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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 17 — Aug. 15, 2011
  • pp: 16518–16525

Doubling the spatial frequency with cavity resonance lithography

Hyesog Lee and Ravi Verma  »View Author Affiliations


Optics Express, Vol. 19, Issue 17, pp. 16518-16525 (2011)
http://dx.doi.org/10.1364/OE.19.016518


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Abstract

We describe the theory and report the first experimental demonstration of Cavity Resonance Lithography (CRL); a double pattering (DP) technique that can generate patterns on a photoresist 1) with twice the spatial frequency of that of the diffraction limited lithography mask, and 2) at an offset distance that is in the far field of the mask. CRL requires only a single exposure and development step and does not require any additional processes. With commercially available photoresists (PR) and developers, we have recorded a 32.5 nm half-pitch pattern (which is well below the diffraction limit) at an offset distance of 180 nm (which is well beyond the evanescent decay length scales) using 193 nm illumination. We also discuss strategies to improve the minimum feature size and potential implementation schemes.

© 2011 OSA

OCIS Codes
(140.4780) Lasers and laser optics : Optical resonators
(110.4235) Imaging systems : Nanolithography

ToC Category:
Imaging Systems

History
Original Manuscript: June 7, 2011
Revised Manuscript: July 15, 2011
Manuscript Accepted: July 15, 2011
Published: August 12, 2011

Citation
Hyesog Lee and Ravi Verma, "Doubling the spatial frequency with cavity resonance lithography," Opt. Express 19, 16518-16525 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-17-16518


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