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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 22 — Oct. 24, 2011
  • pp: 21929–21937

A calibrator based on the use of low-coherent light source straightness interferometer and compensation method

Shyh-Tsong Lin, Sheng-Lih Yeh, Chi-Shang Chiu, and Mou-Shan Huang  »View Author Affiliations

Optics Express, Vol. 19, Issue 22, pp. 21929-21937 (2011)

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A calibrator utilizing a low-coherent light source straightness interferometer and a compensation method is introduced for straightness measurements in this paper. Where the interference pattern, which is modulated by an envelope function, generated by the interferometer undergoes a shifting as the Wolaston prism of the interferometer experiences a lateral displacement, and the compensation method senses the displacement by driving the prism back to the position to restore the pattern. A setup, which is with a measurement sensitivity of 36.6° /μm, constructed for realizing the calibrator is demonstrated. The experimental results from the uses of the setup reveal that the setup is with a measurement resolution and stability of 0.019 and 0.08μm, respectively, validate the calibrator, and confirm the calibrator’s applicability of straightness measurements and advantage of extensible working distance.

© 2011 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 8, 2011
Revised Manuscript: September 27, 2011
Manuscript Accepted: October 4, 2011
Published: October 21, 2011

Shyh-Tsong Lin, Sheng-Lih Yeh, Chi-Shang Chiu, and Mou-Shan Huang, "A calibrator based on the use of low-coherent light source straightness interferometer and compensation method," Opt. Express 19, 21929-21937 (2011)

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