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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 8 — Apr. 11, 2011
  • pp: 7139–7146

Optical confinement achieved in ZnO crystal by O+ ions implantation: analysis of waveguide formation and properties

Xianbing Ming, Fei Lu, Jiaojian Yin, Ming Chen, Shaomei Zhang, Xiuhong Liu, Zhenhua Qin, and Yujie Ma  »View Author Affiliations

Optics Express, Vol. 19, Issue 8, pp. 7139-7146 (2011)

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Optical confinement in ZnO crystal was observed by O+ implantation with different MeV energies and doses. Planar optical waveguides were formed in the as-implanted ZnO samples. The optical properties of the planar waveguide were investigated by the prism-coupling and the end-face coupling methods at the wavelength of 633 nm. The crystal lattice damage in the guiding region caused by the O+ ions implantation was analyzed by the Rutherford backscattering/Channeling technique, results show that even high dose at 2 × 1015 ions/cm2 can hardly produce defect in near surface of ZnO. A theoretical model is developed to explain the principle of waveguide formation in ZnO crystal and the refractive index profile in the implanted waveguide was reconstructed accordingly. The experimental result and analysis are significant for application of ZnO crystal, especially for the design of ZnO light emitter devices.

© 2011 OSA

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(160.3130) Materials : Integrated optics materials
(230.7390) Optical devices : Waveguides, planar

ToC Category:
Integrated Optics

Original Manuscript: January 27, 2011
Revised Manuscript: March 5, 2011
Manuscript Accepted: March 9, 2011
Published: March 30, 2011

Xianbing Ming, Fei Lu, Jiaojian Yin, Ming Chen, Shaomei Zhang, Xiuhong Liu, Zhenhua Qin, and Yujie Ma, "Optical confinement achieved in ZnO crystal by O+ ions implantation: analysis of waveguide formation and properties," Opt. Express 19, 7139-7146 (2011)

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