We show by theory and experiment that silicon-dioxide-cladding gratings for Fabry-Pérot cavities on silicon-on-insulator channel (“wire”) waveguides provide a low-refractive-index perturbation, which is required for several important integrated photonics components. The underlying refractive index perturbation of these gratings is significantly weaker than that of analogous silicon gratings, leading to finer control of the coupling coefficient κ. Our Fabry-Pérot cavities are designed using the transfer-matrix method (TMM) in conjunction with the finite element method (FEM) for calculating the effective index of each waveguide section. Device parameters such as coupling coefficient, κ, Bragg mirror stop band, Bragg mirror reflectivity, and quality factor Q are examined via TMM modeling. Devices are fabricated with representative values of distributed Bragg reflector lengths, cavity lengths, and propagation losses. The measured transmission spectra show excellent agreement with the FEM/TMM calculations.

© 2011 OSA

1. A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y. Kuo, and J. E. Bowers, “A distributed Bragg reflector silicon evanescent laser,” IEEE Photon. Technol. Lett.20, 1667–1669 (2008). [CrossRef]
2. Y. Halioua, A. Bazin, P. Monnier, T. J. Karle, I. Sagnes, G. Roelkens, D. Van Thourhout, F. Raineri, and R. Raj, “III–V photonic crystal wire cavity laser on silicon wafer,” J. Opt. Soc. Am. B27, 2146–2150 (2010). [CrossRef]
3. T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguide,” J. Lightwave Technol.19, 1938–1942 (2001). [CrossRef]
4. P. Muellner, R. Bruck, M. Karl, M. Baus, T. Wahlbrink, and R. Hainberger, “Silicon photonic wire Bragg grating for on-chip wavelength (de)multiplexing employing ring resonators,” in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMF4.
5. P. R. Villeneuve, D. S. Abrams, S. Fan, and J. D. Joannopoulos, “Single-mode waveguide microcavity for fast optical switching,” Opt. Lett.21, 2017–2019 (1996). [CrossRef] [PubMed]
6. M. W. Pruessner, T. H. Stievater, M. S. Ferraro, and W. S. Rabinovich, “Thermo-optic tuning and switching in SOI waveguide Fabry-Perot microcavities,” Opt. Express15, 7557–7563 (2007). [CrossRef] [PubMed]
7. M. Y. Liu and S. Y. Chou, “High-modulation-depth and short-cavity-length silicon Fabry-Perot modulator with two grating Bragg reflectors,” Appl. Phys. Lett.68, 170–172 (1996). [CrossRef]
8. C. A. Barrios, V. R. De Almeida, and M. Lipson, “Low-power-consumption short-length and high-modulation-depth silicon electrooptic modulator,” J. Lightwave Technol.21, 1089–1098 (2003). [CrossRef]
9. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Pérot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32, 533–535 (2007). [CrossRef] [PubMed]
10. J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature390, 143–145 (1997). [CrossRef]
11. P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, “Ultra-high Q/V Fabry-Pérot microcavity on SOI substrate,” Opt. Express15, 16090–16096 (2007). [CrossRef] [PubMed]
12. A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De La Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express16, 12084–12089 (2008). [CrossRef]
13. P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Lončar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett.94, 121106 (2009). [CrossRef]
14. M. Gnan, W. C. L. Hopman, G. Bellanca, R. M. de Ridder, R. M. De La Rue, and P. Bassi, “Closure of the stop-band in photonic wire Bragg gratings,” Opt. Express17, 8830–8842 (2009). [CrossRef] [PubMed]
15. J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B20, 2753–2757 (2002). [CrossRef]
16. I. Giuntoni, A. Gajda, M. Krause, R. Steingrber, J. Bruns, and K. Petermann, “Tunable Bragg reflectors on silicon-on-insulator rib waveguides,” Opt. Express17, 18518–18524 (2009). [CrossRef]
17. I. Giuntoni, D. Stolarek, H. Richter, S. Marschmeyer, J. Bauer, A. Gajda, J. Bruns, B. Tillack, K. Petermann, and L. Zimmermann, “Deep-UV technology for the fabrication of Bragg gratings on SOI Rib Waveguides,” IEEE Photon. Technol. Lett.24, 1894–1896 (2009). [CrossRef]
18. G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett.23, 6–8 (2011).
19. D. T. H. Tan, K. Ikeda, and Y. Fainman, “Cladding-modulated Bragg gratings in silicon waveguides,” Opt. Lett.34, 1357–1359 (2009). [CrossRef] [PubMed]
20. X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett.23, 290–292 (2011).
21. H. C. Kim, K. Ikeda, and Y. Fainman, “Resonant waveguide device with vertical gratings,” Opt. Lett.32, 539–541 (2007). [CrossRef] [PubMed]
22. R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood, “Ultracompact corner-mirrors and T-Branches in silicon-on-insulator,” IEEE Photon. Technol. Lett.14, 65–67 (2002). [CrossRef]
23. R. L. Espinola, J. I. Dadap, R. M. Osgood, S. J. McNab, and Y. A. Vlasov, “Raman amplication in ultrasmall silicon-on-insulator wire waveguides,” Opt. Express12, 3713–3718 (2004). [CrossRef] [PubMed]
24. A. Melloni, “Synthesis of direct-coupled-resonators bandpass filters for WDM systems,” J. Lightwave Technol.20, 296–303 (2002). [CrossRef]
25. A. Yariv and P. Yeh, Photonics Photonics: Optical electronics in modern communications, 6th ed. (Oxford University Press, 2006).
26. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (John Wiley & Sons, 1991). [CrossRef]
27. A. Melloni, M. Floridi, F. Morichetti, and M. Martinelli, “Equivalent circuit of Bragg gratings and its application to Fabry-Pérot cavities,” J. Opt. Soc. Am. A20, 273–281 (2003). [CrossRef]
28. J. Mu, H. Zhang, and W. Huang, “Design of waveguide Bragg gratings with strong index corrugations,” J. Light-wave Technol.26, 1596–1601 (2008). [CrossRef]
29. M. Gnan, H. Bellanca, H. M. H. Chong, P. Bassi, and R. M. De La Rue, “Modelling of photonic wire Bragg gratings,” Opt. Quantum Electron.38, 133148 (2006). [CrossRef]
30. M. Hammer and O. V. Ivanova , “Effective index approximations of photonic crystal slabs: a 2-to-1-D assessment,” Opt. Quantum Electron., 41, 267–283 (2009). [CrossRef]
31. RSoft Design Group, Inc. http://www.rsoftdesign.com .
32. P. Lalanne and J. P. Hugonin, “Bloch-wave engineering for high-Q, small-V microcavities,” IEEE J. Quantum Electron.39, 1430–1438, (2003). [CrossRef]
33. C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, “Modal-reflectivity enhancement by geometry tuning in photonic crystal microcavities,” Opt. Express13, 245–255 (2005). [CrossRef] [PubMed]
34. M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoo, D. M. Lennon, S. Denault, F. Gan, F. X. Kärtner, and T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett.19, 152–154 (2007). [CrossRef]
35. M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, C. M. Wynn, S. T. Palmacci, F. Gan, F. X. Kärtner, and T. M. Lyszczarz, “All silicon infrared photodiodes: photo response and effects of processing temperature,” Opt. Express15, 16886–16895 (2007). [CrossRef] [PubMed]
36. Soitec, http://www.soitec.com .

Appl. Phys. Lett.

• M. Y. Liu and S. Y. Chou, “High-modulation-depth and short-cavity-length silicon Fabry-Perot modulator with two grating Bragg reflectors,” Appl. Phys. Lett.68, 170–172 (1996). [CrossRef]
• P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Lončar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett.94, 121106 (2009). [CrossRef]

IEEE J. Quantum Electron.

• P. Lalanne and J. P. Hugonin, “Bloch-wave engineering for high-Q, small-V microcavities,” IEEE J. Quantum Electron.39, 1430–1438, (2003). [CrossRef]

IEEE Photon. Technol. Lett.

• M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoo, D. M. Lennon, S. Denault, F. Gan, F. X. Kärtner, and T. M. Lyszczarz, “CMOS-compatible all-Si high-speed waveguide photodiodes with responsivity in near-infrared communication band,” IEEE Photon. Technol. Lett.19, 152–154 (2007). [CrossRef]
• X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett.23, 290–292 (2011).
• R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood, “Ultracompact corner-mirrors and T-Branches in silicon-on-insulator,” IEEE Photon. Technol. Lett.14, 65–67 (2002). [CrossRef]
• I. Giuntoni, D. Stolarek, H. Richter, S. Marschmeyer, J. Bauer, A. Gajda, J. Bruns, B. Tillack, K. Petermann, and L. Zimmermann, “Deep-UV technology for the fabrication of Bragg gratings on SOI Rib Waveguides,” IEEE Photon. Technol. Lett.24, 1894–1896 (2009). [CrossRef]
• G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett.23, 6–8 (2011).
• A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y. Kuo, and J. E. Bowers, “A distributed Bragg reflector silicon evanescent laser,” IEEE Photon. Technol. Lett.20, 1667–1669 (2008). [CrossRef]

J. Light-wave Technol.

• J. Mu, H. Zhang, and W. Huang, “Design of waveguide Bragg gratings with strong index corrugations,” J. Light-wave Technol.26, 1596–1601 (2008). [CrossRef]

J. Lightwave Technol.

• A. Melloni, “Synthesis of direct-coupled-resonators bandpass filters for WDM systems,” J. Lightwave Technol.20, 296–303 (2002). [CrossRef]
• T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguide,” J. Lightwave Technol.19, 1938–1942 (2001). [CrossRef]
• C. A. Barrios, V. R. De Almeida, and M. Lipson, “Low-power-consumption short-length and high-modulation-depth silicon electrooptic modulator,” J. Lightwave Technol.21, 1089–1098 (2003). [CrossRef]

J. Opt. Soc. Am. A

• A. Melloni, M. Floridi, F. Morichetti, and M. Martinelli, “Equivalent circuit of Bragg gratings and its application to Fabry-Pérot cavities,” J. Opt. Soc. Am. A20, 273–281 (2003). [CrossRef]

J. Opt. Soc. Am. B

• Y. Halioua, A. Bazin, P. Monnier, T. J. Karle, I. Sagnes, G. Roelkens, D. Van Thourhout, F. Raineri, and R. Raj, “III–V photonic crystal wire cavity laser on silicon wafer,” J. Opt. Soc. Am. B27, 2146–2150 (2010). [CrossRef]

J. Vac. Sci. Technol. B

• J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B20, 2753–2757 (2002). [CrossRef]

Nature

• J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature390, 143–145 (1997). [CrossRef]

Opt. Express

• P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, “Ultra-high Q/V Fabry-Pérot microcavity on SOI substrate,” Opt. Express15, 16090–16096 (2007). [CrossRef] [PubMed]
• A. R. Md Zain, N. P. Johnson, M. Sorel, and R. M. De La Rue, “Ultra high quality factor one dimensional photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI),” Opt. Express16, 12084–12089 (2008). [CrossRef]
• M. Gnan, W. C. L. Hopman, G. Bellanca, R. M. de Ridder, R. M. De La Rue, and P. Bassi, “Closure of the stop-band in photonic wire Bragg gratings,” Opt. Express17, 8830–8842 (2009). [CrossRef] [PubMed]
• I. Giuntoni, A. Gajda, M. Krause, R. Steingrber, J. Bruns, and K. Petermann, “Tunable Bragg reflectors on silicon-on-insulator rib waveguides,” Opt. Express17, 18518–18524 (2009). [CrossRef]
• M. W. Pruessner, T. H. Stievater, M. S. Ferraro, and W. S. Rabinovich, “Thermo-optic tuning and switching in SOI waveguide Fabry-Perot microcavities,” Opt. Express15, 7557–7563 (2007). [CrossRef] [PubMed]
• M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, C. M. Wynn, S. T. Palmacci, F. Gan, F. X. Kärtner, and T. M. Lyszczarz, “All silicon infrared photodiodes: photo response and effects of processing temperature,” Opt. Express15, 16886–16895 (2007). [CrossRef] [PubMed]
• C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, “Modal-reflectivity enhancement by geometry tuning in photonic crystal microcavities,” Opt. Express13, 245–255 (2005). [CrossRef] [PubMed]
• R. L. Espinola, J. I. Dadap, R. M. Osgood, S. J. McNab, and Y. A. Vlasov, “Raman amplication in ultrasmall silicon-on-insulator wire waveguides,” Opt. Express12, 3713–3718 (2004). [CrossRef] [PubMed]

Opt. Lett.

• H. C. Kim, K. Ikeda, and Y. Fainman, “Resonant waveguide device with vertical gratings,” Opt. Lett.32, 539–541 (2007). [CrossRef] [PubMed]
• P. R. Villeneuve, D. S. Abrams, S. Fan, and J. D. Joannopoulos, “Single-mode waveguide microcavity for fast optical switching,” Opt. Lett.21, 2017–2019 (1996). [CrossRef] [PubMed]
• M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Pérot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32, 533–535 (2007). [CrossRef] [PubMed]
• D. T. H. Tan, K. Ikeda, and Y. Fainman, “Cladding-modulated Bragg gratings in silicon waveguides,” Opt. Lett.34, 1357–1359 (2009). [CrossRef] [PubMed]

Opt. Quantum Electron.

• M. Gnan, H. Bellanca, H. M. H. Chong, P. Bassi, and R. M. De La Rue, “Modelling of photonic wire Bragg gratings,” Opt. Quantum Electron.38, 133148 (2006). [CrossRef]
• M. Hammer and O. V. Ivanova , “Effective index approximations of photonic crystal slabs: a 2-to-1-D assessment,” Opt. Quantum Electron., 41, 267–283 (2009). [CrossRef]

Other

• RSoft Design Group, Inc. http://www.rsoftdesign.com .
• A. Yariv and P. Yeh, Photonics Photonics: Optical electronics in modern communications, 6th ed. (Oxford University Press, 2006).
• B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (John Wiley & Sons, 1991). [CrossRef]
• Soitec, http://www.soitec.com .
• P. Muellner, R. Bruck, M. Karl, M. Baus, T. Wahlbrink, and R. Hainberger, “Silicon photonic wire Bragg grating for on-chip wavelength (de)multiplexing employing ring resonators,” in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMF4.

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