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40 Gbit/s low-loss silicon optical modulator based on a pipin diodeMelissa Ziebell, Delphine Marris-Morini, Gilles Rasigade, Jean-Marc Fédéli, Paul Crozat, Eric Cassan, David Bouville, and Laurent Vivien »View Author Affiliations
Melissa Ziebell,1
Delphine Marris-Morini,1,*
Gilles Rasigade,1
Jean-Marc Fédéli,2
Paul Crozat,1
Eric Cassan,1
David Bouville,1
and Laurent Vivien1
1Institut d'Electronique Fondamentale, Univ. Paris-Sud, CNRS UMR 8622, Bât. 220, 91405 Orsay Cedex, France 2CEA,LETI, Minatec Campus 17 rue des Martyrs, F-38054 GRENOBLE cedex 9, France *Corresponding author: delphine.morini@u-psud.fr |
Optics Express, Vol. 20, Issue 10, pp. 10591-10596 (2012)
http://dx.doi.org/10.1364/OE.20.010591
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Abstract
40 Gbit/s low-loss silicon optical modulators are demonstrated. The devices are based on the carrier depletion effect in a pipin diode to generate a good compromise between high efficiency, speed and low optical loss. The diode is embedded in a Mach-Zehnder interferometer, and a self-aligned fabrication process was used to obtain precise localization of the active p-doped region in the middle of the waveguide. Using a 4.7 mm (resp. 0.95 mm) long phase shifter, the modulator exhibits an extinction ratio of 6.6 dB (resp. 3.2 dB), simultaneously with an optical loss of 6 dB (resp. 4.5 dB) at the same operating point.
© 2012 OSA
OCIS Codes
(130.0250) Integrated optics : Optoelectronics
(200.4650) Optics in computing : Optical interconnects
(230.2090) Optical devices : Electro-optical devices
(130.4110) Integrated optics : Modulators
ToC Category:
Integrated Optics
History
Original Manuscript: February 2, 2012
Revised Manuscript: April 6, 2012
Manuscript Accepted: April 12, 2012
Published: April 24, 2012
Citation
Melissa Ziebell, Delphine Marris-Morini, Gilles Rasigade, Jean-Marc Fédéli, Paul Crozat, Eric Cassan, David Bouville, and Laurent Vivien, "40 Gbit/s low-loss silicon optical modulator based on a pipin diode," Opt. Express 20, 10591-10596 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-10-10591
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References
- M. Paniccia and R. Won, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- J. W. Park, J.-B. You, I. G. Kim, and G. Kim, “High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode,” Opt. Express17(18), 15520–15524 (2009). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- M. Paniccia and R. Won, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- M. Paniccia and R. Won, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
Electron. Lett.
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
IEEE J. Sel. Top. Quantum Electron.
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
Nat. Photonics
- M. Paniccia and R. Won, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
Opt. Express
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, J.-M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express16(1), 334–339 (2008). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fédéli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
- J. W. Park, J.-B. You, I. G. Kim, and G. Kim, “High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode,” Opt. Express17(18), 15520–15524 (2009). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
Opt. Lett.
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett.35(21), 3700–3702 (2010). [CrossRef] [PubMed]
Proc. IEEE
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
2011, Rasigade, Opt. Express
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- M. Paniccia and R. Won, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Sel. Top. Quantum Electron.16(1), 179–184 (2010). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J.-M. Fédéli, E. Cassan, X. Le Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE97(7), 1199–1215 (2009). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
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