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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 12 — Jun. 6, 2011
  • pp: 11897–11905

Spherical silicon micromirrors bent by anodic bonding

Tong Wu, Takahiro Yamasaki, Ryohei Hokari, and Kazuhiro Hane  »View Author Affiliations

Optics Express, Vol. 19, Issue 12, pp. 11897-11905 (2011)

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We propose here a novel and stable method for fabricating spherical micromirror by bonding a flat freestanding single-crystal-silicon (SCS) membrane with a fulcrum on a glass substrate. Smooth convex spherical surface is achieved inside the fulcrum by the bending moment generated in the circumference of the SCS membrane. The surface profiles fit well with parabolic curves within 36nm RMS error indicating a good optical performance. By modifying the diameter of the fulcrum, we also demonstrate that it is possible to fabricate micromirrors with a wide range of focal length (0.4mm-1.6mm). The fabricated micromirrors are also used as the mold for replication of micro polymeric lenses. The surface profiles of the micromirrors are transferred to the polymeric replica with a high accuracy.

© 2011 OSA

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Optical Design and Fabrication

Original Manuscript: February 22, 2011
Revised Manuscript: May 27, 2011
Manuscript Accepted: May 30, 2011
Published: June 3, 2011

Tong Wu, Takahiro Yamasaki, Ryohei Hokari, and Kazuhiro Hane, "Spherical silicon micromirrors bent by anodic bonding," Opt. Express 19, 11897-11905 (2011)

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