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A high-accuracy and convenient figure measurement system for large convex lens |
Optics Express, Vol. 20, Issue 10, pp. 10761-10775 (2012)
http://dx.doi.org/10.1364/OE.20.010761
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Abstract
We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.
© 2012 OSA
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.1000) Optical design and fabrication : Aberration compensation
(220.4830) Optical design and fabrication : Systems design
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: January 10, 2012
Revised Manuscript: March 30, 2012
Manuscript Accepted: April 5, 2012
Published: April 25, 2012
Citation
Zhihui Tian, Wang Yang, Yongxin Sui, Yusi Kang, Weiqi Liu, and Huaijiang Yang, "A high-accuracy and convenient figure measurement system for large convex lens," Opt. Express 20, 10761-10775 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-10-10761
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