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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 9 — Apr. 26, 2010
  • pp: 9733–9738

The PDMS-based microfluidic channel fabricated by synchrotron radiation stimulated etching

Tingchao He, Changshun Wang, Tsuneo Urisu, Takeshi Nagahiro, Ryugo Tero, and Rong Xia  »View Author Affiliations

Optics Express, Vol. 18, Issue 9, pp. 9733-9738 (2010)

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Micro pattern on PDMS surface has been achieved by using synchrotron radiation (SR) stimulated etching. The experimental results indicated that SR stimulated etching has many advantages, such as extremely high etching rate (as large as 40-50 μ m per 10 min), area-selectivity and anisotropy at room temperature, high spatial resolution. Combining the SR stimulated etching with photolithography, a PDMS-based microfluidic channel was obtained. The aim of this work is to develop a three-dimensional microfluidic channel with a special through hole, which is beneficial for cell differentiation, functionality and longevity and cannot be fabricated by conventional direct tooling techniques.

© 2010 OSA

OCIS Codes
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation

ToC Category:
X-ray Optics

Original Manuscript: January 21, 2010
Revised Manuscript: April 11, 2010
Manuscript Accepted: April 11, 2010
Published: April 23, 2010

Virtual Issues
Vol. 5, Iss. 9 Virtual Journal for Biomedical Optics

Tingchao He, Changshun Wang, Tsuneo Urisu, Takeshi Nagahiro, Ryugo Tero, and Rong Xia, "The PDMS-based microfluidic channel fabricated by synchrotron radiation stimulated etching," Opt. Express 18, 9733-9738 (2010)

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