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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 7 — Mar. 29, 2010
  • pp: 7031–7037

Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator

Taro Ikeda, Kazunori Takahashi, Yoshiaki Kanamori, and Kazuhiro Hane  »View Author Affiliations

Optics Express, Vol. 18, Issue 7, pp. 7031-7037 (2010)

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Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phase-shift was measured in a Mach-Zehnder interferometer to be 3.0π at the displacement of 1.0 μm at the voltage of 31V. The dimension of the fabricated device is 50μm wide and 85μm long.

© 2010 OSA

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(250.5300) Optoelectronics : Photonic integrated circuits
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: January 6, 2010
Revised Manuscript: February 26, 2010
Manuscript Accepted: March 10, 2010
Published: March 22, 2010

Taro Ikeda, Kazunori Takahashi, Yoshiaki Kanamori, and Kazuhiro Hane, "Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator," Opt. Express 18, 7031-7037 (2010)

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