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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 24 — Nov. 23, 2009
  • pp: 22102–22107

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light

A. Aquila, F. Salmassi, Yanwei Liu, and E.M. Gullikson  »View Author Affiliations

Optics Express, Vol. 17, Issue 24, pp. 22102-22107 (2009)

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Magnesium/silicon carbide (Mg/SiC) multilayers have been fabricated with normal incidence reflectivity in the vicinity of 40% to 50% for wavelengths in the 25 to 50 nm wavelength range. However many applications, for example solar telescopes and ultrafast studies using high harmonic generation sources, desire larger bandwidths than provided by high reflectivity Mg/SiC multilayers. We investigate introducing a third material, Scandium, to create a tri-material Mg/Sc/SiC multilayer allowing an increase the bandwidth while maintaining high reflectivity.

© 2009 OSA

OCIS Codes
(260.7200) Physical optics : Ultraviolet, extreme
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

Original Manuscript: September 17, 2009
Revised Manuscript: October 26, 2009
Manuscript Accepted: October 27, 2009
Published: November 18, 2009

A. Aquila, F. Salmassi, Yanwei Liu, and E.M. Gullikson, "Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light," Opt. Express 17, 22102-22107 (2009)

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