Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses

doi:10.1364/OE.19.001954

Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses

Ying-Ying Yang, Frederik Süßmann, Sergey Zherebtsov, Ioachim Pupeza, Jan Kaster, Dennis Lehr, Hans-Jörg Fuchs, Ernst-Bernhard Kley, Ernst Fill, Xuan-Ming Duan, Zhen-Sheng Zhao, Ferenc Krausz, Sarah L. Stebbings, and Matthias F. Kling »View Author Affiliations

Optics Express, Vol. 19, Issue 3, pp. 1954-1962 (2011)
http://dx.doi.org/10.1364/OE.19.001954

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Abstract

We designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: December 20, 2010
Revised Manuscript: January 13, 2011
Manuscript Accepted: January 13, 2011
Published: January 19, 2011

Citation
Ying-Ying Yang, Frederik Süßmann, Sergey Zherebtsov, Ioachim Pupeza, Jan Kaster, Dennis Lehr, Hans-Jörg Fuchs, Ernst-Bernhard Kley, Ernst Fill, Xuan-Ming Duan, Zhen-Sheng Zhao, Ferenc Krausz, Sarah L. Stebbings, and Matthias F. Kling, "Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses," Opt. Express 19, 1954-1962 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-3-1954

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References

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993). [CrossRef] [PubMed]
C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997). [CrossRef]
M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007). [CrossRef]
C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005). [CrossRef] [PubMed]
R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005). [CrossRef] [PubMed]
A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008). [CrossRef] [PubMed]
D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008). [CrossRef] [PubMed]
I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010). [CrossRef] [PubMed]
K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006). [CrossRef] [PubMed]
J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007). [CrossRef] [PubMed]
A. Cingöz, D. Yost, J. Ye, A. Ruehl, M. Fermann, and I. Hartl, “Power Scaling of High-Repetition-Rate HHG,” International Conference on Ultrafast Phenomena (2010).
M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986). [CrossRef]
M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995). [CrossRef]
M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995). [CrossRef]
E. D. Palik, G. Ghosh, and E. J. Prucha, eds., Handbook of Optical Constants of Solids, (Academic Press New York, 1985).
M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007). [CrossRef]
T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008). [CrossRef]
T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009). [CrossRef]
I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010). [CrossRef] [PubMed]
J. Kaster, I. Pupeza, T. Eidam, C. Jocher, E. Fill, J. Limpert, R. Holzwarth, B. Bernhardt, T. Udem, T. W. Hänsch, A. Tünnermann, and F. Krausz, “Towards MW Average Powers in Ultrafast High-Repetition-Rate Enhancement Cavities,” HILAS 2011, Istanbul.

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[1] P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993). [CrossRef] [PubMed]

[2] C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997). [CrossRef]

[3] M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007). [CrossRef]

[4] C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005). [CrossRef] [PubMed]

[5] R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005). [CrossRef] [PubMed]

[6] A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008). [CrossRef] [PubMed]

[7] D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008). [CrossRef] [PubMed]

[8] I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010). [CrossRef] [PubMed]

[9] K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006). [CrossRef] [PubMed]

[10] J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007). [CrossRef] [PubMed]

[11] A. Cingöz, D. Yost, J. Ye, A. Ruehl, M. Fermann, and I. Hartl, “Power Scaling of High-Repetition-Rate HHG,” International Conference on Ultrafast Phenomena (2010).

[12] M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986). [CrossRef]

[13] M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995). [CrossRef]

[14] M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995). [CrossRef]

[15] E. D. Palik, G. Ghosh, and E. J. Prucha, eds., Handbook of Optical Constants of Solids, (Academic Press New York, 1985).

[16] M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007). [CrossRef]

[17] T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008). [CrossRef]

[18] T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009). [CrossRef]

[19] I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010). [CrossRef] [PubMed]

[20] J. Kaster, I. Pupeza, T. Eidam, C. Jocher, E. Fill, J. Limpert, R. Holzwarth, B. Bernhardt, T. Udem, T. W. Hänsch, A. Tünnermann, and F. Krausz, “Towards MW Average Powers in Ultrafast High-Repetition-Rate Enhancement Cavities,” HILAS 2011, Istanbul.

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Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses