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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 10 — May. 9, 2011
  • pp: 9020–9026

Electrostatic actuation of silicon optomechanical resonators

Suresh Sridaran and Sunil A. Bhave  »View Author Affiliations


Optics Express, Vol. 19, Issue 10, pp. 9020-9026 (2011)
http://dx.doi.org/10.1364/OE.19.009020


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Abstract

Cavity optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator. Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for silicon micro electro mechanical resonators for application in filters and oscillators. Here, we demonstrate monolithic integration of electrostatic capacitive actuation with optical sensing using silicon optomechanical disk resonators and waveguides. The electrically excited mechanical motion is observed as an optical intensity modulation when the input electrical signal is at a frequency of 235MHz corresponding to the radial vibrational mode of the silicon microdisk.

© 2011 OSA

OCIS Codes
(230.4685) Optical devices : Optical microelectromechanical devices
(130.4110) Integrated optics : Modulators
(120.4880) Instrumentation, measurement, and metrology : Optomechanics

ToC Category:
Optical Devices

History
Original Manuscript: March 8, 2011
Revised Manuscript: April 17, 2011
Manuscript Accepted: April 18, 2011
Published: April 25, 2011

Citation
Suresh Sridaran and Sunil A. Bhave, "Electrostatic actuation of silicon optomechanical resonators," Opt. Express 19, 9020-9026 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-10-9020


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