Propagation loss study of very compact
GaAs/AlGaAs substrate removed waveguides

doi:10.1364/OE.17.003390

Propagation loss study of very compact GaAs/AlGaAs substrate removed waveguides

JaeHyuk Shin, Yu-Chia Chang, and Nadir Dagli »View Author Affiliations

Optics Express, Vol. 17, Issue 5, pp. 3390-3395 (2009)
http://dx.doi.org/10.1364/OE.17.003390

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Abstract
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References (8)
Cited By
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Abstract

Very compact GaAs/AlGaAs optical waveguides with propagation loss as low as 0.9 dB/cm at λ=1.55 μm were demonstrated using substrate removal and evaporated Si for index loading. Loss components were identified and minimized through process and waveguide design. Process induced roughness contributed significantly to overall propagation loss. Therefore a low damage process in addition to proper waveguide design is needed for loss minimization.

OCIS Codes
(230.7370) Optical devices : Waveguides
(290.5880) Scattering : Scattering, rough surfaces

ToC Category:
Optical Devices

History
Original Manuscript: December 4, 2008
Revised Manuscript: February 12, 2009
Manuscript Accepted: February 17, 2009
Published: February 19, 2009

Citation
JaeHyuk Shin, Yu-Chia Chang, and Nadir Dagli, "Propagation loss study of very compact GaAs/AlGaAs substrate removed waveguides," Opt. Express 17, 3390-3395 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-5-3390

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References

M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch, "Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator," Appl. Phys. Lett. 87, 231108 (2005). [CrossRef]
J. Shin, Y.-C. Chang, and N. Dagli, "Highly Efficient GaAs/AlGaAs Substrate Removed Nanowire Phase Modulators Based on Current Injection," in Integrated Photonics and Nanophotonics Research and Applications (Optical Society of America, 2007), paper IMA2.
J. Shin, Y. C. Chang, and N. Dagli, "0.3 V drive voltage GaAs/AlGaAs substrate removed Mach-Zehnder intensity modulators," Appl. Phys. Lett. 92, 201103 (2008). [CrossRef]
D. K. Sparacin, S. J. Spector, and L. C. Kimerling, "Silicon waveguide sidewall smoothing by wet chemical oxidation," J. Lightwave Technol. 23, 2455-2461 (2005). [CrossRef]
L. B. Soldano and E. C. M. Pennings, "Optical Multimode Interference Devices Based on Self-Imaging - Principles and Applications," J. Lightwave Technol. 13, 615-627 (1995). [CrossRef]
F. P. Payne and J. P. R. Lacey, "A Theoretical-Analysis of Scattering Loss from Planar Optical Wave-Guides," Opt. Quantum Electron. 26, 977-986 (1994). [CrossRef]
A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, "Measuring propagation loss in a multimode semiconductor waveguide," J. Appl. Phys. 97, 073105 (2005). [CrossRef]
J. Shin, Y.-C. Chang, and N. Dagli, "Low-Loss Ultra-Compact GaAs/AlGaAs Substrate Removed Waveguides," in Integrated Photonics and Nanophotonics Research and Applications (Optical Society of America, 2008), paper IWE3.

Berger, V.
Calligaro, M.
Chang, Y. C.
Dagli, N.
De Rossi, A.
Ducci, S.
Kimerling, L. C.
Koch, T. L.
Lacey, J. P. R.
Lanco, L.
Ortiz, V.
Pafchek, R. M.
Payne, F. P.
Pennings, E. C. M.
Sagnes, I.
Shin, J.
Soldano, L. B.
Sparacin, D. K.
Spector, S. J.
Sukumaran, G.
Webster, M. A.

Appl. Phys. Lett.

J. Shin, Y. C. Chang, and N. Dagli, "0.3 V drive voltage GaAs/AlGaAs substrate removed Mach-Zehnder intensity modulators," Appl. Phys. Lett. 92, 201103 (2008). [CrossRef]
M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch, "Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator," Appl. Phys. Lett. 87, 231108 (2005). [CrossRef]

J. Appl. Phys.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, "Measuring propagation loss in a multimode semiconductor waveguide," J. Appl. Phys. 97, 073105 (2005). [CrossRef]

J. Lightwave Technol.

D. K. Sparacin, S. J. Spector, and L. C. Kimerling, "Silicon waveguide sidewall smoothing by wet chemical oxidation," J. Lightwave Technol. 23, 2455-2461 (2005). [CrossRef]
L. B. Soldano and E. C. M. Pennings, "Optical Multimode Interference Devices Based on Self-Imaging - Principles and Applications," J. Lightwave Technol. 13, 615-627 (1995). [CrossRef]

Opt. Quantum Electron.

F. P. Payne and J. P. R. Lacey, "A Theoretical-Analysis of Scattering Loss from Planar Optical Wave-Guides," Opt. Quantum Electron. 26, 977-986 (1994). [CrossRef]

Other

J. Shin, Y.-C. Chang, and N. Dagli, "Low-Loss Ultra-Compact GaAs/AlGaAs Substrate Removed Waveguides," in Integrated Photonics and Nanophotonics Research and Applications (Optical Society of America, 2008), paper IWE3.
J. Shin, Y.-C. Chang, and N. Dagli, "Highly Efficient GaAs/AlGaAs Substrate Removed Nanowire Phase Modulators Based on Current Injection," in Integrated Photonics and Nanophotonics Research and Applications (Optical Society of America, 2007), paper IMA2.

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