Using focused ion beam etching techniques, micropillar cavities were fabricated from a high reflective AlAs/AlGaAs distributed Bragg reflector planar cavity containing self-assembled InP quantum dots in (Al_0.20Ga_0.80)_0.51In_0.49P barrier layers. The mode spectra of pillars with different diameters were investigated using micro-photoluminescence, showing excellent agreement with theory. Quality factors of the pillar cavities up to 3650 were observed. Furthermore, for a microcavity pillar with 1.26 µm diameter, single-photon emission is demonstrated by performing photon correlation measurements under pulsed excitation.

© 2010 Optical Society of America

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5. C. Santori, M. Pelton, G. Solomon, Y. Dale, and Y. Yamamoto, “Triggered Single Photons from a Quantum Dot,” Phys. Rev. Lett. 86, 1502 (2001). [CrossRef] [PubMed]
6. M. Pelton, J . Vučković, G. S. Solomon, A. Scherer, and Y. Yamamoto, “Three-Dimensionally Confined Modes in Micropost Microcavities: Quality Factors and Purcell Factors,” IEEE J. Quantum Electron. 38, 170 (2002). [CrossRef]
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10. T. Thomay, T. Hanke, M. Tomas, F. Sotier, K. Beha, V. Knittel, M. Kahl, K. M. Whitaker, D. R. Gamelin, A. Leitenstorfer, and R. Bratschitsch, “Colloidal ZnO quantum dots in ultraviolet pillar microcavities,” Opt. Express 16, 9791 (2008). [CrossRef] [PubMed]
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13. T. Heindel, C. Schneider, M. Lermer, S. H. Kwon, T. Braun, S. Reitzenstein, S. Höfling, M. Kamp, and A. Forchel, “Electrically driven quantum dot-micropillar single photon source with 34% overall efficiency,” Appl. Phys. Lett. 96, 011107 (2010). [CrossRef]
14. M. Reischle, G. J. Beirne, W.-M. Schulz, M. Eichfelder, R. Roßbach, M. Jetter, and P. Michler, “Electrically pumped single-photon emission in the visible spectral range up to 80 K,” Opt. Express 16, 12771 (2008). [PubMed]
15. W.-M. Schulz, R. Roßbach, M. Reischle, G. J. Beirne, M. Bommer, M. Jetter, and P. Michler, “Optical and structural properties of InP quantum dots embedded in (AlxGa1−x)0.51In0.49P,” Phys. Rev. B 79, 035329 (2009). [CrossRef]
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20. . LayTec GmbH, Berlin, Germany, www.laytec.de.
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25. . C. Schneider, T. Heindel, A. Huggenberger, P. Weinmann, C. Kistner, M. Kamp, S. Reitzenstein, S. Hofling, and A. Forchel, “Single photon emission from a site-controlled quantum dot-micropillar cavity system,” Appl. Phys. Lett. 94, 111111 (2009). [CrossRef]
26. R. Brouri, A. Beveratos, J.-P. Poizat, and P. Grangier, “Photon antibunching in the fluorescence of individual color centers in diamond,” Opt. Lett. 25, 1294 (2000). [CrossRef]
27. W. L. Barnes, G. Bjork, J. M . Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: light collection strategies,” Eur. Phys. J. D 18, 197 (2002). [CrossRef]

Akad. Wiss. Wien Kl.IIb

• I. N. Stranski and L. Krastanow, “Zur Theorie der orientierten Ausscheidung von Ionenkristailen aufeinander,” Akad. Wiss. Wien Kl.IIb 146, 797 (1938).

Appl. Phys. Lett.

• M. Eichfelder,W.-M. Schulz, M. Reischle, M. Wiesner, R. Roßbach, M. Jetter, and P. Michler, “Roomtemperature lasing of electrically pumped red-emitting InP/(Al0.20Ga0.80)0.51In0.49P quantum dots embedded in a vertical microcavity,” Appl. Phys. Lett. 95, 131107 (2009). [CrossRef]
• J. M. Gerard, D . Barrier, J. Y . Marzin, R. Kuszelewicz, L. Manin, E. Costard, V. Thierry-Mieg, and T. Rivera, “Quantum boxes as active probes for photonic microstructures: The pillar microcavity case,” Appl. Phys. Lett. 69, 449 (1996). [CrossRef]
• T. Rivera, J. P. Debray, J. M. Gerard, L. Manin-Ferlazzo, and J. L. Oudar, “Optical losses in plasma-etched AlGaAs microresonators using reflection spectroscopy,” Appl. Phys. Lett. 74, 911 (1999). [CrossRef]
• . C. Schneider, T. Heindel, A. Huggenberger, P. Weinmann, C. Kistner, M. Kamp, S. Reitzenstein, S. Hofling, and A. Forchel, “Single photon emission from a site-controlled quantum dot-micropillar cavity system,” Appl. Phys. Lett. 94, 111111 (2009). [CrossRef]
• Y. Arakawa and H. Sakaki, “Multidimensional quantum well laser and temperature dependence of its threshold current,” Appl. Phys. Lett. 40, 939 (1982). [CrossRef]
• P. Michler, A. Kiraz, L. Zhang, C. Becher, E. Hu, and A. Imamoglu, “Laser emission from quantum dots in microdisk structures,” Appl. Phys. Lett. 77, 184 (2000). [CrossRef]
• H. Lohmeyer, J. Kalden, K. Sebald, C. Kruse, D. Hommel, and J. Gutowski, “Fine tuning of quantum-dot pillar microcavities by focused ion beam milling,” Appl. Phys. Lett. 92, 011116 (2008). [CrossRef]
• T. Heindel, C. Schneider, M. Lermer, S. H. Kwon, T. Braun, S. Reitzenstein, S. Höfling, M. Kamp, and A. Forchel, “Electrically driven quantum dot-micropillar single photon source with 34% overall efficiency,” Appl. Phys. Lett. 96, 011107 (2010). [CrossRef]

Eur. Phys. J. B

• H. Lohmeyer, K. Sebald, J. Gutowski, R. Kröoger, C. Kruse, D. Hommel, J. Wiersig, and F. Jahnke, “Resonant modes in monolithic nitride pillar microcavities,” Eur. Phys. J. B 48, 291 (2005). [CrossRef]

Eur. Phys. J. D

• W. L. Barnes, G. Bjork, J. M . Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: light collection strategies,” Eur. Phys. J. D 18, 197 (2002). [CrossRef]

IEEE J. Quantum Electron.

• M. Pelton, J . Vučković, G. S. Solomon, A. Scherer, and Y. Yamamoto, “Three-Dimensionally Confined Modes in Micropost Microcavities: Quality Factors and Purcell Factors,” IEEE J. Quantum Electron. 38, 170 (2002). [CrossRef]

IEEE J. Sel. Top. Quantum Electron.

• . H. P. A. van den Boom,W. Li, P. K. van Bennekom, I. T. Monroy, and G.-D. Khoe, “High-Capacity Transmission Over Polymer Optical Fiber,” IEEE J. Sel. Top. Quantum Electron. 7, 461 (2001). [CrossRef]

J. Micromech. Microeng.

• S. Reyntjens and R. Puers, “A review of focused ion beam applications in microsystem technology,” J. Micromech. Microeng. 11, 287 (2001). [CrossRef]

J. Phys. D: Appl. Phys.

• D. Bimberg, “Quantum dots for lasers, amplifiers and computing,” J. Phys. D: Appl. Phys. 38, 2055 (2005). [CrossRef]

Nano Lett.

• M. Kahl, T. Thomay, V. Kohnle, K. Beha, J. Merlein, M. Hagner, A. Halm, J. Ziegler, T. Nann, Y. Fedutik, U. Woggon, M. Artemyev, F . Pérez-Willard, A . Leitenstorfer, and R. Bratschitsch, “Colloidal Quantum Dots in All-Dielectric High-Q Pillar Microcavities,” Nano Lett. 7, 2897 (2007). [CrossRef] [PubMed]

Nature (London)

• R. Hanbury-Brown, and R. Q. Twiss, “The Question of Correlation Between Photonics in Coherent Light Rays,” Nature (London) 178, 1447 (1956). [CrossRef]

Opt. Express

• M. Karl, S. Li, T. Passow, W. Löffler, H. Kalt, and M. Hetterich, “Localized and delocalized modes in coupled optical micropillar cavities,” Opt. Express 15, 8191 (2007). [CrossRef] [PubMed]
• T. Thomay, T. Hanke, M. Tomas, F. Sotier, K. Beha, V. Knittel, M. Kahl, K. M. Whitaker, D. R. Gamelin, A. Leitenstorfer, and R. Bratschitsch, “Colloidal ZnO quantum dots in ultraviolet pillar microcavities,” Opt. Express 16, 9791 (2008). [CrossRef] [PubMed]
• M. Reischle, G. J. Beirne, W.-M. Schulz, M. Eichfelder, R. Roßbach, M. Jetter, and P. Michler, “Electrically pumped single-photon emission in the visible spectral range up to 80 K,” Opt. Express 16, 12771 (2008). [PubMed]

Opt. Lett.

• R. Brouri, A. Beveratos, J.-P. Poizat, and P. Grangier, “Photon antibunching in the fluorescence of individual color centers in diamond,” Opt. Lett. 25, 1294 (2000). [CrossRef]

Phys. Rev. B

• W.-M. Schulz, R. Roßbach, M. Reischle, G. J. Beirne, M. Bommer, M. Jetter, and P. Michler, “Optical and structural properties of InP quantum dots embedded in (AlxGa1−x)0.51In0.49P,” Phys. Rev. B 79, 035329 (2009). [CrossRef]

Phys. Rev. Lett.

• G. Brassard, N. Lutkenhaus, T. Mor, and B. C. Sanders, “Limitations on Practical Quantum Cryptography,” Phys. Rev. Lett. 85, 1330 (2000). [CrossRef] [PubMed]
• C. Santori, M. Pelton, G. Solomon, Y. Dale, and Y. Yamamoto, “Triggered Single Photons from a Quantum Dot,” Phys. Rev. Lett. 86, 1502 (2001). [CrossRef] [PubMed]

Phys. Stat. Sol. B

• K. Sebald, C. Kruse, and J. Wiersig, “Properties and prospects of blue-green emitting II-VI-based monolithic microcavities,” Phys. Stat. Sol. B 246, 255 (2009). [CrossRef]

Science

• P. Michler, A. Kiraz, C. Becher,W. V. Schoenfeld, P. M. Petroff, L. Zhang, E. Hu, and A. Imamoglu, “A Quantum Dot Single-Photon Turnstile Device,” Science 290, 2282 (2000). [CrossRef] [PubMed]

Other

• . LayTec GmbH, Berlin, Germany, www.laytec.de.

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