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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 8 — Apr. 12, 2010
  • pp: 8094–8106

Multi-pass Shack-Hartmann planeness test: monitoring thermal stress

J. Schwider and G. Leuchs  »View Author Affiliations

Optics Express, Vol. 18, Issue 8, pp. 8094-8106 (2010)

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The multi-pass solution for surface measurements with the help of a Shack-Hartmann sensor (SHS) on the basis of a Fizeau cavity enables fast access to surface deviation data due to the high speed of the SHS and easy referencing of the measured data through difference measurements. The multi-pass solution described in a previous publication [J. Schwider, Opt. Express 16, 362 (2008)], provides highly sensitive measurements of small displacements caused by thermal non-equilibrium states of the test set up. Here, we want to demonstrate how a pulsed thermal load changes the surface geometry. In addition the temporal response for different plate materials is monitored through a fast wave front measurement with very high sensitivity. The thermal load close to a delta-function in time will be applied from the back-side of a plane plate by heating a small Peltier element with a heat impulse of known order of magnitude. The development of the surface deviation on the time axis can be monitored by storing a set of successive deviation pictures.

© 2010 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6810) Instrumentation, measurement, and metrology : Thermal effects

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 4, 2010
Revised Manuscript: March 2, 2010
Manuscript Accepted: March 3, 2010
Published: April 1, 2010

J. Schwider and G. Leuchs, "Multi-pass Shack-Hartmann planeness test: monitoring thermal stress," Opt. Express 18, 8094-8106 (2010)

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