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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 3 — Jan. 31, 2011
  • pp: 1954–1962

Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses

Ying-Ying Yang, Frederik Süßmann, Sergey Zherebtsov, Ioachim Pupeza, Jan Kaster, Dennis Lehr, Hans-Jörg Fuchs, Ernst-Bernhard Kley, Ernst Fill, Xuan-Ming Duan, Zhen-Sheng Zhao, Ferenc Krausz, Sarah L. Stebbings, and Matthias F. Kling  »View Author Affiliations


Optics Express, Vol. 19, Issue 3, pp. 1954-1962 (2011)
http://dx.doi.org/10.1364/OE.19.001954


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Abstract

We designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.

© 2011 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: December 20, 2010
Revised Manuscript: January 13, 2011
Manuscript Accepted: January 13, 2011
Published: January 19, 2011

Citation
Ying-Ying Yang, Frederik Süßmann, Sergey Zherebtsov, Ioachim Pupeza, Jan Kaster, Dennis Lehr, Hans-Jörg Fuchs, Ernst-Bernhard Kley, Ernst Fill, Xuan-Ming Duan, Zhen-Sheng Zhao, Ferenc Krausz, Sarah L. Stebbings, and Matthias F. Kling, "Optimization and characterization of a highly-efficient diffraction nanograting for MHz
XUV pulses," Opt. Express 19, 1954-1962 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-3-1954


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