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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 20 — Sep. 28, 2009
  • pp: 17293–17302

Optics InfoBase > Optics Express > Volume 17 > Issue 20 > Page 17293

Light Emitting Diodes as an alternative ambient illumination source in photolithography environment

Dennis Corell, Haiyan Ou, Carsten Dam-Hansen, Paul-Michael Petersen, and Dan Friis  »View Author Affiliations


Optics Express, Vol. 17, Issue 20, pp. 17293-17302 (2009)
http://dx.doi.org/10.1364/OE.17.017293


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Abstract

We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

© 2009 Optical Society of America

OCIS Codes
(110.5220) Imaging systems : Photolithography
(230.3670) Optical devices : Light-emitting diodes
(330.0330) Vision, color, and visual optics : Vision, color, and visual optics
(220.2945) Optical design and fabrication : Illumination design

ToC Category:
Optical Devices

History
Original Manuscript: July 10, 2009
Revised Manuscript: August 30, 2009
Manuscript Accepted: September 9, 2009
Published: September 14, 2009

Virtual Issues
Vol. 4, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Dennis Corell, Haiyan Ou, Carsten Dam-Hansen, Paul-Michael Petersen, and Dan Friis, "Light Emitting Diodes as an alternative ambient illumination source in photolithography environment," Opt. Express 17, 17293-17302 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-20-17293


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