermo-optical materials
(240.0240) Optics at surfaces : Optics at surfaces
(240.0310) Optics at surfaces : Thin films
(240.2130) Optics at surfaces : Ellipsometry and polarimetry
(130.2260) Integrated optics : Ferroelectrics

ToC Category:
Optics at Surfaces

History
Original Manuscript: May 26, 2009
Revised Manuscript: July 9, 2009
Manuscript Accepted: July 13, 2009
Published: July 31, 2009

Citation
Alexandr Dejneka, Ilze Aulika, Vladimir Trepakov, Jaromir Krepelka, Lubomir Jastrabik, Zdenek Hubicka, and Anna Lynnyk, "Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations," Opt. Express 17, 14322-14338 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-16-14322


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References

  1. R. K. Galkiewicz and J. Tauc, "Photoelastic properties of amorphous As2S3," Sol. State Commun. 10, 1261-1264 (1972). [CrossRef]
  2. W. F. Koehler, F. K. Odencrantz, and W. C. White, "Optical Constants of Evaporated Selenium Films by Successive Approximations," J. Opt. Soc Am. 49 109-114 (1959). [CrossRef]
  3. J. Stuke, "Review of optical and electrical properties of amorphous semiconductors," J. Non-Cryst. Solids 4, 1-26 (1970). [CrossRef]
  4. R. C. Chittick, "Properties of glow-discharge deposited amorphous germanium and silicon," J. Non-Cryst. Solids 3, 255-270 (1970). [CrossRef]
  5. S. H. Wemple, "Refractive-Index Behavior of Amorphous Semiconductors and Glasses," Phys. Rev. B 7, 3767-3777 (1973). [CrossRef]
  6. H. R. Philipp, "Optical properties of non-crystalline Si, SiO, SiOx and SiO2," J. Phys. Chem. Solids 32, 1935-1945 (1971). [CrossRef]
  7. S. Takahashi, and S. Shibata, "Thermal variation of attenuation for optical fibers," J Non-Cryst Solids 30, 359-370 (1979). [CrossRef]
  8. R. Hofmann, S. H. Wemple, and H. Granicher, "Dielectric Dispersion of NaOH-Doped Ice at Low Temperatures," J. Phys. Soc. Jpn. 28, 265-265 (1970). [CrossRef]
  9. J. Fousek and J. Petzelt, "Changes of Refractive Indices of Crystals Induced by Structural Phase Transitions," Phys. Stat. Sol 55, 11-40 (1979). [CrossRef]
  10. G. Burns, and B. A. Scott, "Index of refraction in ‘dirty’ displacive ferroelectrics," Sol. St. Comm. 13 423-426 (1973). [CrossRef]
  11. G. Burns and F. H. Dacol, "Polarization in the cubic phase of BaTIO3," Sol. St. Comm. 42, 9-12 (1982) [CrossRef]
  12. W. Kleemann, F. J. Schafer and M. D. Fontain, "Crystal optical studies of spontaneous and precursor polarization in KNbO3," Phys. Rev. B 301148-1154 (1984). [CrossRef]
  13. G. B. Burns, and F. H. Dacol, "Glassy polarization behavior in ferroelectric compounds Pb(Mg1/3Nb1/3)O3 and Pb(Zn1/3Nb2/3)O3," Sol. St. Comm. 48, 853-856 (1983). [CrossRef]
  14. R. V. Pisarev, B. N. Shermatov, A. Nasyrev, in Russion "Otricaltelnyj istennyj termoopticheskij effekt v titanate stroncija SrTiO3,"Fizika Tverdovo Telo 28, 3338-3341 (1986).
  15. A. T. Anistratov, "Electrooptical and photelastic phenomena in ferroelectric crystals," translated from Izvestiya Vysshih Uchebnyh Zavedenii, Fizika 4, 7-22 (1975).
  16. H. P. Zhou, W. Z. Shen, N. B. Chen, and H. Z. Wu, "Observation of negative thermo-optical coefficient in cubic MgZnO thin films," Appl. Phys. Lett. 85, 3723-3725 (2004). [CrossRef]
  17. D. L. Mills, "Surface Effects in Magnetic Crystals near the Ordering Temperature," Phys. Rev. B 3, 3885-3895 (1971). [CrossRef]
  18. K. Binder and P. C. Hohenberg, "Surface effects on magnetic phase transitions, " Phys. Rev. B 9, 2194-2214 (1974). [CrossRef]
  19. D. Weller, S. F. Alvarado, W. Gudat, K. Schröder, and M. Campagna, "Observation of Surface-Enhanced Magnetic Order and Magnetic Surface Reconstruction on Gd(0001)," Phys. Rev. Lett. 54, 1555-1558 (1985). [CrossRef] [PubMed]
  20. P. K. Wang, J. P. Ansermet, S. L. Rudaz, Z. Wang, S. Shore, C. P. Slichter, and J. H. Sinfelt, "NMR Studies of Simple Molecules on Metal Surfaces," Science 234, 35-41 (1986). [CrossRef] [PubMed]
  21. Z. Salman, R. F. Kiefl, K. H. Chow, M. D. Hossain, T. A. Keeler, S. R. Kreitzman, C. D. P. Levy, R. I. Miller, T. J. Parolin, M. R. Pearson, H. Saadaoui, J. D. Schultz, M. Smadella, D. Wang, and W. A. MacFarlane, "Near-Surface Structural Phase Transition of SrTiO3 Studied with Zero-Field β-Detected Nuclear Spin Relaxation and Resonance," Phys. Rev. Lett. 96, 147601-147604 (2006). [CrossRef] [PubMed]
  22. E. D. Mishina, T. V. Misuryaev, N. E. Sherstyuk, V. V. Lemanov, A. I. Morozov, A. S. Sigov, and Th. Rasing, "Observation of a Near-Surface Structural Phase Transition in SrTiO3 by Optical Second Harmonic Generation," Phys. Rev. Lett. 85, 3664-3667 (2000). [CrossRef] [PubMed]
  23. H. G. Tompkins, EugeneA.  Irene, "Handbook of ellipsometry" (William Andrew publishing, Springer, 2005) [CrossRef]
  24. M. Born, and Wolf, E. , Principles of Optics, 7th edition, (Cambridge University Press, New York, 1999).
  25. J. A. Woollam, B. Johs, C. M. Herzinger, J. Hilfiker, R. Synowicki, and C. L. Bungay, "Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I (II): Basic Theory and Typical Applications (Advanced Applications)," Critical Reviews of Optical Science and Technology CR72, 3-28 (1999).
  26. A. Deyneka, G. Suchaneck, L. Jastrabik, and G. Gerlach, "Phase Transitions in PbZr1−xTixO3 Ceramics Prepared by Different Techniques," Jpn. J. Appl. Phys. 41, 6966-6968 (2002). [CrossRef]
  27. A. Deyneka, G. Suchaneck, L. Jastrabik, and G. Gerlach, "Phase Transition Shift in Lead-Excess PZT Films Under UV Illumination," Ferroelectrics 67, 173-180 (2004). [CrossRef]
  28. A. Deyneka1a, Z. Hubicka1, V. Trepakov1, G. Suchaneck, L. Jastrabik1, G. Gerlach, J. Pokorny1, D. Chvostova1, and J. Olejnicek, "Low Pressure RF Plasma Jet Sputtering Technique Applied to Ferroelectric Films: Ba1-x SrxTiO3", Mat. Sc. Forum Vols. 514-516, 165-169 (2006). [CrossRef]
  29. I. Aulika, A. Deyneka, V Zauls, and K Kundzins, "Thermo-optical studies of NaNbO3 thin films," J. Phys., Conf. Ser.V 93012016 (2007). [CrossRef]
  30. V. Trepakov, A. Dejneka, P. Markovin, A. Lynnyk, and L. Jastrabik, Division of Optics, Institute of Physics, Academy of Science, 182 21 Prague 8, Czech Republic, ""Soft elecronic band" and negative thermooptic effect in stroncum titanate" accepted for publication in New Journal of Physics (2009).
  31. Y. F. Tsay, B. Bendow, and S. S. Mitra, "Theory of the Temperature Derivative of the Refractive Index in Transparent Crystals," Phys. Rev. B 8, 2688-2696 (1973). [CrossRef]
  32. V. M. Fridkin, "Some effects due to electron-phonon interaction in phase transitions occurring in a semiconductor ferroelectrics," Zh. Eksp. Teor. Fiz. Pisma 3, 252-255 (1966).
  33. R.W. Whatmore, Q. Zhang, Z. Huang, and R. A. Dorey, "Ferroelectric thin and thick films for microsystems," Mater. Sci. Semicond. Process. 5, 65-76 (2003). [CrossRef]
  34. P. Muralt, "Ferroelectric thin films for micro-sensors and actuators: a review," J. Micromech. Microeng. 10, 136-146 (2000). [CrossRef]
  35. A. Deineka; L. Jastrabik; G. Suchaneck; and G. Gerlach, "Optical Properties of Self-Polarized PZT Ferroelectric Films," Ferroelectrics 273, 155-160 (2002). [CrossRef]
  36. J. Tauc, and A. Menth, "States In The Gap," J. Non-Cryst.Sol. 8, 569-585 (1972). [CrossRef]
  37. V. M. Fridkin, (in Russian) Segnetoelektriki-Poluprovodniki (Nauka, Moskow, p.135, 1976).
  38. R. Bruchhaus, D. Pitzer, R. Primig, W. Wersing, and Y. Xu, "Deposition of self-polarized PZT films by planar multi-target sputtering," Integrated Ferroelectrics 14, 141-149 (1997). [CrossRef]
  39. G. Suchaneck, W.-M. Lin, R. Koehler, T. Sandner, G. Gerlach, R. Krawietz, W. Pompe, A. Deineka, and L. Jastrabik, "Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays," Vacuum 66, 473-478 (2002). [CrossRef]
  40. E. G. Lee, J.K. Lee, J.-Y. Kim, J. G. Lee, H. M. Jang, and S. J. Kim, "Zr/Ti ratio dependence of the deformation in the hysteresis loop of Pb(Zr,Ti)O3 thin films," J. Mater. Sci. Lett. 18, 2025-2028 (1999). [CrossRef]
  41. L. Baudry, "Theoretical investigation of the influence of space charges on ferroelectric properties of PbZrTiO3 thin film capacitor," J. Appl. Phys. 86, 1096-1105 (1999). [CrossRef]
  42. B. Panda, A. Dhar, G. D. Nigan, D. Bhattacharga, and S. K. Ray, "Optical properties of RF sputtered strontium substituted barium titanate thin films," Thin Solid Films 332, 46-49 (1998) [CrossRef]
  43. W. Chang, C. M. Gilmore, W.-J. Kim, J. M. Pond, S. W. Kirchoefer, S. B. Qadri, D. B. Chirsey, and J. S. Horwitz, "Influence of strain on microwave dielectric properties of (Ba,Sr)TiO3 thin films," J. Appl. Phys. 87, 3044-3049 (2000). [CrossRef]
  44. Y. Saito, H. Takao, T. Tani, T. Nonoyama, K. Takatori, T. Homma, T. Nagaya, and M. Nakamura, "Lead-free piezoceramics, " Nature 432, 84-87 (2004). [CrossRef] [PubMed]
  45. C. N. W. Darlington, and K. S. Knight, "On the lattice parameters of sodium niobateat room temperature and above," Physica B 266, 368-372 (1999). [CrossRef]
  46. A. M. Glazer and H. D. Megaw, "Studies of the Lattice Parameters and Domains in the Phase Transitions of NaNbO3," Acta Cryst. A 29, 489-495 (1973) [CrossRef]
  47. F. Denoyer, R. Comes, and M. Lambert, "X-ray Diffuse Scattering from NaNbO3 as a Function of Temperature," Acta Cryst. A 27, 414-420 (1971). [CrossRef]
  48. A. Avogadro, G. Bonera, F. Borsa, and A. Rigamoti, "Static and dynamic properties of the structural phase transitions in NaNbO3," Phys. Rev. 9, 3905-3920 (1974). [CrossRef]
  49. I. Aulika, J. Petzelt, J. Pokorny, A. Deyneka, V. Zauls, and K. Kundzins, "Structural and Optical Studies of NaNbO3 Thin Films Grown by PLD on SrRuO3 Bottom Electrode," Rev. Adv. Mater. Sc.V 15, 158-166 (2007).
  50. I. Lefkiwitz, K. Lukaszewicz, and H. D. Megaw, "The High-Temperature Phases of Sodium Niohate and the Nature of Transitions in Psendosymmetrie Struetures," Acre Cryst. 20, 670-683 (1966). [CrossRef]
  51. M. H. Lentea, J. de Los S. Guerraa, J. A. Eirasa, and S. Lanfredi, "Investigation of microwave dielectric relaxation process in the antiferroelectric phase of NaNbO3 ceramics," Sol. St. Com. 131, 279-282 (2004). [CrossRef]
  52. I. Aulika, A. Dejneka, V. Zauls, and K. Kundzins, "Optical gradient of the trapezium-shaped NaNbO3 thin films studied by spectroscopic ellipsometry", J. Electroch. Soc.,  155, G209-G213 (2008). [CrossRef]
  53. V. P. Varshni, "Temperature dependence of the energy gap in semiconductors, Physica 34, 149 (1967). [CrossRef]
  54. T. S. Narasimhamurti, Photoelastic and electro-optic properties of crystals (Plenum Press, N-Y & London, 1981).
  55. M. Sparks, "Optical Distortion by Heated Windows in High-Power Laser Systems," J. Appl. Phys. 42, 5029-5046 (1983). [CrossRef]
  56. T Izumitani, and H. Toratani, "Temperature coefficient of electronic polarizability in optical glasses," J. Non. Cryst. Sol. 40, 611-619 (1980). [CrossRef]
  57. F. A. Molly, Opt. Soc. Am. 39,600, (1949). [CrossRef]
  58. F. Reimyer, Glastech. Ber. 37,122, (1961).
  59. G. E. Jellison, Jr. and J. W. McCamy, "Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry," Appl. Phys. Lett. 61, 512-514 (1992). [CrossRef]
  60. T. S. Narasimhamurti, Photoelastic and electro-optic properties of crystals (Plenum Press, N-Y & London, 1981).
  61. S.-Y. Zhu, Y.-L. Chen, and J.-X. Fang, "Thermal effects of the refractive index caused by the electron-phonon interaction," Phys. Rew. B 35, 2980-2987 (1987). [CrossRef]
  62. E. Schneider, P. J. Cressman, and R. L. Holman, "Temperature dependence of the refractive index of strontium titanate and prism coupling to lithium niobate optical waveguides," J. Appl. Phys. 53, 4054-4056 (1982). [CrossRef]
  63. T. Toyoda, and M. Yabe, "The temperature dependence of the refractive indices of SrTiO3 and TiO2," J. Phys. D. Appl. Phys. 16, L251-L255 (1983). [CrossRef]
  64. A. P. Levanyuk and S. A. Minyukov, in Russion "Ob evoluciji pripoverhnostnyh iskazhenii struktury kristallov vblizi tochek strukturnyh fazovyh perehodov," Fiz. Tver.Tela 25, 2617-2622 (1983).
  65. D. W. Berreman, "Optics in Stratified and Anisotropic Media: 4x4-Matrix Formulation," J. Opt. Soc. Am. 62, 502-510 (1972). [CrossRef]
  66. J. Krepelka, "Plane electromagnetic waves in anisotropic layered systems", Acta Universitatis Palackinae Olomucensis.Physica 36, 109-132 (1997).
  67. J. Krepelka, (in Czech) Optics of thin films (Palacky University Olomouc, Faculty of Natural Sciences, 1993).

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