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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 5 — Feb. 28, 2011
  • pp: 3952–3961

Optics InfoBase > Optics Express > Volume 19 > Issue 5 > Page 3952

Silicon-polymer hybrid slot waveguide ring-resonator modulator

Michael Gould, Tom Baehr-Jones, Ran Ding, Su Huang, Jingdong Luo, Alex K.-Y. Jen, Jean-Marc Fedeli, Maryse Fournier, and Michael Hochberg  »View Author Affiliations


Optics Express, Vol. 19, Issue 5, pp. 3952-3961 (2011)
http://dx.doi.org/10.1364/OE.19.003952


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Abstract

We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. The tunability is comparable to some of the best ring-based modulators making use of the plasma dispersion effect. The speed is likely limited only by resistance in the strip-loading section, and it should be possible to realize significant improvement with improved processing.

© 2011 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.2790) Integrated optics : Guided waves
(160.5470) Materials : Polymers
(230.2090) Optical devices : Electro-optical devices
(130.4110) Integrated optics : Modulators

ToC Category:
Integrated Optics

History
Original Manuscript: January 4, 2011
Revised Manuscript: February 6, 2011
Manuscript Accepted: February 9, 2011
Published: February 14, 2011

Citation
Michael Gould, Tom Baehr-Jones, Ran Ding, Su Huang, Jingdong Luo, Alex K.-Y. Jen, Jean-Marc Fedeli, Maryse Fournier, and Michael Hochberg, "Silicon-polymer hybrid slot waveguide ring-resonator modulator," Opt. Express 19, 3952-3961 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-5-3952


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