OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 14 — Jul. 5, 2010
  • pp: 15009–15016

Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun  »View Author Affiliations


Optics Express, Vol. 18, Issue 14, pp. 15009-15016 (2010)
http://dx.doi.org/10.1364/OE.18.015009


View Full Text Article

Enhanced HTML    Acrobat PDF (904 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate the fabrication of diffractive optical elements (DOEs) on 3-Dimensional curved surfaces by capillary force lithography (CFL). Curved gratings with a period of 20μm and 820nm have been successfully fabricated in polymer on concave surfaces by CFL. The experiment results indicate that the capillary force lithography is an effective method to replicate DOEs on curved surfaces with a very high fidelity and a relatively fast speed. In addition, we found that the growth rate of the polymer in the sub-microfabrication is much faster and the step height is much closer to the master than that in the microfabrication for CFL, which makes CFL more attractive in the fabrication of DOEs with a sub-microscale or even nanoscale feature size than a microscale feature size.

© 2010 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 5, 2010
Revised Manuscript: June 5, 2010
Manuscript Accepted: June 9, 2010
Published: June 29, 2010

Citation
Dengying Zhang, Weixing Yu, Taisheng Wang, Zhenwu Lu, and Qiang Sun, "Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography," Opt. Express 18, 15009-15016 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-14-15009


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C.-J. Yu, J. B. Geddes, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, “A hemispherical electronic eye camera based on compressible silicon optoelectronics,” Nature 454(7205), 748–753 (2008). [CrossRef] [PubMed]
  2. K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312(5773), 557–561 (2006). [CrossRef] [PubMed]
  3. Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, “Lithographic fabrication of large diffractive optical elements on a concave lens surface,” Opt. Express 10(20), 1043–1047 (2002). [PubMed]
  4. Y. Xie, Z. Lu, and F. Li, “Fabrication of large diffractive optical elements in thick film on a concave lens surface,” Opt. Express 11(9), 992–995 (2003). [CrossRef] [PubMed]
  5. W. R. Childs and R. G. Nuzzo, “Patterning of thin-film microstructures on non-planar substrate surface using decal transfer lithography,” Adv. Mater. 16(15), 1323–1327 (2004). [CrossRef]
  6. W. R. Childs and R. G. Nuzzo, “Decal transfer microlithography: a new soft-lithographic patterning method,” J. Am. Chem. Soc. 124(45), 13583–13596 (2002). [CrossRef] [PubMed]
  7. P. Ruchhoeft, M. Colburn, B. Choi, H. Nounu, S. Johnson, T. Bailey, S. Damle, M. Stewart, J. Ekerdt, S. V. Sreenivasan, J. C. Wolfe, and C. G. Willson, “Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography,” J. Vac. Sci. Technol. B 17(6), 2965–2969 (1999). [CrossRef]
  8. Y. Xie, Z. Lu, and F. Li, “Lithographic fabrication of large curved hologram by laser writer,” Opt. Express 12(9), 1810–1814 (2004). [CrossRef] [PubMed]
  9. H. Liu, Z. Lu, F. Li, Y. Xie, S. Kan, and S. Wang, “Using curved hologram to test large-aperture convex surface,” Opt. Express 12(14), 3251–3256 (2004). [CrossRef] [PubMed]
  10. Y. Xia and G. M. Whitesides, “Soft lithography,” Annu. Rev. Mater. Sci. 28(1), 153–184 (1998). [CrossRef]
  11. K. Y. Suh, Y. S. Kim, and H. H. Lee, “Capillary force lithography,” Adv. Mater. 13(18), 1386–1389 (2001). [CrossRef]
  12. K. Y. Suh and H. H. Lee, “Capillary force lithography: large-area patterning, self-organization, and anisotropic dewetting,” Adv. Funct. Mater. 12(6-7), 405–413 (2002). [CrossRef]
  13. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3136 (1995). [CrossRef]
  14. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996). [CrossRef]
  15. E. Kim, Y. Xia, and G. M. Whitesides, “Polymer microsturctures formed by moulding in capillaries,” Nature 376(6541), 581–584 (1995). [CrossRef]
  16. D. Y. Khang and H. H. Lee, “Pressure-assisted capillary force lithography,” Adv. Mater. 16(2), 176–179 (2004). [CrossRef]
  17. X. Yu, Z. Wang, R. Xing, S. Luan, and Y. Han, “Solvent assisted capillary force lithography,” Polymer (Guildf.) 46(24), 11099–11103 (2005). [CrossRef]
  18. K. Y. Suh, M. C. Park, and P. Kim, “Capillary force lithography: a versatile tool for structured biomaterials interface towards cell and tissue engineering,” Adv. Funct. Mater. 19(17), 2699–2712 (2009). [CrossRef]
  19. R. Kwak, H. E. Jeong, and K. Y. Suh, “Fabrication of monolithic bridge structures by vacuum-assisted capillary-force lithography,” Small 5(7), 790–794 (2009). [CrossRef] [PubMed]
  20. K. Y. Suh, P. Kim, and H. H. Lee, “Capillary kinetics of thin polymer films in permeable microcavities,” Appl. Phys. Lett. 85(18), 4019–4021 (2004). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited