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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 3 — Jan. 31, 2011
  • pp: 1680–1690

Nonlinear dependence between the surface reflectance and the duty-cycle of semiconductor nanorod array

Yi-Hao Pai, Yu-Chan Lin, Jai-Lin Tsai, and Gong-Ru Lin  »View Author Affiliations

Optics Express, Vol. 19, Issue 3, pp. 1680-1690 (2011)

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The nonlinear dependence between the duty-cycle of semiconductor nanorod array and its surface reflectance minimization is demonstrated. The duty-cycle control on thin-SiO2 covered Si nanorod array is performed by O2- plasma pre-etching the self-assembled polystyrene nanosphere array mask with area density of 4 × 108 rod/cm−2. The 120-nm high SiO2 covered Si nanorod array is obtained after subsequent CF4/O2 plasma etching for 160 sec. This results in a tunable nanorod diameter from 445 to 285 nm after etching from 30 to 80 sec, corresponding to a varying nanorod duty-cycle from 89% to 57%. The TM-mode reflection analysis shows a diminishing Brewster angle shifted from 71° to 54° with increasing nanorod duty-cycle from 57% to 89% at 532 nm. The greatly reduced small-angle reflectance reveals a nonlinear trend with enlarging duty-cycle, leading to a minimum surface reflectance at nanorod duty-cycle of 85%. Both the simulation and experiment indicate that such a surface reflectance minimum is even lower than that of a uniformly SiO2 covered Si substrate on account of its periodical nanorod array architecture with tuned duty-cycle.

© 2011 OSA

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(310.1210) Thin films : Antireflection coatings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Thin Films

Original Manuscript: June 1, 2010
Revised Manuscript: July 10, 2010
Manuscript Accepted: August 3, 2010
Published: January 14, 2011

Yi-Hao Pai, Yu-Chan Lin, Jai-Lin Tsai, and Gong-Ru Lin, "Nonlinear dependence between the surface reflectance and the duty-cycle of semiconductor nanorod array," Opt. Express 19, 1680-1690 (2011)

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