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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 6 — Mar. 14, 2011
  • pp: 5431–5441

Integrating fault tolerance algorithm and circularly polarized ellipsometer for point-of-care applications

Chia-Ming Jan, Yu-Hsun Lee, Kuang-Chong Wu, and Chih-Kung Lee  »View Author Affiliations

Optics Express, Vol. 19, Issue 6, pp. 5431-5441 (2011)

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A circularly polarized ellipsometer was developed to enable real-time measurements of the optical properties of materials. Using a four photo-detector quadrature configuration, a phase modulated ellipsometer was substantially miniaturized which has the ability to achieve a high precision detection limit. With a proven angular resolution of 0.0001 deg achieved by controlling the relative positions of a triangular prism, a paraboloidal and a spherical mirror pair, this new ellipsometer possesses a higher resolution than traditional complex mechanically controlled configurations. Moreover, the addition of an algorithm, FTA (fault tolerance algorithm) was adopted to compensate for the imperfections of the opto-mechanical system which can decrease system measurement reliability. This newly developed system requires only one millisecond or less to complete the measurement task without having to adopt any other modulation approach. The resolution achieved can be as high as 4x10−7 RIU (refractive index unit) which is highly competitive when compared with other commercially available instruments. Our experimental results agreed well with the simulation data which confirms that our quadrature-based circularly polarized ellipsometer with FTA is an effective tool for precise detection of the optical properties of thin films. It also has the potential to be used to monitor the refractive index change of molecules in liquids.

© 2011 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(260.2130) Physical optics : Ellipsometry and polarimetry

ToC Category:
Optical Devices

Original Manuscript: January 4, 2011
Revised Manuscript: February 6, 2011
Manuscript Accepted: February 17, 2011
Published: March 8, 2011

Chia-Ming Jan, Yu-Hsun Lee, Kuang-Chong Wu, and Chih-Kung Lee, "Integrating fault tolerance algorithm and circularly polarized ellipsometer for point-of-care applications," Opt. Express 19, 5431-5441 (2011)

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