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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 10 — May. 9, 2011
  • pp: 9172–9184

Analytic theory of soft x-ray diffraction by lamellar multilayer gratings

I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk  »View Author Affiliations


Optics Express, Vol. 19, Issue 10, pp. 9172-9184 (2011)
http://dx.doi.org/10.1364/OE.19.009172


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Abstract

An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.

© 2011 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(340.0340) X-ray optics : X-ray optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

History
Original Manuscript: February 23, 2011
Revised Manuscript: April 21, 2011
Manuscript Accepted: April 21, 2011
Published: April 26, 2011

Citation
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, "Analytic theory of soft x-ray diffraction by lamellar multilayer gratings," Opt. Express 19, 9172-9184 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-10-9172


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References

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