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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 15 — Jul. 18, 2011
  • pp: 14008–14017

Stand-alone diamond binary phase transmission gratings for the EUV band

C. Braig, T. Käsebier, E.-B. Kley, and A. Tünnermann  »View Author Affiliations

Optics Express, Vol. 19, Issue 15, pp. 14008-14017 (2011)

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We report on the development of true free-standing phase transmission gratings for the extreme ultraviolet band. An ultra-nanocrystalline, 300 nm thin diamond film on a backside etched silicon wafer is structured by electron-beam lithography to periods of 1 μm. In this way, flat and stable gratings of 400 μm in diameter are fabricated. First-order net efficiencies up to 28% are obtained from measurements at a synchrotron beamline within a wavelength range from 5.0 nm to 8.3 nm, whereas the 0th order is suppressed to 1% near 6.8 nm. Higher diffraction orders up to the 3rd one contribute less than 7% in sum to the far-field pattern.

© 2011 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

Original Manuscript: May 9, 2011
Revised Manuscript: June 9, 2011
Manuscript Accepted: June 19, 2011
Published: July 7, 2011

C. Braig, T. Käsebier, E.-B. Kley, and A. Tünnermann, "Stand-alone diamond binary phase transmission gratings for the EUV band," Opt. Express 19, 14008-14017 (2011)

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