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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 25 — Dec. 7, 2009
  • pp: 22773–22784

Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm

Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert  »View Author Affiliations


Optics Express, Vol. 17, Issue 25, pp. 22773-22784 (2009)
http://dx.doi.org/10.1364/OE.17.022773


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Abstract

A new type of multilayer coatings with narrowband reflection properties and peaked in the ~50– 92 nm spectral range has been developed. Multilayers are based on Yb, Al, and SiO films and they have been prepared by thermal evaporation. Efficient multilayers based on Yb and Al, with an SiO protective layer were prepared, but they developed a dendrite structure, which was attributed to the reactivity between Al and Yb. Multilayers based on Yb and Al, with both SiO protective and barrier layers, resulted in efficient reflective filters, with no observable dendrite growth. The peak reflectance of aged multilayers was of the order of ~0.20, with bandwidths in the range of 12 to 22 nm FWHM.

© 2009 OSA

ToC Category:
Thin Films

History
Original Manuscript: August 28, 2009
Revised Manuscript: September 25, 2009
Manuscript Accepted: September 25, 2009
Published: November 30, 2009

Citation
Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert, "Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm," Opt. Express 17, 22773-22784 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-25-22773


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References

  1. M. Zukic and D. G. Torr, “Multiple reflectors as narrowband and broadband vacuum ultraviolet filtres,” Appl. Opt. 31(10), 1588–1596 (1992). [CrossRef]
  2. M. Zukic, D. G. Torr, J. Kim, J. F. Spann, and M. R. Torr, “Filters for the International Solar Terrestrial Physics Mission far-ultraviolet imager,” Opt. Eng. 32(12), 3069–3074 (1993). [CrossRef]
  3. A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlhaas, M. Marsi, M. Trovò, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, “High-performance deep-ultraviolet optics for free-electron lasers,” Appl. Opt. 41(16), 3236–3241 (2002). [CrossRef] [PubMed]
  4. Y. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A. I. Fedorenko, V. V. Kondratenko, Y. P. Pershin, E. N. Zubarev, and V. Y. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50nm,” Opt. Lett. 23(10), 771–773 (1998). [CrossRef] [PubMed]
  5. S. A Yulin and F Schaefers, “T. Feigl and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” Proc. SPIE 5193, 155–163 (2004).
  6. J. Gautier, F. Delmotte, F. Bridou, M. F. Ravet, F. Varniere, M. Roulliay, A. Jerome, and I. Vickridge, “Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics,” Appl. Phys., A Mater. Sci. Process. 88(4), 719–725 (2007). [CrossRef]
  7. H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005). [CrossRef]
  8. D. S. Martínez-Galarce, P. Boerner, R. Soufli, B. De Pontieu, N. Katz, A. Title, E. M. Gullikson, J. C. Robinson, and S. L. Baker, “The high-resolution lightweight telescope for the EUV (HiLiTE),” Proc. SPIE 7011, 70113K (2008).
  9. D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett. 30(23), 3186–3188 (2005). [CrossRef] [PubMed]
  10. B. Kjornrattanawanich, D. L. Windt, J. F. Seely, and Y. A. Uspenskii, “SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging,” Appl. Opt. 45(8), 1765–1772 (2006). [CrossRef] [PubMed]
  11. J. F. Seely, Yu. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” Proc. SPIE 6317, 63170T (2006).
  12. B. Kjornrattanawanich, D. L. Windt, Yu. A. Uspenskii, and J. F. Seely, “Optical constants determination of neodymium and gadolinium in the 3 nm to 100 nm wavelength range,” Proc. SPIE 6317, 63170U (2006).
  13. B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett. 33(9), 965–967 (2008). [CrossRef] [PubMed]
  14. G. R. Carruthers, “Narrow-band filter for the Lyman-β wavelength region,” Appl. Opt. 10, 1461–1463 (1971).
  15. J. I. Larruquert and R. A. M. Keski-Kuha, “Multilayer coatings with high reflectance in the EUV spectral region from 50 to 121.6 nm,” Appl. Opt. 38, 1231–1236 (1999). [CrossRef] [PubMed]
  16. J. I. Larruquert and R. A. M. Keski-Kuha, “Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet,” Appl. Opt. 41(25), 5398–5404 (2002). [CrossRef] [PubMed]
  17. M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Narrowband filters and broadband mirrors for the spectral range from 50 to 200 nm,” Proc. SPIE 7018, 70182W (2008).
  18. J. I. Larruquert, “Reflectance enhancement with sub-quarterwave multilayers of highly absorbing materials,” J. Opt. Soc. Am. A 18(6), 1406–1414 (2001). [CrossRef]
  19. J. I. Larruquert, “General theory of sub-quarterwave multilayers with highly absorbing materials,” J. Opt. Soc. Am. A 18(10), 2617–2627 (2001). [CrossRef]
  20. J. Edelstein, “Reflection/ suppression coatings for the 900–1200 Å radiation,” Proc. SPIE 1160, 19–25 (1989).
  21. J. I. Larruquert and R. A. M. Keski-Kuha, “Multilayer coatings for narrow-band imaging in the extreme ultraviolet,” Appl. Opt. 40(7), 1126–1131 (2001). [CrossRef] [PubMed]
  22. A US patent has been applied with the contents of this research: M. Vidal Dasilva, M. Fernández Perea, J. I. Larruquert Goicoechea, J. A. Méndez Morales, J. A. Aznárez Candao, J. M. Sánchez Orejuela, “Narrowband filters for the extreme ultraviolet,” U.S. patent application 12/429,944 (24 April 2009).
  23. Yu. Uspenski, J. Seely, N. Popov, I. Artioukov, A. Vinogradov, D. Windt, and B. Kjornrattanawanich, “Extreme UV optical constants of rare-earth metals free from effects of air contamination,” Proc. SPIE 5919, 213–220 (2005).
  24. J. I. Larruquert, J. A. Aznárez, J. A. Méndez, and J. Calvo-Angós, “Optical properties of ytterbium films in the far and the extreme ultraviolet,” Appl. Opt. 42(22), 4566–4572 (2003). [CrossRef] [PubMed]
  25. M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, D. Garoli, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of the transmittance and extinction coefficient of Yb films in the 23-1,700-eV range,” J. Opt. Soc. Am. A 24, 3691–3699 (2007).
  26. M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, D. Garoli, A. M. Malvezzi, A. Giglia, and S. Nannarone “Determination of the transmittance and extinction coefficient of Ce films in the 6-1,200-eV range,” J. Appl. Phys . 103, 073501–1 to −7 (2008).
  27. M Fernández-Perea, M Vidal-Dasilva, J. A Aznárez, J. I Larruquert, J. A Méndez,, L. Poletto, D Garoli,, A. M. Malvezzi, A Giglia, and S Nannarone “Determination of the transmittance and extinction coefficient of Pr films in the 4-1,600-eV range,” J. Appl. Phys . 103, 113515–1 a −7 (2008).
  28. M Fernández-Perea,, M Vidal-Dasilva, J. A Aznárez, and J. I LarruquertJ. A Méndez, L Poletto, D. Garoli, A. M Malvezzi, A Giglia, and S Nannarone “Determination of the transmittance and extinction coefficient of Eu films in the 8.3-1,400-eV range,” J. Appl. Phys . 104, 123527–1 a −7 (2008).
  29. M. Vidal-Dasilva, M. Fernández-Perea, J. A. Aznárez, J. I. Larruquert, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Transmittance and optical constants of Tm films in the 2.75-1,600 eV spectral range,” J. Appl. Phys . 105, 103110–1 a −7 (2009).
  30. B. Kjornrattanawanich, D. L. Windt, J. A. Bellotti, and J. F. Seely, “Measurement of dysprosium optical constants in the 2-830 eV spectral range using a transmittance method, and compilation of the revised optical constants of lanthanum, terbium, neodymium, and gadolinium,” Appl. Opt. 48(16), 3084–3093 (2009). [CrossRef] [PubMed]
  31. A. L. Aquila, F. Salmassi, E. M. Gullikson, F. Eriksson, and J. Birch, “Measurements of the optical constants of scandium in the 50-1300 eV range,” Proc. SPIE 5538, 64–71 (2004).
  32. Y. A. Uspenskii, J. F. Seely, N. L. Popov, A. V. Vinogradov, Y. P. Pershin, and V. V. Kondratenko, “Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium,” J. Opt. Soc. Am. A 21(2), 298–305 (2004). [CrossRef]
  33. J. I. Larruquert, J. A. Aznárez, J. A. Méndez, A. M. Malvezzi, L. Poletto, and S. Covini, “Optical properties of scandium films in the far and the extreme ultraviolet,” Appl. Opt. 43(16), 3271–3278 (2004). [CrossRef] [PubMed]
  34. M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006). [CrossRef]
  35. M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1 – 800 eV photon energy range,” J. Appl. Phys. 105(11), 113505 (2009). [CrossRef]
  36. G. Hass, “Preparation, Structure, and Applications of Thin Films of Silicon Monoxide and Titanium Dioxide,” J. Am. Ceram. Soc. 33(12), 353–360 (1950). [CrossRef]
  37. D. Y. Smith, and E. Shiles, Mitio Inokuti, “The Optical Properties of Metallic Aluminum,” in Handbook of optical constants of solids, E.D. Palik, ed., (Academic, Orlando, Fla., 1985).
  38. J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Far UV reflectance measurements and optical constants of unoxidized Al films,” Appl. Opt. 34, 4892–4899 (1995). [CrossRef]
  39. J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, “Optical constants of aluminum films in the extreme ultraviolet interval of 82-77 nm,” Appl. Opt. 35(28), 5692–5697 (1996). [CrossRef]
  40. J. A. Aznárez, J. I. Larruquert, and J. A. Méndez, “Farultraviolet absolute reflectometer for optical constant determination of ultrahigh vacuum prepared thin films,” Rev. Sci. Instrum. 67(2), 497–502 (1996). [CrossRef]
  41. J. I. Larruquert, J. A. Aznárez, and J. A. Méndez, “FUV reflectometer for in situ characterization of thin films deposited under UHV,” Proc. SPIE 4139, 92–101 (2000).
  42. S. Tolansky, Multiple-Beam Interferometry of Surfaces and Films, (Oxford U. Press, London, 1948).

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