Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

doi:10.1364/OE.18.015009

Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun »View Author Affiliations

Optics Express, Vol. 18, Issue 14, pp. 15009-15016 (2010)
http://dx.doi.org/10.1364/OE.18.015009

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Abstract

We demonstrate the fabrication of diffractive optical elements (DOEs) on 3-Dimensional curved surfaces by capillary force lithography (CFL). Curved gratings with a period of 20μm and 820nm have been successfully fabricated in polymer on concave surfaces by CFL. The experiment results indicate that the capillary force lithography is an effective method to replicate DOEs on curved surfaces with a very high fidelity and a relatively fast speed. In addition, we found that the growth rate of the polymer in the sub-microfabrication is much faster and the step height is much closer to the master than that in the microfabrication for CFL, which makes CFL more attractive in the fabrication of DOEs with a sub-microscale or even nanoscale feature size than a microscale feature size.

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 5, 2010
Revised Manuscript: June 5, 2010
Manuscript Accepted: June 9, 2010
Published: June 29, 2010

Citation
Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun, "Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography," Opt. Express 18, 15009-15016 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-14-15009

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References

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K. Y. Suh and H. H. Lee, “Capillary force lithography: large-area patterning, self-organization, and anisotropic dewetting,” Adv. Funct. Mater. 12(6-7), 405–413 (2002). [CrossRef]
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D. Y. Khang and H. H. Lee, “Pressure-assisted capillary force lithography,” Adv. Mater. 16(2), 176–179 (2004). [CrossRef]
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K. Y. Suh, M. C. Park, and P. Kim, “Capillary force lithography: a versatile tool for structured biomaterials interface towards cell and tissue engineering,” Adv. Funct. Mater. 19(17), 2699–2712 (2009). [CrossRef]
R. Kwak, H. E. Jeong, and K. Y. Suh, “Fabrication of monolithic bridge structures by vacuum-assisted capillary-force lithography,” Small 5(7), 790–794 (2009). [CrossRef] [PubMed]
K. Y. Suh, P. Kim, and H. H. Lee, “Capillary kinetics of thin polymer films in permeable microcavities,” Appl. Phys. Lett. 85(18), 4019–4021 (2004). [CrossRef]

Adv. Funct. Mater.

K. Y. Suh and H. H. Lee, “Capillary force lithography: large-area patterning, self-organization, and anisotropic dewetting,” Adv. Funct. Mater. 12(6-7), 405–413 (2002). [CrossRef]
K. Y. Suh, M. C. Park, and P. Kim, “Capillary force lithography: a versatile tool for structured biomaterials interface towards cell and tissue engineering,” Adv. Funct. Mater. 19(17), 2699–2712 (2009). [CrossRef]

Adv. Mater.

D. Y. Khang and H. H. Lee, “Pressure-assisted capillary force lithography,” Adv. Mater. 16(2), 176–179 (2004). [CrossRef]
K. Y. Suh, Y. S. Kim, and H. H. Lee, “Capillary force lithography,” Adv. Mater. 13(18), 1386–1389 (2001). [CrossRef]
W. R. Childs and R. G. Nuzzo, “Patterning of thin-film microstructures on non-planar substrate surface using decal transfer lithography,” Adv. Mater. 16(15), 1323–1327 (2004). [CrossRef]

Annu. Rev. Mater. Sci.

Y. Xia and G. M. Whitesides, “Soft lithography,” Annu. Rev. Mater. Sci. 28(1), 153–184 (1998). [CrossRef]

Appl. Phys. Lett.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3136 (1995). [CrossRef]
K. Y. Suh, P. Kim, and H. H. Lee, “Capillary kinetics of thin polymer films in permeable microcavities,” Appl. Phys. Lett. 85(18), 4019–4021 (2004). [CrossRef]

J. Am. Chem. Soc.

W. R. Childs and R. G. Nuzzo, “Decal transfer microlithography: a new soft-lithographic patterning method,” J. Am. Chem. Soc. 124(45), 13583–13596 (2002). [CrossRef] [PubMed]

J. Vac. Sci. Technol. B

P. Ruchhoeft, M. Colburn, B. Choi, H. Nounu, S. Johnson, T. Bailey, S. Damle, M. Stewart, J. Ekerdt, S. V. Sreenivasan, J. C. Wolfe, and C. G. Willson, “Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography,” J. Vac. Sci. Technol. B 17(6), 2965–2969 (1999). [CrossRef]

Nature

H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C.-J. Yu, J. B. Geddes, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, “A hemispherical electronic eye camera based on compressible silicon optoelectronics,” Nature 454(7205), 748–753 (2008). [CrossRef] [PubMed]
E. Kim, Y. Xia, and G. M. Whitesides, “Polymer microsturctures formed by moulding in capillaries,” Nature 376(6541), 581–584 (1995). [CrossRef]

Opt. Express

Polymer (Guildf.)

X. Yu, Z. Wang, R. Xing, S. Luan, and Y. Han, “Solvent assisted capillary force lithography,” Polymer (Guildf.) 46(24), 11099–11103 (2005). [CrossRef]

Science

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996). [CrossRef]
K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312(5773), 557–561 (2006). [CrossRef] [PubMed]

Small

R. Kwak, H. E. Jeong, and K. Y. Suh, “Fabrication of monolithic bridge structures by vacuum-assisted capillary-force lithography,” Small 5(7), 790–794 (2009). [CrossRef] [PubMed]

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