Fabrication of three-dimensional 1 × 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam
Optics Express, Vol. 18, Issue 12, pp. 12136-12143 (2010)
http://dx.doi.org/10.1364/OE.18.012136
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Abstract
Multiple light spots can be generated by modulating the spatial phase distribution of laser beam with a spatial light modulator (SLM). In this paper, we demonstrate the fabrication of three-dimensional 1 × 4 splitter waveguides inside a glass by focusing multiple light spots of femtosecond (fs) laser pulses, which can be controlled by switching spatial phase distributions on an SLM. In the conventional fs laser writing technique, a highly precise positioning of a substrate is essential for fabricating a branched waveguide in a splitter. Using the technique proposed in this paper, a continuously branched waveguide can be produced easily by translating a glass substrate only one time; therefore this technique can eliminate the need for a high precision in positioning of a substrate and save a fabrication time.
© 2010 OSA
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(230.6120) Optical devices : Spatial light modulators
(230.7370) Optical devices : Waveguides
ToC Category:
Laser Microfabrication
History
Original Manuscript: April 20, 2010
Revised Manuscript: May 13, 2010
Manuscript Accepted: May 19, 2010
Published: May 24, 2010
Citation
Masaaki Sakakura, Tsutomu Sawano, Yasuhiko Shimotsuma, Kiyotaka Miura, and Kazuyuki Hirao, "Fabrication of three-dimensional 1 × 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam," Opt. Express 18, 12136-12143 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-12-12136
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