Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.

doi:10.1364/OE.18.021490

Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.

Sheeba Rajesh and Yves Bellouard »View Author Affiliations

Optics Express, Vol. 18, Issue 20, pp. 21490-21497 (2010)
http://dx.doi.org/10.1364/OE.18.021490

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Abstract

Femtosecond laser micromachining of glass material using low-energy, sub-ablation threshold pulses find numerous applications in the fields of integrated optics, lab-on-a-chips and microsystems in general. In this paper, we study the influence of the laser-deposited energy on the performance of the micromachining process. In particular, we show that the energy deposited in the substrate affects its etching rate. Furthermore, we demonstrate the existence of an optimal energy deposition value. These results are not only important from an industrial point-of-view but also provide new evidences supporting the essential role of densification and consequently stress-generation as the main driving factor promoting enhanced etching rate following laser exposure.

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(320.2250) Ultrafast optics : Femtosecond phenomena
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Laser Microfabrication

History
Original Manuscript: August 10, 2010
Revised Manuscript: September 5, 2010
Manuscript Accepted: September 8, 2010
Published: September 24, 2010

Citation
Sheeba Rajesh and Yves Bellouard, "Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.," Opt. Express 18, 21490-21497 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-20-21490

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References

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996). [CrossRef] [PubMed]
Y. Sikorski, A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36(3), 226–227 (2000). [CrossRef]
K. Minoshima, A. M. Kowalevicz, I. Hartl, E. P. Ippen, and J. G. Fujimoto, “Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator,” Opt. Lett. 26(19), 1516–1518 (2001). [CrossRef]
S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, “Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics,” Appl. Phys., A Mater. Sci. Process. 77(1), 109–111 (2003). [CrossRef]
R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo, “Femtosecond writing of active optical waveguides with astigmatically shaped beams,” J. Opt. Soc. Am. B 20(7), 1559–1567 (2003). [CrossRef]
R. W. A. Applegate, J. Squier, T. Vestad, J. Oakey, D. W. M. Marr, P. Bado, M. A. Dugan, and A. A. Said, “Microfluidic sorting system based on optical waveguide integration and diode laser bar trapping,” Lab Chip 6(3), 422–426 (2006). [CrossRef] [PubMed]
Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008). [CrossRef]
Y. Bellouard, A. Said, and P. Bado, “Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica,” Opt. Express 13(17), 6635–6644 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-17-6635 . [CrossRef] [PubMed]
Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate,” in International Symposium on Optomechatronic Technologies (2009), pp. 445–450.
A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001). [CrossRef]
Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express 12(10), 2120–2129 (2004), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-10-2120 . [CrossRef] [PubMed]
S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates,” J. Phys. Chem. C 113(27), 11560–11566 (2009). [CrossRef]
C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica,” Opt. Lett. 30(14), 1867–1869 (2005). [CrossRef] [PubMed]
C. Schaffer, J. García, and E. Mazur, “Bulk heating of transparent materials using a high-repetition-rate femtosecond laser,” Appl. Phys., A Mater. Sci. Process. 76(3), 351–354 (2003). [CrossRef]
S. Eaton, H. Zhang, P. Herman, F. Yoshino, L. Shah, J. Bovatsek, and A. Arai, “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate,” Opt. Express 13(12), 4708–4716 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-12-4708 . [CrossRef] [PubMed]
W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93(17), 171109 (2008). [CrossRef]
W. Yang, P. G. Kazansky, and Y. P. Svirko, “Non-reciprocal ultrafast laser writing,” Nat. Photonics 2(2), 99–104 (2008). [CrossRef]
B. Poumellec, M. Lancry, J.-C. Poulin, and S. Ani-Joseph, “Non reciprocal writing and chirality in femtosecond laser irradiated silica,” Opt. Express 16(22), 18354–18361 (2008), http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-22-18354 . [CrossRef] [PubMed]
J. W. Chan, T. Huser, S. Risbud, and D. M. Krol, “Structural changes in fused silica after exposure to focused femtosecond laser pulses,” Opt. Lett. 26(21), 1726–1728 (2001). [CrossRef]
Y. Bellouard, E. Barthel, A. A. Said, M. Dugan, and P. Bado, “Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to low-energy femtosecond laser pulses,” Opt. Express 16(24), 19520–19534 (2008), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-24-19520 . [CrossRef] [PubMed]
Y. Bellouard, T. Colomb, C. Depeursinge, M. Dugan, A. A. Said, and P. Bado, “Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses,” Opt. Express 14(18), 8360–8366 (2006), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-18-8360 . [CrossRef] [PubMed]
M. Tomozawa, Y. Lee, and Y. Peng, “Effect of uniaxial stresses on silica glass structure investigated by IR spectroscopy,” J. Non-Cryst. Solids 242(2-3), 104–109 (1998). [CrossRef]
A. Agarwal and M. Tomozawa, “Correlation of silica glass properties with the infrared spectra,” J. Non-Cryst. Solids 209(1-2), 166–174 (1997). [CrossRef]
Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003). [CrossRef] [PubMed]
K. Awazu and H. Kawazoe, “Strained Si–O–Si bonds in amorphous SiO2 materials: A family member of active centers in radio, photo, and chemical responses,” J. Appl. Phys. 94(10), 6243–6262 (2003). [CrossRef]

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[1] K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996). [CrossRef] [PubMed]

[2] Y. Sikorski, A. Said, P. Bado, R. Maynard, C. Florea, and K. Winick, “Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,” Electron. Lett. 36(3), 226–227 (2000). [CrossRef]

[3] K. Minoshima, A. M. Kowalevicz, I. Hartl, E. P. Ippen, and J. G. Fujimoto, “Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator,” Opt. Lett. 26(19), 1516–1518 (2001). [CrossRef]

[4] S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, “Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics,” Appl. Phys., A Mater. Sci. Process. 77(1), 109–111 (2003). [CrossRef]

[5] R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S. De Silvestri, and G. Cerullo, “Femtosecond writing of active optical waveguides with astigmatically shaped beams,” J. Opt. Soc. Am. B 20(7), 1559–1567 (2003). [CrossRef]

[6] R. W. A. Applegate, J. Squier, T. Vestad, J. Oakey, D. W. M. Marr, P. Bado, M. A. Dugan, and A. A. Said, “Microfluidic sorting system based on optical waveguide integration and diode laser bar trapping,” Lab Chip 6(3), 422–426 (2006). [CrossRef] [PubMed]

[7] Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008). [CrossRef]

[8] Y. Bellouard, A. Said, and P. Bado, “Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica,” Opt. Express 13(17), 6635–6644 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-17-6635 . [CrossRef] [PubMed]

[9] Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate,” in International Symposium on Optomechatronic Technologies (2009), pp. 445–450.

[10] A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001). [CrossRef]

[11] Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express 12(10), 2120–2129 (2004), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-10-2120 . [CrossRef] [PubMed]

[12] S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates,” J. Phys. Chem. C 113(27), 11560–11566 (2009). [CrossRef]

[13] C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica,” Opt. Lett. 30(14), 1867–1869 (2005). [CrossRef] [PubMed]

[14] C. Schaffer, J. García, and E. Mazur, “Bulk heating of transparent materials using a high-repetition-rate femtosecond laser,” Appl. Phys., A Mater. Sci. Process. 76(3), 351–354 (2003). [CrossRef]

[15] S. Eaton, H. Zhang, P. Herman, F. Yoshino, L. Shah, J. Bovatsek, and A. Arai, “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate,” Opt. Express 13(12), 4708–4716 (2005), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-12-4708 . [CrossRef] [PubMed]

[16] W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93(17), 171109 (2008). [CrossRef]

[17] W. Yang, P. G. Kazansky, and Y. P. Svirko, “Non-reciprocal ultrafast laser writing,” Nat. Photonics 2(2), 99–104 (2008). [CrossRef]

[18] B. Poumellec, M. Lancry, J.-C. Poulin, and S. Ani-Joseph, “Non reciprocal writing and chirality in femtosecond laser irradiated silica,” Opt. Express 16(22), 18354–18361 (2008), http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-22-18354 . [CrossRef] [PubMed]

[19] J. W. Chan, T. Huser, S. Risbud, and D. M. Krol, “Structural changes in fused silica after exposure to focused femtosecond laser pulses,” Opt. Lett. 26(21), 1726–1728 (2001). [CrossRef]

[20] Y. Bellouard, E. Barthel, A. A. Said, M. Dugan, and P. Bado, “Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to low-energy femtosecond laser pulses,” Opt. Express 16(24), 19520–19534 (2008), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-24-19520 . [CrossRef] [PubMed]

[21] Y. Bellouard, T. Colomb, C. Depeursinge, M. Dugan, A. A. Said, and P. Bado, “Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses,” Opt. Express 14(18), 8360–8366 (2006), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-18-8360 . [CrossRef] [PubMed]

[22] M. Tomozawa, Y. Lee, and Y. Peng, “Effect of uniaxial stresses on silica glass structure investigated by IR spectroscopy,” J. Non-Cryst. Solids 242(2-3), 104–109 (1998). [CrossRef]

[23] A. Agarwal and M. Tomozawa, “Correlation of silica glass properties with the infrared spectra,” J. Non-Cryst. Solids 209(1-2), 166–174 (1997). [CrossRef]

[24] Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett. 91(24), 247405 (2003). [CrossRef] [PubMed]

[25] K. Awazu and H. Kawazoe, “Strained Si–O–Si bonds in amorphous SiO2 materials: A family member of active centers in radio, photo, and chemical responses,” J. Appl. Phys. 94(10), 6243–6262 (2003). [CrossRef]

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Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.