Figuring of plano-elliptical neutron focusing mirror by local wet etching

doi:10.1364/OE.17.006414

Figuring of plano-elliptical neutron focusing mirror by local wet etching

Kazuya Yamamura, Mikinori Nagano, Hiroyuki Takai, Nobuyuki Zettsu, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama, and Shoichi Shimada »View Author Affiliations

Optics Express, Vol. 17, Issue 8, pp. 6414-6420 (2009)
http://dx.doi.org/10.1364/OE.17.006414

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Abstract
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References (14)
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Abstract

Local wet etching technique was proposed to fabricate high-performance aspherical mirrors. In this process, only the limited area facing to the small nozzle is removed by etching on objective surface. The desired objective shape is deterministically fabricated by performing the numerically controlled scanning of the nozzle head. Using the technique, a plano-elliptical mirror to focus the neutron beam was successfully fabricated with the figure accuracy of less than 0.5μm and the focusing gain of 6. The strong and thin focused neutron beam is expected to be a useful tool for the analyses of various material properties.

OCIS Codes
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(230.4040) Optical devices : Mirrors
(230.4170) Optical devices : Multilayers
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: February 12, 2009
Revised Manuscript: March 24, 2009
Manuscript Accepted: April 1, 2009
Published: April 2, 2009

Citation
Kazuya Yamamura, Mikinori Nagano, Hiroyuki Takai, Nobuyuki Zettsu, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama, and Shoichi Shimada, "Figuring of plano-elliptical neutron focusing mirror by local wet etching," Opt. Express 17, 6414-6420 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-8-6414

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References

G. E. Ice, "The future of spatially-resolved polychromatic neutron and X-ray microdiffraction," Metall. Mater. Trans. A 39, 3058-3064 (2008). [CrossRef]
Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, "Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications," CIRP Ann. 57/1, 337-340 (2008). [CrossRef]
Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, "Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels," CIRP Ann. 48/1, 277-280 (1999). [CrossRef]
A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, "Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method," Rev. Sci. Instrum. 76, 093708_1-093708_4 (2005). [CrossRef]
K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, and K. Endo, A. Souvorov, M. Yabashi, M., K. Tamasaku, T. Ishikawa, Y. Mori, "Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining," Rev. Sci. Instrum. 74, 4549-4553 (2003). [CrossRef]
L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, "Surfaces in Precision Engineering, Microengineering and Nanotechnology," CIRP Ann. 52/2, 561-577 (2003). [CrossRef]
K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, "Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma," Jpn. J. Appl. Phys. 45, 8270-8276 (2006). [CrossRef]
K. Yamamura, "Development of numerically controlled local wet etching," Sci. Technol. Adv. Mater. 8, 158-161 (2007). [CrossRef]
K. Yamamura, "Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching," CIRP Ann. 56/1, 541-544 (2007). [CrossRef]
K. Yamamura and H. Takai, "Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching," Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448-451 (2008).
F. Mezei, "Novel polarized neutron devices: supermirror and spin component amplifier," Commun. Phys. 1, 81-85 (1976).
R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, "Development of neutron supermirror with large-scale ion-beam sputtering instrument," Physica B 385-386, 1256-1258 (2006). [CrossRef]
R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, "Development of neutron supermirrors with large critical angle," Thin Solid Films 515, 5704-5706 (2007). [CrossRef]
R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, "Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique," Nucl. Instrum. Methods Res. A 600, 68-70 (2009). [CrossRef]

Beaucamp, A.
De Chiffre, L.
Ebisawa, T.
Endo, K.
Fushiki, A.
Hino, M.
Ice, G. E.
Inasaki, I.
Kobayashi, H.
Kunieda, H.
Kunzmann, H.
Lucca, D.-A.
Maruyama, R.
Mezei, F.
Mimura, H.
Mori, Y.
Namba, Y.
Ogasaka, Y.
Peggs, G.-N.
Saito, A.
Sano, Y.
Shibahara, M.
Shimomura, T.
Souvorov, A.
Soyama, K.
Suzuki, H.
Yabashi, M.
Yamamura, K.
Yamashita, K.
Yamauchi, K.
Yamazaki, D.

CIRP Ann.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, "Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications," CIRP Ann. 57/1, 337-340 (2008). [CrossRef]
Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, "Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels," CIRP Ann. 48/1, 277-280 (1999). [CrossRef]
L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, "Surfaces in Precision Engineering, Microengineering and Nanotechnology," CIRP Ann. 52/2, 561-577 (2003). [CrossRef]
K. Yamamura, "Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching," CIRP Ann. 56/1, 541-544 (2007). [CrossRef]

Commun. Phys.

F. Mezei, "Novel polarized neutron devices: supermirror and spin component amplifier," Commun. Phys. 1, 81-85 (1976).

Jpn. J. Appl. Phys.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, "Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma," Jpn. J. Appl. Phys. 45, 8270-8276 (2006). [CrossRef]

Metall. Mater. Trans. A

G. E. Ice, "The future of spatially-resolved polychromatic neutron and X-ray microdiffraction," Metall. Mater. Trans. A 39, 3058-3064 (2008). [CrossRef]

Nucl. Instrum. Methods Res. A

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, "Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique," Nucl. Instrum. Methods Res. A 600, 68-70 (2009). [CrossRef]

Physica B

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, "Development of neutron supermirror with large-scale ion-beam sputtering instrument," Physica B 385-386, 1256-1258 (2006). [CrossRef]

Rev. Sci. Instrum.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, and K. Endo, A. Souvorov, M. Yabashi, M., K. Tamasaku, T. Ishikawa, Y. Mori, "Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining," Rev. Sci. Instrum. 74, 4549-4553 (2003). [CrossRef]

Sci. Technol. Adv. Mater.

K. Yamamura, "Development of numerically controlled local wet etching," Sci. Technol. Adv. Mater. 8, 158-161 (2007). [CrossRef]

Thin Solid Films

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, "Development of neutron supermirrors with large critical angle," Thin Solid Films 515, 5704-5706 (2007). [CrossRef]

Other

K. Yamamura and H. Takai, "Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching," Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448-451 (2008).
A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, "Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method," Rev. Sci. Instrum. 76, 093708_1-093708_4 (2005). [CrossRef]

2009, Maruyama, Nucl. Instrum. Methods Res. A
2008, Ice, Metall. Mater. Trans. A
2008, Namba, CIRP Ann.
2007, Yamamura, Sci. Technol. Adv. Mater.
2007, Yamamura, CIRP Ann.
2007, Maruyama, Thin Solid Films
2006, Yamamura, Jpn. J. Appl. Phys.
2006, Maruyama, Physica B
2003, Yamamura, Rev. Sci. Instrum.
2003, De Chiffre, CIRP Ann.
1999, Namba, CIRP Ann.
1976, Mezei, Commun. Phys.

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