OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 8 — Apr. 11, 2011
  • pp: 7827–7832

Broadband terahertz imaging with highly sensitive silicon CMOS detectors

Franz Schuster, Dominique Coquillat, Hadley Videlier, Maciej Sakowicz, Frédéric Teppe, Laurent Dussopt, Benoît Giffard, Thomas Skotnicki, and Wojciech Knap  »View Author Affiliations


Optics Express, Vol. 19, Issue 8, pp. 7827-7832 (2011)
http://dx.doi.org/10.1364/OE.19.007827


View Full Text Article

Enhanced HTML    Acrobat PDF (1028 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper investigates terahertz detectors fabricated in a low-cost 130 nm silicon CMOS technology. We show that the detectors consisting of a nMOS field effect transistor as rectifying element and an integrated bow-tie coupling antenna achieve a record responsivity above 5 kV/W and a noise equivalent power below 10 pW/Hz0.5 in the important atmospheric window around 300 GHz and at room temperature. We demonstrate furthermore that the same detectors are efficient for imaging in a very wide frequency range from ~0.27 THz up to 1.05 THz. These results pave the way towards high sensitivity focal plane arrays in silicon for terahertz imaging.

© 2011 OSA

OCIS Codes
(040.0040) Detectors : Detectors
(110.0110) Imaging systems : Imaging systems
(110.2970) Imaging systems : Image detection systems
(040.2235) Detectors : Far infrared or terahertz

ToC Category:
Detectors

History
Original Manuscript: February 14, 2011
Revised Manuscript: March 11, 2011
Manuscript Accepted: March 24, 2011
Published: April 7, 2011

Citation
Franz Schuster, Dominique Coquillat, Hadley Videlier, Maciej Sakowicz, Frédéric Teppe, Laurent Dussopt, Benoît Giffard, Thomas Skotnicki, and Wojciech Knap, "Broadband terahertz imaging with highly sensitive silicon CMOS detectors," Opt. Express 19, 7827-7832 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-8-7827


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. W. Knap, F. Teppe, Y. Meziani, N. Dyakonova, J. Lusakowski, F. Boeuf, T. Skotnicki, D. Maude, S. Rumyantsev, and M. S. Shur, “Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors,” Appl. Phys. Lett. 85(4), 675–677 (2004). [CrossRef]
  2. R. Tauk, F. Teppe, S. Boubanga, D. Coquillat, W. Knap, Y. Meziani, C. Gallon, F. Boeuf, T. Skotnicki, C. Fenouillet-Beranger, D. K. Maude, S. Rumyantsev, and M. S. Shur, “Plasma wave detection of terahertz radiation by silicon field effect transistors: responsivity and noise equivalent power,” Appl. Phys. Lett. 89(25), 253511 (2006). [CrossRef]
  3. E. A. Shaner, M. Lee, M. C. Wanke, A. D. Grine, J. L. Reno, and S. J. Allen, “Single-quantum-well grating-gated terahertz plasmon detectors,” Appl. Phys. Lett. 87(19), 193507 (2005), http://link.aip.org/link/?APL/87/193507/1 . [CrossRef]
  4. T. Otsuji, M. Hanabe, T. Nishimura, and E. Sano, “A grating-bicoupled plasma-wave photomixer with resonant-cavity enhanced structure,” Opt. Express 14(11), 4815–4825 (2006), http://www.opticsexpress.org/abstract.cfm?URI=oe-14-11-4815 . [CrossRef] [PubMed]
  5. D. Coquillat, S. Nadar, F. Teppe, N. Dyakonova, S. Boubanga-Tombet, W. Knap, T. Nishimura, T. Otsuji, Y. M. Meziani, G. M. Tsymbalov, and V. V. Popov, “Room temperature detection of sub-terahertz radiation in double-grating-gate transistors,” Opt. Express 18(6), 6024–6032 (2010), http://www.opticsexpress.org/abstract.cfm?URI=oe-18-6-6024 . [CrossRef] [PubMed]
  6. V. V. Popov, D. V. Fateev, O. V. Polischuk, and M. S. Shur, “Enhanced electromagnetic coupling between terahertz radiation and plasmons in a grating-gate transistor structure on membrane substrate,” Opt. Express 18(16), 16771–16776 (2010), http://www.opticsexpress.org/abstract.cfm?URI=oe-18-16-16771 . [CrossRef] [PubMed]
  7. U. Pfeiffer, E. Ojefors, A. Lisauskas, D. Glaab, F. Voltolina, V. Nzogang, P. Bolivar, and H. Roskos, “A CMOS focal-plane array for terahertz imaging,” in Proceedings of 33rd International Conference on Infrared, Millimeter and Terahertz Waves (2008), pp. 1 –3.
  8. E. Ojefors, U. Pfeiffer, A. Lisauskas, and H. Roskos, “A 0.65 THz focal-plane array in a quarter-micron CMOS process technology,” IEEE J. Solid-state Circuits 44(7), 1968–1976 (2009). [CrossRef]
  9. E. Ojefors, N. Baktash, Y. Zhao, and U. Pfeiffer, “Terahertz imaging detectors in a 65-nm CMOS SOI technology,” in Proceedings of 36th European Solid-State Circuits Conference (2010).
  10. M. Dyakonov and M. Shur, “Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid,” IEEE Trans. Electron. Dev. 43(3), 380–387 (1996). [CrossRef]
  11. W. Knap, V. Kachorovskii, Y. Deng, S. Rumyantsev, J. Lü, R. Gaska, M. Shur, G. Simin, X. Hu, M. Khan, C. A. Saylor, and L. C. Brunel, “Nonresonant detection of terahertz radiation in field effect transistors,” J. Appl. Phys. 91(11), 9346–9353 (2002). [CrossRef]
  12. W. Knap, M. Dyakonov, D. Coquillat, F. Teppe, N. Dyakonova, J. Lusakowski, K. Karpierz, M. Sakowicz, G. Valusis, D. Seliuta, I. Kasalynas, A. El Fatimy, Y. M. Meziani, and T. Otsuji, “Field effect transistors for terahertz detection: physics and first imaging applications,” J. Infrared Milli. Terahz. Waves 30, 1319–1337 (2009).
  13. A. Lisauskas, U. Pfeiffer, E. Öjefors, P. H. Bolìvar, D. Glaab, and H. G. Roskos, “Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors,” J. Appl. Phys. 105(11), 114511 (2009), http://link.aip.org/link/?JAP/105/114511/1 . [CrossRef]
  14. D. Perenzoni, M. Perenzoni, L. Gonzo, A. D. Capobianco, and F. Sacchetto, “Analysis and design of a CMOS-based terahertz sensor and readout,” Proc. SPIE 7726, 772618, 772618-12 (2010), http://link.aip.org/link/?PSI/7726/772618/1 . [CrossRef]
  15. A. Dobroiu, M. Yamashita, Y. N. Ohshima, Y. Morita, C. Otani, and K. Kawase, “Terahertz imaging system based on a backward-wave oscillator,” Appl. Opt. 43(30), 5637–5646 (2004). [CrossRef] [PubMed]
  16. A. Lisauskas, D. Glaab, H. G. Roskos, E. Oejefors, and U. R. Pfeiffer, “Terahertz imaging with Si MOSFET focal-plane arrays,” Proc. SPIE 7215, 72150J, 72150J-11 (2009), http://link.aip.org/link/?PSI/7215/72150J/1 . [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited