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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 20938–20944

Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45° micro-reflector

Hsiao-Chin Lan, Hsu-Liang Hsiao, Chia-Chi Chang, Chih-Hung Hsu, Chih-Ming Wang, and Mount-Learn Wu  »View Author Affiliations


Optics Express, Vol. 17, Issue 23, pp. 20938-20944 (2009)
http://dx.doi.org/10.1364/OE.17.020938


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Abstract

A monolithically integrated micro-optical element consisting of a diffractive optical element (DOE) and a silicon-based 45° micro-reflector is experimentally demonstrated to facilitate the optical alignment of non-coplanar fiber-to-fiber coupling. The slanted 45° reflector with a depth of 216 μm is fabricated on a (100) silicon wafer by anisotropic wet etching. The DOE with a diameter of 174.2 μm and a focal length of 150 μm is formed by means of dry etching. Such a compact device is suitable for the optical micro-system to deflect the incident light by 90° and to focus it on the image plane simultaneously. The measured light pattern with a spot size of 15 μm has a good agreement with the simulated result of the elliptic-symmetry DOE with an off-axis design for eliminating the strongly astigmatic aberration. The coupling efficiency is enhanced over 10-folds of the case without a DOE on the 45° micro-reflector. This device would facilitate the optical alignment of non-coplanar light coupling and further miniaturize the volume of microsystem.

© 2009 OSA

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
Diffraction and Gratings

History
Original Manuscript: September 16, 2009
Revised Manuscript: October 29, 2009
Manuscript Accepted: October 29, 2009
Published: November 2, 2009

Citation
Hsiao-Chin Lan, Hsu-Liang Hsiao, Chia-Chi Chang, Chih-Hung Hsu, Chih-Ming Wang, and Mount-Learn Wu, "Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45° micro-reflector," Opt. Express 17, 20938-20944 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-23-20938


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