Optics InfoBase > Optics Express > Volume 17 > Issue 24 > Page 22005
Wavelength tuning of planar photonic crystals by local processing of individual holes
H. H. J. E. Kicken, P. F. A. Alkemade, R. W. van der Heijden, F. Karouta, R. Nötzel, E. van der Drift, and H. W. M. Salemink »View Author Affiliations
H. H. J. E. Kicken,1,*
P. F. A. Alkemade,2
R. W. van der Heijden,1
F. Karouta,1
R. Nötzel,1
E. van der Drift,2
and H. W. M. Salemink2
1COBRA Research Institute and Center for NanoMaterials, Eindhoven University of Technology, P.O. Box 513, NL-5600 MB Eindhoven, The Netherlands
2Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5053, NL-2600 GB Delft, The Netherlands
*Corresponding author: h.h.j.e.kicken@tue.nl
Optics Express, Vol. 17, Issue 24, pp. 22005-22011 (2009)
http://dx.doi.org/10.1364/OE.17.022005
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Abstract
Tuning of the resonant wavelength of a single hole defect cavity in planar photonic crystals was demonstrated using transmission spectroscopy. Local post-production processing of single holes in a planar photonic crystal is carried out after selectively opening a masking layer by focused ion beam milling. The resonance was blue-shifted by enlargement of selected holes using local wet chemical etching and red-shifted by infiltration with liquid crystals. This method can be applied to precisely control the resonant frequency, and can also be used for mode selective tuning.
© 2009 Optical Society of America
OCIS Codes
(250.0250) Optoelectronics : Optoelectronics
(250.5300) Optoelectronics : Photonic integrated circuits
ToC Category:
Photonic Crystals
History
Original Manuscript: August 24, 2009
Revised Manuscript: September 18, 2009
Manuscript Accepted: October 5, 2009
Published: November 17, 2009
Citation
H. H. J. E. Kicken, P. F. A. Alkemade, R. W. van der Heijden, F. Karouta, R. Nötzel, E. van der Drift, and H. W. M. Salemink, "Wavelength tuning of planar photonic
crystals by local processing of individual
holes," Opt. Express 17, 22005-22011 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-24-22005
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References
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Adibi, A.
Anand, S.
Askari, M.
Atat¨ure, M.
Atwater, H.
Ay, F.
Badolato, A.
Baehr-Jones, T.
Balog, S.
Bastiaansen, C. W. M.
Benotti, P.
Bhattacharya, P.
Birner, A.
Bog, U.
Broer, D. J.
Bronnimann, R.
Bulla, D.
Busch, K.
Cabrini, S.
Callegari, V.
Carlstrom, C. F.
Carpentiero, A.
Cingolani, R.
Colocci, M.
Cortaberria Sanz, D.
Cryan, M. J.
Dalacu, D.
de Ridder, R. M.
De Vittorio, M.
Di Fabrizio, E.
Dreiser, J.
Dunbar, L. A.
Dunham, S. N.
Eggleton, B. J.
El-Kallassi, P.
Englund, D.
Erni, D.
Faraon, A.
Ferrini, R.
Forchel, A.
Freeman, D.
G¨osele, U.
Gadgil, V. J.
Gaillot, D. P.
Giessen, H.
Graugnard, E.
Grillet, C.
Hagen, R.
Heard, P. J.
Hennessy, K.
Hermann, D.
Herrmann, R.
Hill, M.
Hogerle, C.
Hopman, W. C. L.
Hotchkiss, P. J.
Houdre, R.
Hu, E.
Hu, W.
Imamo?glu, A.
Imamoglu, A.
Intonti, F.
Ivanov, P. S.
Jamois, C.
John, S.
Jones, S. C.
Kamp, M.
Karnutsch, C.
Karouta, F.
Kelly, J. J.
Kim, J.-Y.
Kim, S.-H.
Kitzerow, H.-S. R.
Kjellander, B. K. C.
Klopf, F.
Kolodrubetz, M.
Krauss, T. F.
Kuipers, L.
Le Thomas, N.
Lee, M. W.
Lee, Y.-H.
Lehmann, V.
Leonard, S. W.
Leuenberger, D.
Loffler, A.
Lon?car, M.
Luther-Davies, B.
Madden, S.
Marder, S. R.
Marsmann, H.
Martz, J.
Matthias, H.
Maune, B.
McPhedran, R. C.
Mertens, G.
Mingaleev, S. F.
Momeni, B.
Monat, C.
Mondia, J. P.
Moosburger, J.
Mulot, M.
N¨otzel, R.
Neff, C.W.
Nellen, P. M.
Nesch, F.
Neubert, M.
Norwood, R. A.
O’Faolain, L.
Park, H.-G.
Passaseo, A.
Pavesi, L.
Petroff, P.
Petroff, P. M.
Peyghambarian, N.
Pollnau, M.
Qiu, M.
Qiu, Y.
Reithmaier, J. P.
Robin, F.
Roder, T.
Rorison, J. M.
Ruan, Y.
Sabarinathan, J.
Salemink, H. W. M.
Scherer, A.
Schillinger, M.
Schuller, Ch.
Schweizer, S. L.
Segerink, F. B.
Seo, M.-K.
Smith, C. L. C.
Snijders, J. A. P.
Stoltz, N.
Stomeo, T.
Strasser, P.
Summersa, C. J.
Sunner, T.
T¨urck, V.
Tamboli, A.
Tay, S.
Thomas, J.
Tian, L.
Tjerkstra, R. W.
Toader, O.
Todaro, M. T.
Tomljenovic-Hanic, S.
Topol’ancik, J.
van der Drift, E
van der Drift, E.
van der Heijden, R.
van der Heijden, R. W.
van Driel, H. M.
Vignolini, S.
Visimberga, G.
Vos, W. L.
Vuˆckovi’c, J.
W¨uest, R.
Wehrspohn, R.
Wehrspohn, R. B.
Wiersma, D.
Wild, B.
Witzens, J.
Wu, D. K. C.
Yamashita, T.
Yang, J.-K.
Yu, P.-C.
Yu, S.
Zabelin, V.
Zuppiroli, L.
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- S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007). [CrossRef]
- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007). [CrossRef]
- K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006). [CrossRef]
- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003). [CrossRef]
- S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006). [CrossRef]
- A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008). [CrossRef]
- S. F. Mingaleev, M. Schillinger, D. Hermann, and K. Busch, "Tunable photonic crystal circuits: concepts and designs based on single-pore infiltration," Opt. Lett. 29, 2858 (2004). [CrossRef]
- S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007). [CrossRef]
- P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006). [CrossRef]
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005). [CrossRef]
- M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005). [CrossRef]
- D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, "Postfabrication fine-tuning of photonic crystal microcavities in InAs/InP quantum dot membranes," Appl. Phys. Lett. 87, 151107 (2005). [CrossRef]
- W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006). [CrossRef]
- R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006). [CrossRef] [PubMed]
- E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006). [CrossRef]
- A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008). [CrossRef]
- C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008). [CrossRef] [PubMed]
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- T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007). [CrossRef]
- Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003). [CrossRef]
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- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007). [CrossRef]
- W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007). [CrossRef]
- R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002). [CrossRef]
- B. Maune, J. Witzens, T. Baehr-Jones, M. Kolodrubetz, H. Atwater, A. Scherer, R. Hagen, and Y. Qiu, "Optically triggered Q-switched photonic crystal laser," Opt. Express 13, 4699 (2005). [CrossRef] [PubMed]
- M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003). [CrossRef]
- Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003). [CrossRef]
- P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007). [CrossRef]
- G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003). [CrossRef]
- M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005). [CrossRef]
- C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett. 91, 121103 (2007). [CrossRef]
- J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003). [CrossRef]
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- B. Maune, J. Witzens, T. Baehr-Jones, M. Kolodrubetz, H. Atwater, A. Scherer, R. Hagen, and Y. Qiu, "Optically triggered Q-switched photonic crystal laser," Opt. Express 13, 4699 (2005). [CrossRef] [PubMed]
- M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003). [CrossRef]
- Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003). [CrossRef]
- R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008). [CrossRef]
- C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008). [CrossRef] [PubMed]
- C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett. 91, 121103 (2007). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007). [CrossRef]
- E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006). [CrossRef]
- T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007). [CrossRef]
- S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007). [CrossRef]
- M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005). [CrossRef]
- R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008). [CrossRef]
- S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008). [CrossRef] [PubMed]
- C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett. 91, 121103 (2007). [CrossRef]
- J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003). [CrossRef]
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008). [CrossRef]
- A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008). [CrossRef]
- P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006). [CrossRef]
- R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006). [CrossRef] [PubMed]
- C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008). [CrossRef] [PubMed]
- C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett. 91, 121103 (2007). [CrossRef]
- E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006). [CrossRef]
- J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003). [CrossRef]
- M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005). [CrossRef]
- P. El-Kallassi, R. Ferrini, L. Zuppiroli, N. Le Thomas, R. Houdr’e, A. Berrier, S. Anand, and A. Talneau, "Optical tuning of planar photonic crystals infiltrated with organic molecules," J. Opt. Soc. Am. B 24, 2165 (2007). [CrossRef]
- R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006). [CrossRef] [PubMed]
- J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006). [CrossRef]
Appl. Phys. Lett.
- Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003). [CrossRef]
- G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003). [CrossRef]
- M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003). [CrossRef]
- S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007). [CrossRef]
- A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008). [CrossRef]
- D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, "Postfabrication fine-tuning of photonic crystal microcavities in InAs/InP quantum dot membranes," Appl. Phys. Lett. 87, 151107 (2005). [CrossRef]
- K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005). [CrossRef]
- R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006). [CrossRef]
- F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006). [CrossRef]
- C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett. 91, 121103 (2007). [CrossRef]
- K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006). [CrossRef]
- J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003). [CrossRef]
- E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006). [CrossRef]
J. Appl. Phys.
- J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006). [CrossRef]
J. Opt. Soc. Am. B
- P. El-Kallassi, R. Ferrini, L. Zuppiroli, N. Le Thomas, R. Houdr’e, A. Berrier, S. Anand, and A. Talneau, "Optical tuning of planar photonic crystals infiltrated with organic molecules," J. Opt. Soc. Am. B 24, 2165 (2007). [CrossRef]
- P. El-Kallassi, S. Balog, R. Houdre, L. Balet, L. Li, M. Francardi, A. Gerardino, A. Fiore, R. Ferrini, and L. Zuppiroli, "Local infiltration of planar photonic crystals with UV-curable polymers," J. Opt. Soc. Am. B 25, 1562 (2008). [CrossRef]
J. Quantum Electron.
- R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002). [CrossRef]
J. Vac. Sci. Technol. B
- C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006). [CrossRef]
- R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008). [CrossRef]
Microelectron. Eng.
- T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005). [CrossRef]
- P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007). [CrossRef]
- P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006). [CrossRef]
Microeoectron. Eng.
- T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007). [CrossRef]
Nanotechnol.
- W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007). [CrossRef]
Opt. Express
- M.-K. Seo, H.-G. Park, J.-K. Yang, J.-Y. Kim, S.-H. Kim, and Y.-H. Lee, "Controlled sub-nanometer tuning of photonic crystal resonator by carbonaceous nano-dots," Opt. Express 16, 9829 (2008). [CrossRef] [PubMed]
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