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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 5 — Mar. 2, 2009
  • pp: 3390–3395

Propagation loss study of very compact GaAs/AlGaAs substrate removed waveguides

JaeHyuk Shin, Yu-Chia Chang, and Nadir Dagli  »View Author Affiliations

Optics Express, Vol. 17, Issue 5, pp. 3390-3395 (2009)

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Very compact GaAs/AlGaAs optical waveguides with propagation loss as low as 0.9 dB/cm at λ=1.55 μm were demonstrated using substrate removal and evaporated Si for index loading. Loss components were identified and minimized through process and waveguide design. Process induced roughness contributed significantly to overall propagation loss. Therefore a low damage process in addition to proper waveguide design is needed for loss minimization.

© 2009 Optical Society of America

OCIS Codes
(230.7370) Optical devices : Waveguides
(290.5880) Scattering : Scattering, rough surfaces

ToC Category:
Optical Devices

Original Manuscript: December 4, 2008
Revised Manuscript: February 12, 2009
Manuscript Accepted: February 17, 2009
Published: February 19, 2009

JaeHyuk Shin, Yu-Chia Chang, and Nadir Dagli, "Propagation loss study of very compact GaAs/AlGaAs substrate removed waveguides," Opt. Express 17, 3390-3395 (2009)

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