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Optics Express

Optics Express

  • Vol. 17, Iss. 7 — Mar. 30, 2009
  • pp: 5098–5106

Miniature all-glass robust pressure sensor

E. Cibula, S. Pevec, B. Lenardič, É. Pinet, and D. Ðonlagić  »View Author Affiliations


Optics Express, Vol. 17, Issue 7, pp. 5098-5106 (2009)
http://dx.doi.org/10.1364/OE.17.005098


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Abstract

This paper describes a newly designed all-glass miniature (Ø 125 μm) fiber-optic pressure sensor design that is appropriate for high-volume manufacturing. The fabrication process is based on the chemical etching of specially-designed silica optical fiber, and involves a low number of critical production operations. The presented sensor design can be used with either single-mode or multi-mode lead-in fiber and is compatible with various types of available signal processing techniques. A practical sensor sensitivity exceeding 1000 nm/bar was achieved experimentally, which makes this sensor suitable for low-pressure measurements. The sensor showed high mechanical stability, good quality of optical surfaces, and very high tolerance to pressure overload.

© 2009 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot

ToC Category:
Fiber Optics and Optical Communications

History
Original Manuscript: January 30, 2009
Revised Manuscript: March 4, 2009
Manuscript Accepted: March 5, 2009
Published: March 16, 2009

Citation
Edvard Cibula, Simon Pevec, Borut Lenardic, Eric Pinet, and Denis Donlagic, "Miniature all-glass robust pressure sensor," Opt. Express 17, 5098-5106 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-7-5098


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References

  1. É. Pinet, "Medical applications / Saving lives," Nature Photon., Tech. Focus (special edition on fiber-optic sensors) 2, 150-152 (2008). [CrossRef]
  2. J. S. Heo and J. O. Lim, "A micro total reflective extrinsic Fabry-Perot interferometric fiber optic pressure sensor for medical application," Int. J. Mod. Phys. B,  17, 11991204 (2003). [CrossRef]
  3. Q1. O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A,  66, 150-154 (1998). [CrossRef]
  4. T. Bae, R. A. Atkins, H. F. Taylor, and W. N. Gibler, "Interferometric fiber-optic sensor embedded in spark plug for in-cylinder pressure measurement in engines," Appl. Opt. 42, 10031007 (2003). [CrossRef] [PubMed]
  5. S.H. Aref, H. Latifi, M.I. Zibaii, and M. Afshari, "Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application," Opt. Commun. 269, 322330 (2007). [CrossRef]
  6. B. Glišić and D. Inaudi, in Fibre optic methods for structural health monitoring, (J. Wiley & sons Eds., 2007).
  7. www.fiso.com,
  8. K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005). [CrossRef]
  9. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001). [CrossRef]
  10. E. Cibula and D. Đonlagić, "Miniature fiber-optic pressure sensor with a polymer diaphragm," Appl. Opt. 44, 2736-2744 (2005) [CrossRef] [PubMed]
  11. D. Đonlagić and E. Cibula, "All-fiber high-sensitivity pressure sensor with SiO2 diaphragm," Opt. Lett. 30, 2071-2073 (2005). [CrossRef] [PubMed]
  12. X. Wang, J. Xu, Y. Zhu, L. K. Cooper, and A. Wang, "All-fused-silica miniature optical fiber tip pressure sensor," Opt. Lett. 31, 885-887 (2006). [CrossRef] [PubMed]
  13. Q2. Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, "High-temperature fiber-tip pressure sensor," IEEE J. Lightwave Technol. 24, 861-869 (2006). [CrossRef]
  14. J. Xu, X. Wang, K. L. Cooper, G. R. Pickrell, and A. Wang, "Miniature temperature-insensitive Fabry-Pérot fiber-optic pressure sensor," IEEE Photon. Technol. Lett. 18, 1134-1136 (2006). [CrossRef]
  15. C. Belleville and G. Duplain, "Fabry-Perot optical sensing device for measuring a physical parameter," US Patents #5,202,939 (1993) and #5,392,117 (1995).
  16. M. Di Giovanni, in Flat and corrugated diaphragm design handbook (L.L. Faulkner and S.B. Menkes Eds., CRC Press, 1982), Chap. 12 "Bending of diaphragms under lateral pressure," 130-156.

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