Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

doi:10.1364/OE.18.019286

Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

Ting Han, Steve Madden, Douglas Bulla, and Barry Luther-Davies »View Author Affiliations

Optics Express, Vol. 18, Issue 18, pp. 19286-19291 (2010)
http://dx.doi.org/10.1364/OE.18.019286

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Abstract
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Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 – 4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

OCIS Codes
(130.4310) Integrated optics : Nonlinear
(190.4360) Nonlinear optics : Nonlinear optics, devices
(130.2755) Integrated optics : Glass waveguides

ToC Category:
Integrated Optics

History
Original Manuscript: June 18, 2010
Revised Manuscript: July 18, 2010
Manuscript Accepted: July 20, 2010
Published: August 26, 2010

Citation
Ting Han, Steve Madden, Douglas Bulla, and Barry Luther-Davies, "Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography," Opt. Express 18, 19286-19291 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-18-19286

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References

C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001). [CrossRef]
J. M. Harbold, F. O. Ilday, F. W. Wise, J. S. Sanghera, V. Q. Nguyen, L. B. Shaw, and I. D. Aggarwal, “Highly nonlinear As-S-Se glasses for all-optical switching,” Opt. Lett. 27(2), 119–121 (2002). [CrossRef]
A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008). [CrossRef] [PubMed]
M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008). [CrossRef]
M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009). [CrossRef] [PubMed]
V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006). [CrossRef] [PubMed]
S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007). [CrossRef] [PubMed]
D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010). [CrossRef]
D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010). [CrossRef]
D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008). [CrossRef]
H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008). [CrossRef]
X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003). [CrossRef]
W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008). [CrossRef]
M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008). [CrossRef]
Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009). [CrossRef] [PubMed]
T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009). [CrossRef] [PubMed]
M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008). [CrossRef] [PubMed]
P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt. 10(11), 2395–2413 (1971). [CrossRef] [PubMed]
R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006). [CrossRef]
S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

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[1] C. Quémard, F. Smektala, V. Couderc, A. Barthelemy, and J. Lucas, “Chalcogenide glasses with high non linear optical properties for telecommunications,” J. Phys. Chem. Solids 62(8), 1435–1440 (2001). [CrossRef]

[2] J. M. Harbold, F. O. Ilday, F. W. Wise, J. S. Sanghera, V. Q. Nguyen, L. B. Shaw, and I. D. Aggarwal, “Highly nonlinear As-S-Se glasses for all-optical switching,” Opt. Lett. 27(2), 119–121 (2002). [CrossRef]

[3] A. Prasad, C. J. Zha, R. P. Wang, A. Smith, S. Madden, and B. Luther-Davies, “Properties of GexAsySe1-x-y glasses for all-optical signal processing,” Opt. Express 16(4), 2804–2815 (2008). [CrossRef] [PubMed]

[4] M. D. Pelusi, V. G. Ta’eed, E. Libin Fu, M. R. E. Magi, S. Lamont, Madden, D. A. P. Duk-Yong Choi, B. Bulla, Luther-Davies, and B. J. Eggleton, “Applications of highly-nonlinear chalcogenide glass devices tailored for high-speed all-optical signal processing,” IEEE J. Sel. Top. Quantum Electron. 14(3), 529–539 (2008). [CrossRef]

[5] M. Galili, J. Xu, H. C. Mulvad, L. K. Oxenløwe, A. T. Clausen, P. Jeppesen, B. Luther-Davies, S. Madden, A. Rode, D.-Y. Choi, M. Pelusi, F. Luan, and B. J. Eggleton, “Breakthrough switching speed with an all-optical chalcogenide glass chip: 640 Gbit/s demultiplexing,” Opt. Express 17(4), 2182–2187 (2009). [CrossRef] [PubMed]

[6] V. G. Ta’eed, M. R. E. Lamont, D. J. Moss, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, “All optical wavelength conversion via cross phase modulation in chalcogenide glass rib waveguides,” Opt. Express 14(23), 11242–11247 (2006). [CrossRef] [PubMed]

[7] S. J. Madden, D. Y. Choi, D. A. Bulla, A. V. Rode, B. Luther-Davies, V. G. Ta’eed, M. D. Pelusi, and B. J. Eggleton, “Long, low loss etched As(2)S(3) chalcogenide waveguides for all-optical signal regeneration,” Opt. Express 15(22), 14414–14421 (2007). [CrossRef] [PubMed]

[8] D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Submicrometer-Thick Low-Loss As2S3 Planar Waveguides for Nonlinear Optical Devices,” IEEE Photon. Technol. Lett. 22(7), 495–497 (2010). [CrossRef]

[9] D. Choi, S. Madden, D. Bulla, R. Wang, A. Rode, and B. Luther-Davies, “Thermal annealing of arsenic tri-sulphide thin film and its influence on device performance,” J. Appl. Phys. 107(5), 053106 (2010). [CrossRef]

[10] D. Y. Choi, S. Madden, A. Rode, R. P. Wang, A. Ankiewicz, and B. Luther-Davies, “Surface roughness in plasma-etched As2S3 films: Its origin and improvement,” IEEE Trans. NanoTechnol. 7(3), 285–290 (2008). [CrossRef]

[11] H. Schift, “Nanoimprint lithography: An old story in modern times? A review,” J. Vac. Sci. Technol. B 26(2), 458–480 (2008). [CrossRef]

[12] X. H. Zhang, Y. Guimond, and Y. Bellec, “Production of complex chalcogenide glass optics by molding for thermal imaging,” J. Non-Cryst. Solids 326-327, 519–523 (2003). [CrossRef]

[13] W. J. Pan, H. Rowe, D. Zhang, Y. Zhang, A. Loni, D. Furniss, P. Sewell, T. M. Benson, and A. B. Seddon, “One-step hot embossing of optical rib waveguides in chalcogenide glasses,” Microw. Opt. Technol. Lett. 50(7), 1961–1963 (2008). [CrossRef]

[14] M. Solmaz, H. Park, C. K. Madsen, and X. Cheng, “Patterning chalcogenide glass by direct resist-free thermal nanoimprint,” J. Vac. Sci. Technol. B 26(2), 606–610 (2008). [CrossRef]

[15] Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009). [CrossRef] [PubMed]

[16] T. Han, S. Madden, M. Zhang, R. Charters, and B. Luther-Davies, “Low loss high index contrast nanoimprinted polysiloxane waveguides,” Opt. Express 17(4), 2623–2630 (2009). [CrossRef] [PubMed]

[17] M. R. E. Lamont, B. Luther-Davies, D. Y. Choi, S. Madden, and B. J. Eggleton, “Supercontinuum generation in dispersion engineered highly nonlinear (gamma = 10 /W/m) As2S3) chalcogenide planar waveguide,” Opt. Express 16(19), 14938–14944 (2008). [CrossRef] [PubMed]

[18] P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt. 10(11), 2395–2413 (1971). [CrossRef] [PubMed]

[19] R. Wang, S. Madden, C. Zha, A. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys. 100(6), 063524 (2006). [CrossRef]

[20] S. Madden, D. Choi, A. Rode, and B. Luther-Davies, “Low Loss Etched Ge33As12Se55 Chalcogenide Waveguides, Proc ACOFT-AOS 2006, 75-78, (2006).

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Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography