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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 15 — Jul. 18, 2011
  • pp: 14008–14017

Stand-alone diamond binary phase transmission gratings for the EUV band

C. Braig, T. Käsebier, E.-B. Kley, and A. Tünnermann  »View Author Affiliations


Optics Express, Vol. 19, Issue 15, pp. 14008-14017 (2011)
http://dx.doi.org/10.1364/OE.19.014008


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Abstract

We report on the development of true free-standing phase transmission gratings for the extreme ultraviolet band. An ultra-nanocrystalline, 300 nm thin diamond film on a backside etched silicon wafer is structured by electron-beam lithography to periods of 1 μm. In this way, flat and stable gratings of 400 μm in diameter are fabricated. First-order net efficiencies up to 28% are obtained from measurements at a synchrotron beamline within a wavelength range from 5.0 nm to 8.3 nm, whereas the 0th order is suppressed to 1% near 6.8 nm. Higher diffraction orders up to the 3rd one contribute less than 7% in sum to the far-field pattern.

© 2011 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

History
Original Manuscript: May 9, 2011
Revised Manuscript: June 9, 2011
Manuscript Accepted: June 19, 2011
Published: July 7, 2011

Citation
C. Braig, T. Käsebier, E.-B. Kley, and A. Tünnermann, "Stand-alone diamond binary phase transmission gratings for the EUV band," Opt. Express 19, 14008-14017 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-15-14008


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References

  1. M. L. Schattenburg, E. H. Anderson, and H. I. Smith, “X-ray/VUV Transmission Gratings for Astrophysical and Laboratory Applications,” Phys. Scripta 41, 13–20 (1990). [CrossRef]
  2. C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D: Appl. Phys. 41, 105202 (2008). [CrossRef]
  3. R. K. Heilmann, M. Ahn, A. Bruccoleri, C.-H. Chang, E. M. Gullikson, P. Mukherjee, and M. L. Schattenburg, “Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands,” Appl. Opt. 50, 1364–1373 (2011). [CrossRef] [PubMed]
  4. H. H. Solak, “Nanolithography with coherent extreme ultraviolet light,” J. Phys. D 39, R171–R188 (2006). [CrossRef]
  5. M. Itou, T. Harada, and T. Kita, “Soft X-ray monochromator with a varied-space plane grating for synchrotron radiation: design and evaluation,” Appl. Opt. 28, 146–153 (1989). [CrossRef] [PubMed]
  6. H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, “High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region,” Appl. Opt. 49, 4450–4459 (2010).
  7. D. R. McMullin, D. L. Judge, C. Tarrio, R. E. Vest, and F. Hanser, “Extreme-ultraviolet efficiency measurements of freestanding transmission gratings,” Appl. Opt. 43, 3797–3801 (2004). [CrossRef] [PubMed]
  8. K. Flanagan, M. Ahn, J. Davis, R. Heilmann, D. Huenemoerder, A. Levine, H. Marshall, G. Prigozhin, A. Rasmussen, G. Ricker, M. Schattenburg, N. Schulz, and Y. Zhao, “Spectrometer concept and design for X-ray astronomy using a blazed transmission grating,” in Optics for EUV, X-Ray, and Gamma-Ray Astronomy III , Stephen L. O’Dell and Giovanni Pareschi, eds., Proc. SPIE6688, 66880Y (2007).
  9. F. Salmassi, P. P. Naulleau, E. M. Gullikson, D. L. Olynick, and J. A. Liddle, “EUV Binary Phase Gratings: Fabrication and Application to Diffractive Optics,” http://escholarship.org/uc/item/6d42k5t7 (2005).
  10. P. Predehl, H. W. Braeuninger, A. C. Brinkman, D. Dewey, J. J. Drake, K. A. Flanagan, T. Gunsing, G. D. Hartner, J. Z. Juda, M. Juda, J. S. Kaastra, H. L. Marshall, and D. A. Swartz, “X-ray calibration of the AXAF Low Energy Transmission Grating Spectrometer: effective area,” in Grazing Incidence and Multilayer X-Ray Optical Systems , R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE3113, 172–180 (1997).
  11. P. P. Naulleau, C. H. Cho, E. M. Gullikson, and J. Bokor, “Transmission phase gratings for EUV interferometry,” J. Synchrotron Rad. 7, 405–410 (2000). [CrossRef]
  12. M. Saidani and H. H. Solak, “High diffraction-efficiency molybdenum gratings for EUV lithography,” Microel. Eng. 86, 483–485 (2009). [CrossRef]
  13. B. X. Yang, “Fresnel and refractive lenses for X-rays,” Nucl. instr. in Phys. Res. A 328, 578–587 (1993). [CrossRef]
  14. C. Braig, P. Predehl, and E.-B. Kley, “Efficient extreme ultraviolet transmission gratings for plasma diagnostics,” Opt. Eng. 50(6), 066501 (2011). [CrossRef]
  15. B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50-30000 eV, Z=1-92,” Atomic Data and Nuclear Data Tables 54(2), 181–342 (1993). [CrossRef]
  16. Diane P. Hickey, Advanced Diamond Technologies Inc., 429 B Weber Road, #286, Romeoville, IL 60446, United States, http://www.thinDiamond.com (personal communication, 2010).
  17. M. Bass, C. DeCusatis, G. Li, V. N. Mahajan, and E. van Stryland, Handbook of Optics: Optical properties of materials, nonlinear optics, quantum optics (McGraw Hill Professional, New York, 2009).
  18. K. S. Wood, M. P. Kowalski, R. G. Cruddace, and M. A. Barstow, “EUV spectroscopy in astrophysics: The role of compact objects,” Adv. Space Res. 38, 1501–1508 (2006). [CrossRef]
  19. D. A. Pommet, M. G. Moharam, and E. B. Grann, “Limits of scalar diffraction theory for diffractive phase elements,” J. Opt. Soc. Am. A 11, 1827–1834 (1994). [CrossRef]

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