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Optics Express

Optics Express

  • Vol. 17, Iss. 7 — Mar. 30, 2009
  • pp: 5069–5074

Annealing effect on mono-mode refractive index enhanced RbTiOPO4 waveguides formed by ion implantation

Liang-Ling Wang, Lei Wang, Ke-Ming Wang, Qing-Ming Lu, and Hong-Ji Ma  »View Author Affiliations


Optics Express, Vol. 17, Issue 7, pp. 5069-5074 (2009)
http://dx.doi.org/10.1364/OE.17.005069


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Abstract

We reported on the annealing features of the RbTiOPO4 planar waveguides fabricated by 6.0 MeV C3+ ion implantation. The thermal stability of the ion-implanted RbTiOPO4 waveguide was investigated by annealing at different temperatures ranging from 260°C to 650°C. Results revealed that when temperatures are higher than 550°C, annealing caused the refractive indices of both ny and nz a saturation behavior. An increase of the ny refractive index in waveguide region was observed after proper annealing. The low loss planar mono-mode waveguides have been achieved in RbTiOPO4 crystals by applying appropriate ion implantation and annealing conditions.

© 2009 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.7370) Optical devices : Waveguides

ToC Category:
Optical Devices

History
Original Manuscript: January 28, 2009
Revised Manuscript: February 22, 2009
Manuscript Accepted: February 24, 2009
Published: March 16, 2009

Citation
Liang-Ling Wang, Lei Wang, Ke-Ming Wang, Qing-Ming Lu, and Hong-Ji Ma, "Annealing effect on mono-mode refractive index enhanced RbTiOPO4 waveguides formed by ion implantation," Opt. Express 17, 5069-5074 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-7-5069


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