OSA's Digital Library

Optics Express

Optics Express

  • Vol. 17, Iss. 7 — Mar. 30, 2009
  • pp: 4938–4943

Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane

Yongjin Wang, Yoshiaki Kanamori, Jiasheng Ye, Hidehisa Sameshima, and Kazuhiro Hane  »View Author Affiliations

Optics Express, Vol. 17, Issue 7, pp. 4938-4943 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (752 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report the design and fabrication of nanoscale resonant gratings which is of interest for narrow bandwidth filtering application. The linear/circular grating structures, of which the grating width is 200nm and the grating height is 260nm, are generated on silicon-on-insulator wafer. Nanoscale gratings are fabricated on the silicon device layer by a combination of electron beam lithography and fast atom beam etching. The silicon handle layer under grating region is removed by deep reactive ion etching, and the buried oxide layer is kept. The reflectance measurements are performed to characterize the optical response of fabricated freestanding nanoscale gratings. The resonant behavior of linear gratings agrees with the theoretical predication, and the polarization-independent responses of circular gratings are also experimentally demonstrated.

© 2009 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(160.4670) Materials : Optical materials
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: October 28, 2008
Revised Manuscript: January 21, 2009
Manuscript Accepted: March 12, 2009
Published: March 16, 2009

Yongjin Wang, Yoshiaki Kanamori, Jiasheng Ye, Hidehisa Sameshima, and Kazuhiro Hane, "Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane," Opt. Express 17, 4938-4943 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997) [CrossRef]
  2. A.L. Fehrembach and A. Sentenac, "Unpolarized narrow-band filtering with resonant gratings," Appl. Phys. Lett.,  86, 121105(2005) [CrossRef]
  3. D. Dobbs, I. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006). [CrossRef]
  4. Q1. Alok. A.Mehta, Raymond C.Rumpf, Zachary A.Roth, Eric G.Johnson, "Guided mode resonance filter as a spectrally selective feedback element in a double-cladding optical fiber laser," IEEE Photon.Technol.Lett. 19,2030-2032(2007) [CrossRef]
  5. N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007). [CrossRef]
  6. Y. -C. Lee, C. -F. Huang, J. -Y. Chang, and M. -L. Wu, "Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings," Opt. Express 16, 7969-7975 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-11-7969 [CrossRef] [PubMed]
  7. A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996) [CrossRef]
  8. A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand and A. Sentenac, "Experimental demonstration of a narrow-band, angular tolerant, polarization independent, doubly periodic resonant grating filter," Opt. Lett. 32, 2269-2271(2007) [CrossRef] [PubMed]
  9. C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006) [CrossRef]
  10. S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008) [CrossRef]
  11. Che-Lung Hsu; Yung-Chih Liu; Chih-Ming Wang; Mount-Learn Wu; Ya-Lun Tsai; Yue-Hong Chou; Chien-Chieh Lee; Jenq-Yang Chang, "Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane," J. Lightwave Technol. 24, 1922-1928(2006) [CrossRef]
  12. Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007) [CrossRef]
  13. Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008) [CrossRef]
  14. W. Suh, S. Fan, "All-pass transmission or flattop reflection filters using a single photonic crystal slab," Appl. Phys. Lett. 84, 4905(2004) [CrossRef]
  15. K. B. Crozier, Virginie Lousse, Onur Kilic, Sora Kim, Shanhui Fan, and Olav Solgaard, "Air-bridged photonic crystal slabs at visible and near-infrared wavelengths," Phys. Rev. B 73, 115126 (2006) [CrossRef]
  16. J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008) [CrossRef]
  17. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction," J. Opt. Soc. Am. 71, 811-818(1981) [CrossRef]
  18. H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002) [CrossRef] [PubMed]
  19. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, "Normal-incidence guided-mode resonant grating filters: design and experimental demonstration," Opt. Lett. 23, 700-702(1998) [CrossRef]
  20. G. Niederer, W. Nakagawa, H. Herzig, and H. Thiele, "Design and characterization of a tunable polarization-independent resonant grating filter," Opt. Express 13, 2196-2200 (2005) http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-6-2196 [CrossRef] [PubMed]
  21. N. Moll, S. Schönenberger, T. Stöferle, T. Wahlbrink, J. Bolten, T. Mollenhauer, C. Moormann, R. F. Mahrt, B. J. Offrein, "Circular Grating Resonators as Micro-Cavities for Optical Modulators," 4th IEEE International Conference on Group IV Photonics, Tokyo, Japan, pp.1-3(2007).
  22. R. D. Bhat, N. C. Panoiu, S. R. Brueck, R. M. Osgood, "Enhancing the signal-to-noise ratio of an infrared photodetector with a circular metal grating," Opt. Express 16, 4588-4596 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-7-4588 [CrossRef] [PubMed]
  23. Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008) [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited